2/22/2012	9:36:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/22/2012	9:36:52 AM	Recipe started at 9:36 AM
2/22/2012	9:36:52 AM	Helium valve closed
2/22/2012	9:36:52 AM	H2 valve closed
2/22/2012	9:36:52 AM	BCl3 valve closed
2/22/2012	9:36:52 AM	PH3 valve closed
2/22/2012	9:36:52 AM	SiCl4 pre valve closed
2/22/2012	9:36:52 AM	SiCl4 post valve closed
2/22/2012	9:36:52 AM	Main Vac valve closed
2/22/2012	9:36:52 AM	Bypass valve closed
2/22/2012	9:36:52 AM	Bubbler valve closed
2/22/2012	9:36:52 AM	Helium MFC set to  0.000000
2/22/2012	9:36:52 AM	H2 MFC set to  0.000000
2/22/2012	9:36:52 AM	BCl3 MFC set to  0.000000
2/22/2012	9:36:52 AM	PH3 MFC set to  0.000000
2/22/2012	9:36:52 AM	SiCl4 MFC set to  0.000000
2/22/2012	9:36:52 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:36:52 AM	Tube furnace set to 0
2/22/2012	9:36:55 AM	H2 valve closed
2/22/2012	9:36:55 AM	BCl3 valve closed
2/22/2012	9:36:55 AM	PH3 valve closed
2/22/2012	9:36:55 AM	SiCl4 pre valve closed
2/22/2012	9:36:55 AM	SiCl4 post valve closed
2/22/2012	9:36:55 AM	Main Vac valve closed
2/22/2012	9:36:55 AM	Bypass valve closed
2/22/2012	9:36:55 AM	Bubbler valve closed
2/22/2012	9:36:55 AM	Helium valve opened
2/22/2012	9:36:55 AM	Helium MFC set to  500.000000
2/22/2012	9:36:55 AM	H2 MFC set to  0.000000
2/22/2012	9:36:55 AM	BCl3 MFC set to  0.000000
2/22/2012	9:36:55 AM	PH3 MFC set to  0.000000
2/22/2012	9:36:55 AM	SiCl4 MFC set to  0.000000
2/22/2012	9:36:55 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:36:56 AM	Tube furnace set to 0
2/22/2012	9:38:00 AM	Helium valve closed
2/22/2012	9:38:00 AM	H2 valve closed
2/22/2012	9:38:00 AM	BCl3 valve closed
2/22/2012	9:38:00 AM	PH3 valve closed
2/22/2012	9:38:00 AM	SiCl4 pre valve closed
2/22/2012	9:38:00 AM	SiCl4 post valve closed
2/22/2012	9:38:00 AM	Main Vac valve closed
2/22/2012	9:38:00 AM	Bypass valve closed
2/22/2012	9:38:00 AM	Bubbler valve closed
2/22/2012	9:38:00 AM	Helium MFC set to  0.000000
2/22/2012	9:38:00 AM	H2 MFC set to  0.000000
2/22/2012	9:38:00 AM	BCl3 MFC set to  0.000000
2/22/2012	9:38:00 AM	PH3 MFC set to  0.000000
2/22/2012	9:38:00 AM	SiCl4 MFC set to  0.000000
2/22/2012	9:38:00 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:38:01 AM	Tube furnace set to 0
2/22/2012	9:38:02 AM	Run finished at 9:38 AM
2/22/2012	9:38:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/22/2012	9:41:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/22/2012	9:41:57 AM	Recipe started at 9:41 AM
2/22/2012	9:41:57 AM	Helium valve closed
2/22/2012	9:41:57 AM	H2 valve closed
2/22/2012	9:41:57 AM	BCl3 valve closed
2/22/2012	9:41:57 AM	PH3 valve closed
2/22/2012	9:41:57 AM	SiCl4 pre valve closed
2/22/2012	9:41:57 AM	SiCl4 post valve closed
2/22/2012	9:41:57 AM	Main Vac valve closed
2/22/2012	9:41:57 AM	Bubbler valve closed
2/22/2012	9:41:57 AM	Bypass valve opened
2/22/2012	9:41:57 AM	Helium MFC set to  0.000000
2/22/2012	9:41:57 AM	H2 MFC set to  0.000000
2/22/2012	9:41:57 AM	BCl3 MFC set to  0.000000
2/22/2012	9:41:57 AM	PH3 MFC set to  0.000000
2/22/2012	9:41:57 AM	SiCl4 MFC set to  0.000000
2/22/2012	9:41:57 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:41:58 AM	Tube furnace set to 0
2/22/2012	9:43:01 AM	Helium valve closed
2/22/2012	9:43:01 AM	H2 valve closed
2/22/2012	9:43:01 AM	BCl3 valve closed
2/22/2012	9:43:01 AM	PH3 valve closed
2/22/2012	9:43:01 AM	SiCl4 pre valve closed
2/22/2012	9:43:01 AM	SiCl4 post valve closed
2/22/2012	9:43:01 AM	Main Vac valve closed
2/22/2012	9:43:01 AM	Bubbler valve closed
2/22/2012	9:43:01 AM	Bypass valve opened
2/22/2012	9:43:01 AM	Helium MFC set to  0.000000
2/22/2012	9:43:01 AM	H2 MFC set to  0.000000
2/22/2012	9:43:01 AM	BCl3 MFC set to  0.000000
2/22/2012	9:43:01 AM	PH3 MFC set to  0.000000
2/22/2012	9:43:01 AM	SiCl4 MFC set to  0.000000
2/22/2012	9:43:01 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:43:01 AM	Tube furnace set to 0
2/22/2012	9:44:01 AM	Helium valve closed
2/22/2012	9:44:01 AM	H2 valve closed
2/22/2012	9:44:01 AM	BCl3 valve closed
2/22/2012	9:44:01 AM	PH3 valve closed
2/22/2012	9:44:01 AM	SiCl4 pre valve closed
2/22/2012	9:44:01 AM	SiCl4 post valve closed
2/22/2012	9:44:01 AM	Bypass valve closed
2/22/2012	9:44:01 AM	Bubbler valve closed
2/22/2012	9:44:01 AM	Main Vac valve opened
2/22/2012	9:44:01 AM	Helium MFC set to  0.000000
2/22/2012	9:44:01 AM	H2 MFC set to  0.000000
2/22/2012	9:44:01 AM	BCl3 MFC set to  0.000000
2/22/2012	9:44:01 AM	PH3 MFC set to  0.000000
2/22/2012	9:44:01 AM	SiCl4 MFC set to  0.000000
2/22/2012	9:44:01 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:44:01 AM	Tube furnace set to 0
2/22/2012	9:44:02 AM	Run finished at 9:44 AM
2/22/2012	9:44:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/22/2012	9:45:24 AM	Tube furnace set to 200
2/22/2012	9:47:28 AM	Main Vac valve closed
2/22/2012	9:47:37 AM	Main Vac valve opened
2/22/2012	9:47:52 AM	Main Vac valve closed
2/22/2012	9:48:19 AM	Main Vac valve opened
2/22/2012	9:48:37 AM	Main Vac valve closed
2/22/2012	9:49:25 AM	Main Vac valve opened
2/22/2012	9:49:42 AM	Recipe started at 9:49 AM
2/22/2012	9:49:42 AM	Helium valve closed
2/22/2012	9:49:42 AM	H2 valve closed
2/22/2012	9:49:42 AM	BCl3 valve closed
2/22/2012	9:49:42 AM	PH3 valve closed
2/22/2012	9:49:42 AM	SiCl4 pre valve closed
2/22/2012	9:49:42 AM	SiCl4 post valve closed
2/22/2012	9:49:42 AM	Bypass valve closed
2/22/2012	9:49:42 AM	Bubbler valve closed
2/22/2012	9:49:42 AM	Main Vac valve opened
2/22/2012	9:49:42 AM	Helium MFC set to  0.000000
2/22/2012	9:49:42 AM	H2 MFC set to  0.000000
2/22/2012	9:49:42 AM	BCl3 MFC set to  0.000000
2/22/2012	9:49:42 AM	PH3 MFC set to  0.000000
2/22/2012	9:49:42 AM	SiCl4 MFC set to  0.000000
2/22/2012	9:49:42 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:49:43 AM	Tube furnace set to 200
2/22/2012	9:50:13 AM	H2 valve closed
2/22/2012	9:50:13 AM	BCl3 valve closed
2/22/2012	9:50:13 AM	PH3 valve closed
2/22/2012	9:50:13 AM	SiCl4 pre valve closed
2/22/2012	9:50:13 AM	SiCl4 post valve closed
2/22/2012	9:50:13 AM	Bypass valve closed
2/22/2012	9:50:13 AM	Bubbler valve closed
2/22/2012	9:50:13 AM	Helium valve opened
2/22/2012	9:50:13 AM	Main Vac valve opened
2/22/2012	9:50:13 AM	Helium MFC set to  20.000000
2/22/2012	9:50:13 AM	H2 MFC set to  0.000000
2/22/2012	9:50:13 AM	BCl3 MFC set to  0.000000
2/22/2012	9:50:13 AM	PH3 MFC set to  0.000000
2/22/2012	9:50:13 AM	SiCl4 MFC set to  0.000000
2/22/2012	9:50:13 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:50:13 AM	Tube furnace set to 200
2/22/2012	9:50:43 AM	Helium valve closed
2/22/2012	9:50:43 AM	H2 valve closed
2/22/2012	9:50:43 AM	BCl3 valve closed
2/22/2012	9:50:43 AM	PH3 valve closed
2/22/2012	9:50:43 AM	SiCl4 pre valve closed
2/22/2012	9:50:43 AM	SiCl4 post valve closed
2/22/2012	9:50:43 AM	Bypass valve closed
2/22/2012	9:50:43 AM	Bubbler valve closed
2/22/2012	9:50:43 AM	Main Vac valve opened
2/22/2012	9:50:43 AM	Helium MFC set to  0.000000
2/22/2012	9:50:43 AM	H2 MFC set to  0.000000
2/22/2012	9:50:43 AM	BCl3 MFC set to  0.000000
2/22/2012	9:50:43 AM	PH3 MFC set to  0.000000
2/22/2012	9:50:43 AM	SiCl4 MFC set to  0.000000
2/22/2012	9:50:43 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:50:43 AM	Tube furnace set to 200
2/22/2012	9:51:13 AM	H2 valve closed
2/22/2012	9:51:13 AM	BCl3 valve closed
2/22/2012	9:51:13 AM	PH3 valve closed
2/22/2012	9:51:13 AM	SiCl4 pre valve closed
2/22/2012	9:51:13 AM	SiCl4 post valve closed
2/22/2012	9:51:13 AM	Bypass valve closed
2/22/2012	9:51:13 AM	Bubbler valve closed
2/22/2012	9:51:13 AM	Helium valve opened
2/22/2012	9:51:13 AM	Main Vac valve opened
2/22/2012	9:51:13 AM	Helium MFC set to  20.000000
2/22/2012	9:51:13 AM	H2 MFC set to  0.000000
2/22/2012	9:51:13 AM	BCl3 MFC set to  0.000000
2/22/2012	9:51:13 AM	PH3 MFC set to  0.000000
2/22/2012	9:51:13 AM	SiCl4 MFC set to  0.000000
2/22/2012	9:51:13 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:51:13 AM	Tube furnace set to 200
2/22/2012	9:51:43 AM	Helium valve closed
2/22/2012	9:51:43 AM	H2 valve closed
2/22/2012	9:51:43 AM	BCl3 valve closed
2/22/2012	9:51:43 AM	PH3 valve closed
2/22/2012	9:51:43 AM	SiCl4 pre valve closed
2/22/2012	9:51:43 AM	SiCl4 post valve closed
2/22/2012	9:51:43 AM	Bypass valve closed
2/22/2012	9:51:43 AM	Bubbler valve closed
2/22/2012	9:51:43 AM	Main Vac valve opened
2/22/2012	9:51:43 AM	Helium MFC set to  0.000000
2/22/2012	9:51:43 AM	H2 MFC set to  0.000000
2/22/2012	9:51:43 AM	BCl3 MFC set to  0.000000
2/22/2012	9:51:43 AM	PH3 MFC set to  0.000000
2/22/2012	9:51:43 AM	SiCl4 MFC set to  0.000000
2/22/2012	9:51:43 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:51:43 AM	Tube furnace set to 200
2/22/2012	9:52:13 AM	H2 valve closed
2/22/2012	9:52:13 AM	BCl3 valve closed
2/22/2012	9:52:13 AM	PH3 valve closed
2/22/2012	9:52:13 AM	SiCl4 pre valve closed
2/22/2012	9:52:13 AM	SiCl4 post valve closed
2/22/2012	9:52:13 AM	Bypass valve closed
2/22/2012	9:52:13 AM	Bubbler valve closed
2/22/2012	9:52:13 AM	Helium valve opened
2/22/2012	9:52:13 AM	Main Vac valve opened
2/22/2012	9:52:13 AM	Helium MFC set to  20.000000
2/22/2012	9:52:13 AM	H2 MFC set to  0.000000
2/22/2012	9:52:13 AM	BCl3 MFC set to  0.000000
2/22/2012	9:52:13 AM	PH3 MFC set to  0.000000
2/22/2012	9:52:13 AM	SiCl4 MFC set to  0.000000
2/22/2012	9:52:13 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:52:14 AM	Tube furnace set to 200
2/22/2012	9:52:44 AM	Helium valve closed
2/22/2012	9:52:44 AM	H2 valve closed
2/22/2012	9:52:44 AM	BCl3 valve closed
2/22/2012	9:52:44 AM	PH3 valve closed
2/22/2012	9:52:44 AM	SiCl4 pre valve closed
2/22/2012	9:52:44 AM	SiCl4 post valve closed
2/22/2012	9:52:44 AM	Bypass valve closed
2/22/2012	9:52:44 AM	Bubbler valve closed
2/22/2012	9:52:44 AM	Main Vac valve opened
2/22/2012	9:52:44 AM	Helium MFC set to  0.000000
2/22/2012	9:52:44 AM	H2 MFC set to  0.000000
2/22/2012	9:52:44 AM	BCl3 MFC set to  0.000000
2/22/2012	9:52:44 AM	PH3 MFC set to  0.000000
2/22/2012	9:52:44 AM	SiCl4 MFC set to  0.000000
2/22/2012	9:52:44 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:52:44 AM	Tube furnace set to 200
2/22/2012	9:53:14 AM	H2 valve closed
2/22/2012	9:53:14 AM	BCl3 valve closed
2/22/2012	9:53:14 AM	PH3 valve closed
2/22/2012	9:53:14 AM	SiCl4 pre valve closed
2/22/2012	9:53:14 AM	SiCl4 post valve closed
2/22/2012	9:53:14 AM	Bypass valve closed
2/22/2012	9:53:14 AM	Bubbler valve closed
2/22/2012	9:53:14 AM	Helium valve opened
2/22/2012	9:53:14 AM	Main Vac valve opened
2/22/2012	9:53:14 AM	Helium MFC set to  20.000000
2/22/2012	9:53:14 AM	H2 MFC set to  0.000000
2/22/2012	9:53:14 AM	BCl3 MFC set to  0.000000
2/22/2012	9:53:14 AM	PH3 MFC set to  0.000000
2/22/2012	9:53:14 AM	SiCl4 MFC set to  0.000000
2/22/2012	9:53:14 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:53:14 AM	Tube furnace set to 200
2/22/2012	9:53:44 AM	Helium valve closed
2/22/2012	9:53:44 AM	H2 valve closed
2/22/2012	9:53:44 AM	BCl3 valve closed
2/22/2012	9:53:44 AM	PH3 valve closed
2/22/2012	9:53:44 AM	SiCl4 pre valve closed
2/22/2012	9:53:44 AM	SiCl4 post valve closed
2/22/2012	9:53:44 AM	Bypass valve closed
2/22/2012	9:53:44 AM	Bubbler valve closed
2/22/2012	9:53:44 AM	Main Vac valve opened
2/22/2012	9:53:44 AM	Helium MFC set to  0.000000
2/22/2012	9:53:44 AM	H2 MFC set to  0.000000
2/22/2012	9:53:44 AM	BCl3 MFC set to  0.000000
2/22/2012	9:53:44 AM	PH3 MFC set to  0.000000
2/22/2012	9:53:44 AM	SiCl4 MFC set to  0.000000
2/22/2012	9:53:44 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:53:44 AM	Tube furnace set to 200
2/22/2012	9:54:14 AM	H2 valve closed
2/22/2012	9:54:14 AM	BCl3 valve closed
2/22/2012	9:54:14 AM	PH3 valve closed
2/22/2012	9:54:14 AM	SiCl4 pre valve closed
2/22/2012	9:54:14 AM	SiCl4 post valve closed
2/22/2012	9:54:14 AM	Bypass valve closed
2/22/2012	9:54:14 AM	Bubbler valve closed
2/22/2012	9:54:14 AM	Helium valve opened
2/22/2012	9:54:14 AM	Main Vac valve opened
2/22/2012	9:54:14 AM	Helium MFC set to  20.000000
2/22/2012	9:54:14 AM	H2 MFC set to  0.000000
2/22/2012	9:54:14 AM	BCl3 MFC set to  0.000000
2/22/2012	9:54:14 AM	PH3 MFC set to  0.000000
2/22/2012	9:54:14 AM	SiCl4 MFC set to  0.000000
2/22/2012	9:54:14 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:54:14 AM	Tube furnace set to 200
2/22/2012	9:54:44 AM	Helium valve closed
2/22/2012	9:54:44 AM	H2 valve closed
2/22/2012	9:54:44 AM	BCl3 valve closed
2/22/2012	9:54:44 AM	PH3 valve closed
2/22/2012	9:54:44 AM	SiCl4 pre valve closed
2/22/2012	9:54:44 AM	SiCl4 post valve closed
2/22/2012	9:54:44 AM	Bypass valve closed
2/22/2012	9:54:44 AM	Bubbler valve closed
2/22/2012	9:54:44 AM	Main Vac valve opened
2/22/2012	9:54:44 AM	Helium MFC set to  0.000000
2/22/2012	9:54:44 AM	H2 MFC set to  0.000000
2/22/2012	9:54:44 AM	BCl3 MFC set to  0.000000
2/22/2012	9:54:44 AM	PH3 MFC set to  0.000000
2/22/2012	9:54:44 AM	SiCl4 MFC set to  0.000000
2/22/2012	9:54:44 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:54:45 AM	Tube furnace set to 200
2/22/2012	9:55:15 AM	H2 valve closed
2/22/2012	9:55:15 AM	BCl3 valve closed
2/22/2012	9:55:15 AM	PH3 valve closed
2/22/2012	9:55:15 AM	SiCl4 pre valve closed
2/22/2012	9:55:15 AM	SiCl4 post valve closed
2/22/2012	9:55:15 AM	Bypass valve closed
2/22/2012	9:55:15 AM	Bubbler valve closed
2/22/2012	9:55:15 AM	Helium valve opened
2/22/2012	9:55:15 AM	Main Vac valve opened
2/22/2012	9:55:15 AM	Helium MFC set to  20.000000
2/22/2012	9:55:15 AM	H2 MFC set to  0.000000
2/22/2012	9:55:15 AM	BCl3 MFC set to  0.000000
2/22/2012	9:55:15 AM	PH3 MFC set to  0.000000
2/22/2012	9:55:15 AM	SiCl4 MFC set to  0.000000
2/22/2012	9:55:15 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:55:15 AM	Tube furnace set to 200
2/22/2012	9:55:45 AM	Helium valve closed
2/22/2012	9:55:45 AM	H2 valve closed
2/22/2012	9:55:45 AM	BCl3 valve closed
2/22/2012	9:55:45 AM	PH3 valve closed
2/22/2012	9:55:45 AM	SiCl4 pre valve closed
2/22/2012	9:55:45 AM	SiCl4 post valve closed
2/22/2012	9:55:45 AM	Bypass valve closed
2/22/2012	9:55:45 AM	Bubbler valve closed
2/22/2012	9:55:45 AM	Main Vac valve opened
2/22/2012	9:55:45 AM	Helium MFC set to  0.000000
2/22/2012	9:55:45 AM	H2 MFC set to  0.000000
2/22/2012	9:55:45 AM	BCl3 MFC set to  0.000000
2/22/2012	9:55:45 AM	PH3 MFC set to  0.000000
2/22/2012	9:55:45 AM	SiCl4 MFC set to  0.000000
2/22/2012	9:55:45 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:55:45 AM	Tube furnace set to 0
2/22/2012	9:56:15 AM	H2 valve closed
2/22/2012	9:56:15 AM	BCl3 valve closed
2/22/2012	9:56:15 AM	PH3 valve closed
2/22/2012	9:56:15 AM	SiCl4 pre valve closed
2/22/2012	9:56:15 AM	SiCl4 post valve closed
2/22/2012	9:56:15 AM	Bypass valve closed
2/22/2012	9:56:15 AM	Bubbler valve closed
2/22/2012	9:56:15 AM	Helium valve opened
2/22/2012	9:56:15 AM	Main Vac valve opened
2/22/2012	9:56:15 AM	Helium MFC set to  20.000000
2/22/2012	9:56:15 AM	H2 MFC set to  0.000000
2/22/2012	9:56:15 AM	BCl3 MFC set to  0.000000
2/22/2012	9:56:15 AM	PH3 MFC set to  0.000000
2/22/2012	9:56:15 AM	SiCl4 MFC set to  0.000000
2/22/2012	9:56:15 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:56:15 AM	Tube furnace set to 0
2/22/2012	9:56:45 AM	Helium valve closed
2/22/2012	9:56:45 AM	H2 valve closed
2/22/2012	9:56:45 AM	BCl3 valve closed
2/22/2012	9:56:45 AM	PH3 valve closed
2/22/2012	9:56:45 AM	SiCl4 pre valve closed
2/22/2012	9:56:45 AM	SiCl4 post valve closed
2/22/2012	9:56:45 AM	Bypass valve closed
2/22/2012	9:56:45 AM	Bubbler valve closed
2/22/2012	9:56:45 AM	Main Vac valve opened
2/22/2012	9:56:45 AM	Helium MFC set to  0.000000
2/22/2012	9:56:45 AM	H2 MFC set to  0.000000
2/22/2012	9:56:45 AM	BCl3 MFC set to  0.000000
2/22/2012	9:56:45 AM	PH3 MFC set to  0.000000
2/22/2012	9:56:45 AM	SiCl4 MFC set to  0.000000
2/22/2012	9:56:45 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:56:45 AM	Tube furnace set to 0
2/22/2012	9:57:15 AM	H2 valve closed
2/22/2012	9:57:15 AM	BCl3 valve closed
2/22/2012	9:57:15 AM	PH3 valve closed
2/22/2012	9:57:15 AM	SiCl4 pre valve closed
2/22/2012	9:57:15 AM	SiCl4 post valve closed
2/22/2012	9:57:15 AM	Bypass valve closed
2/22/2012	9:57:15 AM	Bubbler valve closed
2/22/2012	9:57:15 AM	Helium valve opened
2/22/2012	9:57:15 AM	Main Vac valve opened
2/22/2012	9:57:15 AM	Helium MFC set to  20.000000
2/22/2012	9:57:16 AM	H2 MFC set to  0.000000
2/22/2012	9:57:16 AM	BCl3 MFC set to  0.000000
2/22/2012	9:57:16 AM	PH3 MFC set to  0.000000
2/22/2012	9:57:16 AM	SiCl4 MFC set to  0.000000
2/22/2012	9:57:16 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:57:16 AM	Tube furnace set to 0
2/22/2012	9:57:46 AM	Helium valve closed
2/22/2012	9:57:46 AM	H2 valve closed
2/22/2012	9:57:46 AM	BCl3 valve closed
2/22/2012	9:57:46 AM	PH3 valve closed
2/22/2012	9:57:46 AM	SiCl4 pre valve closed
2/22/2012	9:57:46 AM	SiCl4 post valve closed
2/22/2012	9:57:46 AM	Bypass valve closed
2/22/2012	9:57:46 AM	Bubbler valve closed
2/22/2012	9:57:46 AM	Main Vac valve opened
2/22/2012	9:57:46 AM	Helium MFC set to  0.000000
2/22/2012	9:57:46 AM	H2 MFC set to  0.000000
2/22/2012	9:57:46 AM	BCl3 MFC set to  0.000000
2/22/2012	9:57:46 AM	PH3 MFC set to  0.000000
2/22/2012	9:57:46 AM	SiCl4 MFC set to  0.000000
2/22/2012	9:57:46 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:57:46 AM	Tube furnace set to 200
2/22/2012	9:58:16 AM	H2 valve closed
2/22/2012	9:58:16 AM	BCl3 valve closed
2/22/2012	9:58:16 AM	PH3 valve closed
2/22/2012	9:58:16 AM	SiCl4 pre valve closed
2/22/2012	9:58:16 AM	SiCl4 post valve closed
2/22/2012	9:58:16 AM	Bypass valve closed
2/22/2012	9:58:16 AM	Bubbler valve closed
2/22/2012	9:58:16 AM	Helium valve opened
2/22/2012	9:58:16 AM	Main Vac valve opened
2/22/2012	9:58:16 AM	Helium MFC set to  20.000000
2/22/2012	9:58:16 AM	H2 MFC set to  0.000000
2/22/2012	9:58:16 AM	BCl3 MFC set to  0.000000
2/22/2012	9:58:16 AM	PH3 MFC set to  0.000000
2/22/2012	9:58:16 AM	SiCl4 MFC set to  0.000000
2/22/2012	9:58:16 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:58:16 AM	Tube furnace set to 0
2/22/2012	9:58:46 AM	Helium valve closed
2/22/2012	9:58:46 AM	H2 valve closed
2/22/2012	9:58:46 AM	BCl3 valve closed
2/22/2012	9:58:46 AM	PH3 valve closed
2/22/2012	9:58:46 AM	SiCl4 pre valve closed
2/22/2012	9:58:46 AM	SiCl4 post valve closed
2/22/2012	9:58:46 AM	Bypass valve closed
2/22/2012	9:58:46 AM	Bubbler valve closed
2/22/2012	9:58:46 AM	Main Vac valve opened
2/22/2012	9:58:46 AM	Helium MFC set to  0.000000
2/22/2012	9:58:46 AM	H2 MFC set to  0.000000
2/22/2012	9:58:46 AM	BCl3 MFC set to  0.000000
2/22/2012	9:58:46 AM	PH3 MFC set to  0.000000
2/22/2012	9:58:46 AM	SiCl4 MFC set to  0.000000
2/22/2012	9:58:46 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:58:46 AM	Tube furnace set to 200
2/22/2012	9:59:16 AM	H2 valve closed
2/22/2012	9:59:16 AM	BCl3 valve closed
2/22/2012	9:59:16 AM	PH3 valve closed
2/22/2012	9:59:16 AM	SiCl4 pre valve closed
2/22/2012	9:59:16 AM	SiCl4 post valve closed
2/22/2012	9:59:16 AM	Bypass valve closed
2/22/2012	9:59:16 AM	Bubbler valve closed
2/22/2012	9:59:16 AM	Helium valve opened
2/22/2012	9:59:16 AM	Main Vac valve opened
2/22/2012	9:59:16 AM	Helium MFC set to  20.000000
2/22/2012	9:59:16 AM	H2 MFC set to  0.000000
2/22/2012	9:59:16 AM	BCl3 MFC set to  0.000000
2/22/2012	9:59:16 AM	PH3 MFC set to  0.000000
2/22/2012	9:59:16 AM	SiCl4 MFC set to  0.000000
2/22/2012	9:59:16 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:59:16 AM	Tube furnace set to 200
2/22/2012	9:59:46 AM	Helium valve closed
2/22/2012	9:59:46 AM	H2 valve closed
2/22/2012	9:59:47 AM	BCl3 valve closed
2/22/2012	9:59:47 AM	PH3 valve closed
2/22/2012	9:59:47 AM	SiCl4 pre valve closed
2/22/2012	9:59:47 AM	SiCl4 post valve closed
2/22/2012	9:59:47 AM	Bypass valve closed
2/22/2012	9:59:47 AM	Bubbler valve closed
2/22/2012	9:59:47 AM	Main Vac valve opened
2/22/2012	9:59:47 AM	Helium MFC set to  0.000000
2/22/2012	9:59:47 AM	H2 MFC set to  0.000000
2/22/2012	9:59:47 AM	BCl3 MFC set to  0.000000
2/22/2012	9:59:47 AM	PH3 MFC set to  0.000000
2/22/2012	9:59:47 AM	SiCl4 MFC set to  0.000000
2/22/2012	9:59:47 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:59:47 AM	Tube furnace set to 200
2/22/2012	10:00:17 AM	H2 valve closed
2/22/2012	10:00:17 AM	BCl3 valve closed
2/22/2012	10:00:17 AM	PH3 valve closed
2/22/2012	10:00:17 AM	SiCl4 pre valve closed
2/22/2012	10:00:17 AM	SiCl4 post valve closed
2/22/2012	10:00:17 AM	Bypass valve closed
2/22/2012	10:00:17 AM	Bubbler valve closed
2/22/2012	10:00:17 AM	Helium valve opened
2/22/2012	10:00:17 AM	Main Vac valve opened
2/22/2012	10:00:17 AM	Helium MFC set to  20.000000
2/22/2012	10:00:17 AM	H2 MFC set to  0.000000
2/22/2012	10:00:17 AM	BCl3 MFC set to  0.000000
2/22/2012	10:00:17 AM	PH3 MFC set to  0.000000
2/22/2012	10:00:17 AM	SiCl4 MFC set to  0.000000
2/22/2012	10:00:17 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	10:00:17 AM	Tube furnace set to 200
2/22/2012	10:00:47 AM	Helium valve closed
2/22/2012	10:00:47 AM	H2 valve closed
2/22/2012	10:00:47 AM	BCl3 valve closed
2/22/2012	10:00:47 AM	PH3 valve closed
2/22/2012	10:00:47 AM	SiCl4 pre valve closed
2/22/2012	10:00:47 AM	SiCl4 post valve closed
2/22/2012	10:00:47 AM	Bypass valve closed
2/22/2012	10:00:47 AM	Bubbler valve closed
2/22/2012	10:00:47 AM	Main Vac valve opened
2/22/2012	10:00:47 AM	Helium MFC set to  0.000000
2/22/2012	10:00:47 AM	H2 MFC set to  0.000000
2/22/2012	10:00:47 AM	BCl3 MFC set to  0.000000
2/22/2012	10:00:47 AM	PH3 MFC set to  0.000000
2/22/2012	10:00:47 AM	SiCl4 MFC set to  0.000000
2/22/2012	10:00:47 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	10:00:47 AM	Tube furnace set to 200
2/22/2012	10:01:17 AM	H2 valve closed
2/22/2012	10:01:17 AM	BCl3 valve closed
2/22/2012	10:01:17 AM	PH3 valve closed
2/22/2012	10:01:17 AM	SiCl4 pre valve closed
2/22/2012	10:01:17 AM	SiCl4 post valve closed
2/22/2012	10:01:17 AM	Bypass valve closed
2/22/2012	10:01:17 AM	Bubbler valve closed
2/22/2012	10:01:17 AM	Helium valve opened
2/22/2012	10:01:17 AM	Main Vac valve opened
2/22/2012	10:01:17 AM	Helium MFC set to  20.000000
2/22/2012	10:01:17 AM	H2 MFC set to  0.000000
2/22/2012	10:01:17 AM	BCl3 MFC set to  0.000000
2/22/2012	10:01:17 AM	PH3 MFC set to  0.000000
2/22/2012	10:01:17 AM	SiCl4 MFC set to  0.000000
2/22/2012	10:01:17 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	10:01:17 AM	Tube furnace set to 200
2/22/2012	10:01:47 AM	Helium valve closed
2/22/2012	10:01:47 AM	H2 valve closed
2/22/2012	10:01:47 AM	BCl3 valve closed
2/22/2012	10:01:47 AM	PH3 valve closed
2/22/2012	10:01:47 AM	SiCl4 pre valve closed
2/22/2012	10:01:47 AM	SiCl4 post valve closed
2/22/2012	10:01:47 AM	Bypass valve closed
2/22/2012	10:01:47 AM	Bubbler valve closed
2/22/2012	10:01:47 AM	Main Vac valve opened
2/22/2012	10:01:47 AM	Helium MFC set to  0.000000
2/22/2012	10:01:47 AM	H2 MFC set to  0.000000
2/22/2012	10:01:47 AM	BCl3 MFC set to  0.000000
2/22/2012	10:01:47 AM	PH3 MFC set to  0.000000
2/22/2012	10:01:47 AM	SiCl4 MFC set to  0.000000
2/22/2012	10:01:47 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	10:01:48 AM	Tube furnace set to 200
2/22/2012	10:02:18 AM	H2 valve closed
2/22/2012	10:02:18 AM	BCl3 valve closed
2/22/2012	10:02:18 AM	PH3 valve closed
2/22/2012	10:02:18 AM	SiCl4 pre valve closed
2/22/2012	10:02:18 AM	SiCl4 post valve closed
2/22/2012	10:02:18 AM	Bypass valve closed
2/22/2012	10:02:18 AM	Bubbler valve closed
2/22/2012	10:02:18 AM	Helium valve opened
2/22/2012	10:02:18 AM	Main Vac valve opened
2/22/2012	10:02:18 AM	Helium MFC set to  20.000000
2/22/2012	10:02:18 AM	H2 MFC set to  0.000000
2/22/2012	10:02:18 AM	BCl3 MFC set to  0.000000
2/22/2012	10:02:18 AM	PH3 MFC set to  0.000000
2/22/2012	10:02:18 AM	SiCl4 MFC set to  0.000000
2/22/2012	10:02:18 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	10:02:18 AM	Tube furnace set to 200
2/22/2012	10:02:48 AM	Helium valve closed
2/22/2012	10:02:48 AM	H2 valve closed
2/22/2012	10:02:48 AM	BCl3 valve closed
2/22/2012	10:02:48 AM	PH3 valve closed
2/22/2012	10:02:48 AM	SiCl4 pre valve closed
2/22/2012	10:02:48 AM	SiCl4 post valve closed
2/22/2012	10:02:48 AM	Bypass valve closed
2/22/2012	10:02:48 AM	Bubbler valve closed
2/22/2012	10:02:48 AM	Main Vac valve opened
2/22/2012	10:02:48 AM	Helium MFC set to  0.000000
2/22/2012	10:02:48 AM	H2 MFC set to  0.000000
2/22/2012	10:02:48 AM	BCl3 MFC set to  0.000000
2/22/2012	10:02:48 AM	PH3 MFC set to  0.000000
2/22/2012	10:02:48 AM	SiCl4 MFC set to  0.000000
2/22/2012	10:02:48 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	10:02:48 AM	Tube furnace set to 200
2/22/2012	10:03:18 AM	H2 valve closed
2/22/2012	10:03:18 AM	BCl3 valve closed
2/22/2012	10:03:18 AM	PH3 valve closed
2/22/2012	10:03:18 AM	SiCl4 pre valve closed
2/22/2012	10:03:18 AM	SiCl4 post valve closed
2/22/2012	10:03:18 AM	Bypass valve closed
2/22/2012	10:03:18 AM	Bubbler valve closed
2/22/2012	10:03:18 AM	Helium valve opened
2/22/2012	10:03:18 AM	Main Vac valve opened
2/22/2012	10:03:18 AM	Helium MFC set to  20.000000
2/22/2012	10:03:18 AM	H2 MFC set to  0.000000
2/22/2012	10:03:18 AM	BCl3 MFC set to  0.000000
2/22/2012	10:03:18 AM	PH3 MFC set to  0.000000
2/22/2012	10:03:18 AM	SiCl4 MFC set to  0.000000
2/22/2012	10:03:18 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	10:03:18 AM	Tube furnace set to 200
2/22/2012	10:03:48 AM	Helium valve closed
2/22/2012	10:03:48 AM	H2 valve closed
2/22/2012	10:03:48 AM	BCl3 valve closed
2/22/2012	10:03:48 AM	PH3 valve closed
2/22/2012	10:03:48 AM	SiCl4 pre valve closed
2/22/2012	10:03:48 AM	SiCl4 post valve closed
2/22/2012	10:03:48 AM	Bypass valve closed
2/22/2012	10:03:48 AM	Bubbler valve closed
2/22/2012	10:03:48 AM	Main Vac valve opened
2/22/2012	10:03:48 AM	Helium MFC set to  0.000000
2/22/2012	10:03:48 AM	H2 MFC set to  0.000000
2/22/2012	10:03:48 AM	BCl3 MFC set to  0.000000
2/22/2012	10:03:48 AM	PH3 MFC set to  0.000000
2/22/2012	10:03:48 AM	SiCl4 MFC set to  0.000000
2/22/2012	10:03:48 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	10:03:48 AM	Tube furnace set to 200
2/22/2012	10:04:18 AM	H2 valve closed
2/22/2012	10:04:18 AM	BCl3 valve closed
2/22/2012	10:04:18 AM	PH3 valve closed
2/22/2012	10:04:18 AM	SiCl4 pre valve closed
2/22/2012	10:04:18 AM	SiCl4 post valve closed
2/22/2012	10:04:18 AM	Bypass valve closed
2/22/2012	10:04:18 AM	Bubbler valve closed
2/22/2012	10:04:18 AM	Helium valve opened
2/22/2012	10:04:18 AM	Main Vac valve opened
2/22/2012	10:04:18 AM	Helium MFC set to  20.000000
2/22/2012	10:04:18 AM	H2 MFC set to  0.000000
2/22/2012	10:04:18 AM	BCl3 MFC set to  0.000000
2/22/2012	10:04:18 AM	PH3 MFC set to  0.000000
2/22/2012	10:04:18 AM	SiCl4 MFC set to  0.000000
2/22/2012	10:04:18 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	10:04:19 AM	Tube furnace set to 200
2/22/2012	10:04:49 AM	Helium valve closed
2/22/2012	10:04:49 AM	H2 valve closed
2/22/2012	10:04:49 AM	BCl3 valve closed
2/22/2012	10:04:49 AM	PH3 valve closed
2/22/2012	10:04:49 AM	SiCl4 pre valve closed
2/22/2012	10:04:49 AM	SiCl4 post valve closed
2/22/2012	10:04:49 AM	Bypass valve closed
2/22/2012	10:04:49 AM	Bubbler valve closed
2/22/2012	10:04:49 AM	Main Vac valve opened
2/22/2012	10:04:49 AM	Helium MFC set to  0.000000
2/22/2012	10:04:49 AM	H2 MFC set to  0.000000
2/22/2012	10:04:49 AM	BCl3 MFC set to  0.000000
2/22/2012	10:04:49 AM	PH3 MFC set to  0.000000
2/22/2012	10:04:49 AM	SiCl4 MFC set to  0.000000
2/22/2012	10:04:49 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	10:04:49 AM	Tube furnace set to 200
2/22/2012	10:04:50 AM	Run finished at 10:04 AM
2/22/2012	10:05:17 AM	Main Vac valve closed
2/22/2012	10:05:24 AM	Main Vac valve opened
2/22/2012	10:30:55 AM	Main Vac valve closed
2/22/2012	10:31:07 AM	Main Vac valve opened
2/22/2012	10:35:04 AM	Recipe started at 10:35 AM
2/22/2012	10:35:04 AM	Helium valve closed
2/22/2012	10:35:04 AM	H2 valve closed
2/22/2012	10:35:04 AM	BCl3 valve closed
2/22/2012	10:35:04 AM	PH3 valve closed
2/22/2012	10:35:04 AM	SiCl4 pre valve closed
2/22/2012	10:35:04 AM	SiCl4 post valve closed
2/22/2012	10:35:04 AM	Main Vac valve closed
2/22/2012	10:35:04 AM	Bypass valve closed
2/22/2012	10:35:04 AM	Bubbler valve closed
2/22/2012	10:35:04 AM	Helium MFC set to  0.000000
2/22/2012	10:35:04 AM	H2 MFC set to  0.000000
2/22/2012	10:35:04 AM	BCl3 MFC set to  0.000000
2/22/2012	10:35:04 AM	PH3 MFC set to  0.000000
2/22/2012	10:35:04 AM	SiCl4 MFC set to  0.000000
2/22/2012	10:35:04 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	10:35:04 AM	Tube furnace set to 0
2/22/2012	10:35:07 AM	Helium valve closed
2/22/2012	10:35:07 AM	BCl3 valve closed
2/22/2012	10:35:07 AM	PH3 valve closed
2/22/2012	10:35:07 AM	SiCl4 pre valve closed
2/22/2012	10:35:07 AM	SiCl4 post valve closed
2/22/2012	10:35:07 AM	Main Vac valve closed
2/22/2012	10:35:07 AM	Bypass valve closed
2/22/2012	10:35:07 AM	Bubbler valve closed
2/22/2012	10:35:07 AM	H2 valve opened
2/22/2012	10:35:07 AM	Helium MFC set to  0.000000
2/22/2012	10:35:07 AM	H2 MFC set to  500.000000
2/22/2012	10:35:07 AM	BCl3 MFC set to  0.000000
2/22/2012	10:35:07 AM	PH3 MFC set to  0.000000
2/22/2012	10:35:07 AM	SiCl4 MFC set to  0.000000
2/22/2012	10:35:07 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	10:35:07 AM	Tube furnace set to 0
2/22/2012	10:36:10 AM	Helium valve closed
2/22/2012	10:36:10 AM	BCl3 valve closed
2/22/2012	10:36:10 AM	PH3 valve closed
2/22/2012	10:36:10 AM	SiCl4 pre valve closed
2/22/2012	10:36:10 AM	SiCl4 post valve closed
2/22/2012	10:36:10 AM	Main Vac valve closed
2/22/2012	10:36:10 AM	Bypass valve closed
2/22/2012	10:36:10 AM	H2 valve opened
2/22/2012	10:36:10 AM	Bubbler valve opened
2/22/2012	10:36:10 AM	Helium MFC set to  0.000000
2/22/2012	10:36:10 AM	H2 MFC set to  500.000000
2/22/2012	10:36:10 AM	BCl3 MFC set to  0.000000
2/22/2012	10:36:10 AM	PH3 MFC set to  0.000000
2/22/2012	10:36:10 AM	SiCl4 MFC set to  0.000000
2/22/2012	10:36:10 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	10:36:10 AM	Tube furnace set to 0
2/22/2012	10:36:11 AM	Helium valve closed
2/22/2012	10:36:11 AM	BCl3 valve closed
2/22/2012	10:36:11 AM	PH3 valve closed
2/22/2012	10:36:11 AM	SiCl4 pre valve closed
2/22/2012	10:36:11 AM	SiCl4 post valve closed
2/22/2012	10:36:11 AM	Main Vac valve closed
2/22/2012	10:36:11 AM	Bypass valve closed
2/22/2012	10:36:11 AM	H2 valve opened
2/22/2012	10:36:11 AM	Bubbler valve opened
2/22/2012	10:36:11 AM	Helium MFC set to  0.000000
2/22/2012	10:36:11 AM	H2 MFC set to  500.000000
2/22/2012	10:36:11 AM	BCl3 MFC set to  0.000000
2/22/2012	10:36:11 AM	PH3 MFC set to  0.000000
2/22/2012	10:36:11 AM	SiCl4 MFC set to  0.000000
2/22/2012	10:36:11 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	10:36:11 AM	Tube furnace set to 1000
2/22/2012	10:56:11 AM	Helium valve closed
2/22/2012	10:56:11 AM	PH3 valve closed
2/22/2012	10:56:11 AM	Main Vac valve closed
2/22/2012	10:56:11 AM	Bypass valve closed
2/22/2012	10:56:11 AM	H2 valve opened
2/22/2012	10:56:11 AM	BCl3 valve opened
2/22/2012	10:56:11 AM	SiCl4 pre valve opened
2/22/2012	10:56:11 AM	SiCl4 post valve opened
2/22/2012	10:56:11 AM	Bubbler valve opened
2/22/2012	10:56:11 AM	Helium MFC set to  0.000000
2/22/2012	10:56:11 AM	H2 MFC set to  450.000000
2/22/2012	10:56:11 AM	BCl3 MFC set to  1.500000
2/22/2012	10:56:11 AM	PH3 MFC set to  0.000000
2/22/2012	10:56:11 AM	SiCl4 MFC set to  50.000000
2/22/2012	10:56:11 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	10:56:12 AM	Tube furnace set to 1000
2/22/2012	11:08:12 AM	Helium valve closed
2/22/2012	11:08:12 AM	BCl3 valve closed
2/22/2012	11:08:12 AM	PH3 valve closed
2/22/2012	11:08:12 AM	SiCl4 pre valve closed
2/22/2012	11:08:12 AM	SiCl4 post valve closed
2/22/2012	11:08:12 AM	Main Vac valve closed
2/22/2012	11:08:12 AM	Bypass valve closed
2/22/2012	11:08:12 AM	H2 valve opened
2/22/2012	11:08:12 AM	Bubbler valve opened
2/22/2012	11:08:12 AM	Helium MFC set to  0.000000
2/22/2012	11:08:12 AM	H2 MFC set to  500.000000
2/22/2012	11:08:12 AM	BCl3 MFC set to  0.000000
2/22/2012	11:08:12 AM	PH3 MFC set to  0.000000
2/22/2012	11:08:12 AM	SiCl4 MFC set to  0.000000
2/22/2012	11:08:12 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:08:12 AM	Tube furnace set to 950
2/22/2012	11:10:12 AM	Helium valve closed
2/22/2012	11:10:12 AM	BCl3 valve closed
2/22/2012	11:10:12 AM	PH3 valve closed
2/22/2012	11:10:12 AM	SiCl4 pre valve closed
2/22/2012	11:10:12 AM	SiCl4 post valve closed
2/22/2012	11:10:12 AM	Main Vac valve closed
2/22/2012	11:10:12 AM	Bypass valve closed
2/22/2012	11:10:12 AM	H2 valve opened
2/22/2012	11:10:12 AM	Bubbler valve opened
2/22/2012	11:10:12 AM	Helium MFC set to  0.000000
2/22/2012	11:10:12 AM	H2 MFC set to  500.000000
2/22/2012	11:10:12 AM	BCl3 MFC set to  0.000000
2/22/2012	11:10:12 AM	PH3 MFC set to  0.000000
2/22/2012	11:10:12 AM	SiCl4 MFC set to  0.000000
2/22/2012	11:10:12 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:10:12 AM	Tube furnace set to 900
2/22/2012	11:12:12 AM	Helium valve closed
2/22/2012	11:12:12 AM	BCl3 valve closed
2/22/2012	11:12:12 AM	PH3 valve closed
2/22/2012	11:12:12 AM	SiCl4 pre valve closed
2/22/2012	11:12:12 AM	SiCl4 post valve closed
2/22/2012	11:12:12 AM	Main Vac valve closed
2/22/2012	11:12:12 AM	Bypass valve closed
2/22/2012	11:12:12 AM	H2 valve opened
2/22/2012	11:12:12 AM	Bubbler valve opened
2/22/2012	11:12:12 AM	Helium MFC set to  0.000000
2/22/2012	11:12:12 AM	H2 MFC set to  500.000000
2/22/2012	11:12:12 AM	BCl3 MFC set to  0.000000
2/22/2012	11:12:12 AM	PH3 MFC set to  0.000000
2/22/2012	11:12:12 AM	SiCl4 MFC set to  0.000000
2/22/2012	11:12:12 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:12:12 AM	Tube furnace set to 850
2/22/2012	11:14:12 AM	H2 valve closed
2/22/2012	11:14:12 AM	BCl3 valve closed
2/22/2012	11:14:12 AM	PH3 valve closed
2/22/2012	11:14:12 AM	SiCl4 pre valve closed
2/22/2012	11:14:12 AM	SiCl4 post valve closed
2/22/2012	11:14:12 AM	Main Vac valve closed
2/22/2012	11:14:12 AM	Bypass valve closed
2/22/2012	11:14:12 AM	Helium valve opened
2/22/2012	11:14:12 AM	Bubbler valve opened
2/22/2012	11:14:12 AM	Helium MFC set to  500.000000
2/22/2012	11:14:12 AM	H2 MFC set to  0.000000
2/22/2012	11:14:12 AM	BCl3 MFC set to  0.000000
2/22/2012	11:14:12 AM	PH3 MFC set to  0.000000
2/22/2012	11:14:12 AM	SiCl4 MFC set to  0.000000
2/22/2012	11:14:12 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:14:12 AM	Tube furnace set to 800
2/22/2012	11:16:12 AM	H2 valve closed
2/22/2012	11:16:12 AM	BCl3 valve closed
2/22/2012	11:16:12 AM	PH3 valve closed
2/22/2012	11:16:12 AM	SiCl4 pre valve closed
2/22/2012	11:16:12 AM	SiCl4 post valve closed
2/22/2012	11:16:12 AM	Main Vac valve closed
2/22/2012	11:16:12 AM	Bypass valve closed
2/22/2012	11:16:12 AM	Helium valve opened
2/22/2012	11:16:12 AM	Bubbler valve opened
2/22/2012	11:16:12 AM	Helium MFC set to  500.000000
2/22/2012	11:16:12 AM	H2 MFC set to  0.000000
2/22/2012	11:16:12 AM	BCl3 MFC set to  0.000000
2/22/2012	11:16:12 AM	PH3 MFC set to  0.000000
2/22/2012	11:16:12 AM	SiCl4 MFC set to  0.000000
2/22/2012	11:16:12 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:16:13 AM	Tube furnace set to 750
2/22/2012	11:18:13 AM	H2 valve closed
2/22/2012	11:18:13 AM	BCl3 valve closed
2/22/2012	11:18:13 AM	PH3 valve closed
2/22/2012	11:18:13 AM	SiCl4 pre valve closed
2/22/2012	11:18:13 AM	SiCl4 post valve closed
2/22/2012	11:18:13 AM	Main Vac valve closed
2/22/2012	11:18:13 AM	Bypass valve closed
2/22/2012	11:18:13 AM	Helium valve opened
2/22/2012	11:18:13 AM	Bubbler valve opened
2/22/2012	11:18:13 AM	Helium MFC set to  500.000000
2/22/2012	11:18:13 AM	H2 MFC set to  0.000000
2/22/2012	11:18:13 AM	BCl3 MFC set to  0.000000
2/22/2012	11:18:13 AM	PH3 MFC set to  0.000000
2/22/2012	11:18:13 AM	SiCl4 MFC set to  0.000000
2/22/2012	11:18:13 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:18:13 AM	Tube furnace set to 0
2/22/2012	11:37:25 AM	Helium valve closed
2/22/2012	11:37:25 AM	H2 valve closed
2/22/2012	11:37:25 AM	BCl3 valve closed
2/22/2012	11:37:25 AM	PH3 valve closed
2/22/2012	11:37:25 AM	SiCl4 pre valve closed
2/22/2012	11:37:25 AM	SiCl4 post valve closed
2/22/2012	11:37:25 AM	Main Vac valve closed
2/22/2012	11:37:25 AM	Bypass valve closed
2/22/2012	11:37:25 AM	Bubbler valve closed
2/22/2012	11:37:25 AM	Helium MFC set to  0.000000
2/22/2012	11:37:25 AM	H2 MFC set to  0.000000
2/22/2012	11:37:25 AM	BCl3 MFC set to  0.000000
2/22/2012	11:37:25 AM	PH3 MFC set to  0.000000
2/22/2012	11:37:25 AM	SiCl4 MFC set to  0.000000
2/22/2012	11:37:25 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:37:25 AM	Tube furnace set to 0
2/22/2012	11:37:26 AM	Helium valve closed
2/22/2012	11:37:26 AM	H2 valve closed
2/22/2012	11:37:26 AM	BCl3 valve closed
2/22/2012	11:37:26 AM	PH3 valve closed
2/22/2012	11:37:26 AM	SiCl4 pre valve closed
2/22/2012	11:37:26 AM	SiCl4 post valve closed
2/22/2012	11:37:26 AM	Main Vac valve closed
2/22/2012	11:37:26 AM	Bubbler valve closed
2/22/2012	11:37:26 AM	Bypass valve opened
2/22/2012	11:37:26 AM	Helium MFC set to  0.000000
2/22/2012	11:37:26 AM	H2 MFC set to  0.000000
2/22/2012	11:37:26 AM	BCl3 MFC set to  0.000000
2/22/2012	11:37:26 AM	PH3 MFC set to  0.000000
2/22/2012	11:37:26 AM	SiCl4 MFC set to  0.000000
2/22/2012	11:37:26 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:37:27 AM	Tube furnace set to 0
2/22/2012	11:38:18 AM	Helium valve closed
2/22/2012	11:38:18 AM	H2 valve closed
2/22/2012	11:38:18 AM	BCl3 valve closed
2/22/2012	11:38:18 AM	PH3 valve closed
2/22/2012	11:38:18 AM	SiCl4 pre valve closed
2/22/2012	11:38:18 AM	SiCl4 post valve closed
2/22/2012	11:38:18 AM	Main Vac valve closed
2/22/2012	11:38:18 AM	Bubbler valve closed
2/22/2012	11:38:18 AM	Bypass valve opened
2/22/2012	11:38:18 AM	Helium MFC set to  0.000000
2/22/2012	11:38:18 AM	H2 MFC set to  0.000000
2/22/2012	11:38:18 AM	BCl3 MFC set to  0.000000
2/22/2012	11:38:18 AM	PH3 MFC set to  0.000000
2/22/2012	11:38:18 AM	SiCl4 MFC set to  0.000000
2/22/2012	11:38:18 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:38:18 AM	Tube furnace set to 0
2/22/2012	11:38:24 AM	Run aborted at 11:38 AM
2/22/2012	11:38:24 AM	Helium valve closed
2/22/2012	11:38:24 AM	H2 valve closed
2/22/2012	11:38:24 AM	BCl3 valve closed
2/22/2012	11:38:24 AM	PH3 valve closed
2/22/2012	11:38:24 AM	SiCl4 pre valve closed
2/22/2012	11:38:24 AM	SiCl4 post valve closed
2/22/2012	11:38:24 AM	Bypass valve closed
2/22/2012	11:38:24 AM	Main Vac valve closed
2/22/2012	11:38:24 AM	Bubbler valve closed
2/22/2012	11:38:24 AM	Helium MFC set to  0.000000
2/22/2012	11:38:24 AM	H2 MFC set to  0.000000
2/22/2012	11:38:24 AM	BCl3 MFC set to  0.000000
2/22/2012	11:38:24 AM	PH3 MFC set to  0.000000
2/22/2012	11:38:24 AM	SiCl4 MFC set to  0.000000
2/22/2012	11:38:24 AM	Tube furnace set to 0
2/22/2012	11:38:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/22/2012	11:38:29 AM	Recipe started at 11:38 AM
2/22/2012	11:38:29 AM	Helium valve closed
2/22/2012	11:38:29 AM	H2 valve closed
2/22/2012	11:38:29 AM	BCl3 valve closed
2/22/2012	11:38:29 AM	PH3 valve closed
2/22/2012	11:38:29 AM	SiCl4 pre valve closed
2/22/2012	11:38:29 AM	SiCl4 post valve closed
2/22/2012	11:38:29 AM	Main Vac valve closed
2/22/2012	11:38:29 AM	Bypass valve closed
2/22/2012	11:38:29 AM	Bubbler valve closed
2/22/2012	11:38:29 AM	Helium MFC set to  0.000000
2/22/2012	11:38:29 AM	H2 MFC set to  0.000000
2/22/2012	11:38:29 AM	BCl3 MFC set to  0.000000
2/22/2012	11:38:29 AM	PH3 MFC set to  0.000000
2/22/2012	11:38:29 AM	SiCl4 MFC set to  0.000000
2/22/2012	11:38:29 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:38:30 AM	Tube furnace set to 0
2/22/2012	11:38:33 AM	H2 valve closed
2/22/2012	11:38:33 AM	BCl3 valve closed
2/22/2012	11:38:33 AM	PH3 valve closed
2/22/2012	11:38:33 AM	SiCl4 pre valve closed
2/22/2012	11:38:33 AM	SiCl4 post valve closed
2/22/2012	11:38:33 AM	Main Vac valve closed
2/22/2012	11:38:33 AM	Bypass valve closed
2/22/2012	11:38:33 AM	Bubbler valve closed
2/22/2012	11:38:33 AM	Helium valve opened
2/22/2012	11:38:33 AM	Helium MFC set to  500.000000
2/22/2012	11:38:33 AM	H2 MFC set to  0.000000
2/22/2012	11:38:33 AM	BCl3 MFC set to  0.000000
2/22/2012	11:38:33 AM	PH3 MFC set to  0.000000
2/22/2012	11:38:33 AM	SiCl4 MFC set to  0.000000
2/22/2012	11:38:33 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:38:33 AM	Tube furnace set to 0
2/22/2012	11:39:37 AM	Helium valve closed
2/22/2012	11:39:37 AM	H2 valve closed
2/22/2012	11:39:37 AM	BCl3 valve closed
2/22/2012	11:39:37 AM	PH3 valve closed
2/22/2012	11:39:37 AM	SiCl4 pre valve closed
2/22/2012	11:39:37 AM	SiCl4 post valve closed
2/22/2012	11:39:37 AM	Main Vac valve closed
2/22/2012	11:39:37 AM	Bypass valve closed
2/22/2012	11:39:37 AM	Bubbler valve closed
2/22/2012	11:39:37 AM	Helium MFC set to  0.000000
2/22/2012	11:39:37 AM	H2 MFC set to  0.000000
2/22/2012	11:39:37 AM	BCl3 MFC set to  0.000000
2/22/2012	11:39:37 AM	PH3 MFC set to  0.000000
2/22/2012	11:39:37 AM	SiCl4 MFC set to  0.000000
2/22/2012	11:39:37 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:39:37 AM	Tube furnace set to 0
2/22/2012	11:39:38 AM	Run finished at 11:39 AM
2/22/2012	11:39:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/22/2012	11:42:03 AM	Tube furnace set to 200
2/22/2012	11:42:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/22/2012	11:42:09 AM	Recipe started at 11:42 AM
2/22/2012	11:42:09 AM	Helium valve closed
2/22/2012	11:42:09 AM	H2 valve closed
2/22/2012	11:42:09 AM	BCl3 valve closed
2/22/2012	11:42:09 AM	PH3 valve closed
2/22/2012	11:42:09 AM	SiCl4 pre valve closed
2/22/2012	11:42:09 AM	SiCl4 post valve closed
2/22/2012	11:42:09 AM	Main Vac valve closed
2/22/2012	11:42:09 AM	Bubbler valve closed
2/22/2012	11:42:09 AM	Bypass valve opened
2/22/2012	11:42:09 AM	Helium MFC set to  0.000000
2/22/2012	11:42:09 AM	H2 MFC set to  0.000000
2/22/2012	11:42:09 AM	BCl3 MFC set to  0.000000
2/22/2012	11:42:09 AM	PH3 MFC set to  0.000000
2/22/2012	11:42:09 AM	SiCl4 MFC set to  0.000000
2/22/2012	11:42:09 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:42:09 AM	Tube furnace set to 0
2/22/2012	11:43:09 AM	Helium valve closed
2/22/2012	11:43:09 AM	H2 valve closed
2/22/2012	11:43:09 AM	BCl3 valve closed
2/22/2012	11:43:09 AM	PH3 valve closed
2/22/2012	11:43:09 AM	SiCl4 pre valve closed
2/22/2012	11:43:09 AM	SiCl4 post valve closed
2/22/2012	11:43:09 AM	Main Vac valve closed
2/22/2012	11:43:09 AM	Bubbler valve closed
2/22/2012	11:43:09 AM	Bypass valve opened
2/22/2012	11:43:09 AM	Helium MFC set to  0.000000
2/22/2012	11:43:09 AM	H2 MFC set to  0.000000
2/22/2012	11:43:09 AM	BCl3 MFC set to  0.000000
2/22/2012	11:43:09 AM	PH3 MFC set to  0.000000
2/22/2012	11:43:09 AM	SiCl4 MFC set to  0.000000
2/22/2012	11:43:09 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:43:09 AM	Tube furnace set to 0
2/22/2012	11:44:09 AM	Helium valve closed
2/22/2012	11:44:09 AM	H2 valve closed
2/22/2012	11:44:09 AM	BCl3 valve closed
2/22/2012	11:44:09 AM	PH3 valve closed
2/22/2012	11:44:09 AM	SiCl4 pre valve closed
2/22/2012	11:44:09 AM	SiCl4 post valve closed
2/22/2012	11:44:09 AM	Bypass valve closed
2/22/2012	11:44:09 AM	Bubbler valve closed
2/22/2012	11:44:09 AM	Main Vac valve opened
2/22/2012	11:44:09 AM	Helium MFC set to  0.000000
2/22/2012	11:44:09 AM	H2 MFC set to  0.000000
2/22/2012	11:44:09 AM	BCl3 MFC set to  0.000000
2/22/2012	11:44:09 AM	PH3 MFC set to  0.000000
2/22/2012	11:44:09 AM	SiCl4 MFC set to  0.000000
2/22/2012	11:44:09 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:44:10 AM	Tube furnace set to 0
2/22/2012	11:44:11 AM	Run finished at 11:44 AM
2/22/2012	11:44:11 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/22/2012	11:45:25 AM	Recipe started at 11:45 AM
2/22/2012	11:45:25 AM	Helium valve closed
2/22/2012	11:45:25 AM	H2 valve closed
2/22/2012	11:45:25 AM	BCl3 valve closed
2/22/2012	11:45:25 AM	PH3 valve closed
2/22/2012	11:45:25 AM	SiCl4 pre valve closed
2/22/2012	11:45:25 AM	SiCl4 post valve closed
2/22/2012	11:45:25 AM	Bypass valve closed
2/22/2012	11:45:25 AM	Bubbler valve closed
2/22/2012	11:45:25 AM	Main Vac valve opened
2/22/2012	11:45:25 AM	Helium MFC set to  0.000000
2/22/2012	11:45:25 AM	H2 MFC set to  0.000000
2/22/2012	11:45:25 AM	BCl3 MFC set to  0.000000
2/22/2012	11:45:25 AM	PH3 MFC set to  0.000000
2/22/2012	11:45:25 AM	SiCl4 MFC set to  0.000000
2/22/2012	11:45:25 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:45:25 AM	Tube furnace set to 0
2/22/2012	11:45:55 AM	H2 valve closed
2/22/2012	11:45:55 AM	BCl3 valve closed
2/22/2012	11:45:55 AM	PH3 valve closed
2/22/2012	11:45:55 AM	SiCl4 pre valve closed
2/22/2012	11:45:55 AM	SiCl4 post valve closed
2/22/2012	11:45:55 AM	Bypass valve closed
2/22/2012	11:45:55 AM	Bubbler valve closed
2/22/2012	11:45:55 AM	Helium valve opened
2/22/2012	11:45:55 AM	Main Vac valve opened
2/22/2012	11:45:55 AM	Helium MFC set to  20.000000
2/22/2012	11:45:55 AM	H2 MFC set to  0.000000
2/22/2012	11:45:55 AM	BCl3 MFC set to  0.000000
2/22/2012	11:45:55 AM	PH3 MFC set to  0.000000
2/22/2012	11:45:55 AM	SiCl4 MFC set to  0.000000
2/22/2012	11:45:55 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:45:55 AM	Tube furnace set to 0
2/22/2012	11:46:25 AM	Helium valve closed
2/22/2012	11:46:25 AM	H2 valve closed
2/22/2012	11:46:25 AM	BCl3 valve closed
2/22/2012	11:46:25 AM	PH3 valve closed
2/22/2012	11:46:25 AM	SiCl4 pre valve closed
2/22/2012	11:46:25 AM	SiCl4 post valve closed
2/22/2012	11:46:25 AM	Bypass valve closed
2/22/2012	11:46:25 AM	Bubbler valve closed
2/22/2012	11:46:25 AM	Main Vac valve opened
2/22/2012	11:46:25 AM	Helium MFC set to  0.000000
2/22/2012	11:46:25 AM	H2 MFC set to  0.000000
2/22/2012	11:46:25 AM	BCl3 MFC set to  0.000000
2/22/2012	11:46:25 AM	PH3 MFC set to  0.000000
2/22/2012	11:46:25 AM	SiCl4 MFC set to  0.000000
2/22/2012	11:46:25 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:46:25 AM	Tube furnace set to 0
2/22/2012	11:46:56 AM	H2 valve closed
2/22/2012	11:46:56 AM	BCl3 valve closed
2/22/2012	11:46:56 AM	PH3 valve closed
2/22/2012	11:46:56 AM	SiCl4 pre valve closed
2/22/2012	11:46:56 AM	SiCl4 post valve closed
2/22/2012	11:46:56 AM	Bypass valve closed
2/22/2012	11:46:56 AM	Bubbler valve closed
2/22/2012	11:46:56 AM	Helium valve opened
2/22/2012	11:46:56 AM	Main Vac valve opened
2/22/2012	11:46:56 AM	Helium MFC set to  20.000000
2/22/2012	11:46:56 AM	H2 MFC set to  0.000000
2/22/2012	11:46:56 AM	BCl3 MFC set to  0.000000
2/22/2012	11:46:56 AM	PH3 MFC set to  0.000000
2/22/2012	11:46:56 AM	SiCl4 MFC set to  0.000000
2/22/2012	11:46:56 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:46:56 AM	Tube furnace set to 0
2/22/2012	11:47:26 AM	Helium valve closed
2/22/2012	11:47:26 AM	H2 valve closed
2/22/2012	11:47:26 AM	BCl3 valve closed
2/22/2012	11:47:26 AM	PH3 valve closed
2/22/2012	11:47:26 AM	SiCl4 pre valve closed
2/22/2012	11:47:26 AM	SiCl4 post valve closed
2/22/2012	11:47:26 AM	Bypass valve closed
2/22/2012	11:47:26 AM	Bubbler valve closed
2/22/2012	11:47:26 AM	Main Vac valve opened
2/22/2012	11:47:26 AM	Helium MFC set to  0.000000
2/22/2012	11:47:26 AM	H2 MFC set to  0.000000
2/22/2012	11:47:26 AM	BCl3 MFC set to  0.000000
2/22/2012	11:47:26 AM	PH3 MFC set to  0.000000
2/22/2012	11:47:26 AM	SiCl4 MFC set to  0.000000
2/22/2012	11:47:26 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:47:26 AM	Tube furnace set to 0
2/22/2012	11:47:56 AM	H2 valve closed
2/22/2012	11:47:56 AM	BCl3 valve closed
2/22/2012	11:47:56 AM	PH3 valve closed
2/22/2012	11:47:56 AM	SiCl4 pre valve closed
2/22/2012	11:47:56 AM	SiCl4 post valve closed
2/22/2012	11:47:56 AM	Bypass valve closed
2/22/2012	11:47:56 AM	Bubbler valve closed
2/22/2012	11:47:56 AM	Helium valve opened
2/22/2012	11:47:56 AM	Main Vac valve opened
2/22/2012	11:47:56 AM	Helium MFC set to  20.000000
2/22/2012	11:47:56 AM	H2 MFC set to  0.000000
2/22/2012	11:47:56 AM	BCl3 MFC set to  0.000000
2/22/2012	11:47:56 AM	PH3 MFC set to  0.000000
2/22/2012	11:47:56 AM	SiCl4 MFC set to  0.000000
2/22/2012	11:47:56 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:47:56 AM	Tube furnace set to 0
2/22/2012	11:48:26 AM	Helium valve closed
2/22/2012	11:48:26 AM	H2 valve closed
2/22/2012	11:48:26 AM	BCl3 valve closed
2/22/2012	11:48:26 AM	PH3 valve closed
2/22/2012	11:48:26 AM	SiCl4 pre valve closed
2/22/2012	11:48:26 AM	SiCl4 post valve closed
2/22/2012	11:48:26 AM	Bypass valve closed
2/22/2012	11:48:26 AM	Bubbler valve closed
2/22/2012	11:48:26 AM	Main Vac valve opened
2/22/2012	11:48:26 AM	Helium MFC set to  0.000000
2/22/2012	11:48:26 AM	H2 MFC set to  0.000000
2/22/2012	11:48:26 AM	BCl3 MFC set to  0.000000
2/22/2012	11:48:26 AM	PH3 MFC set to  0.000000
2/22/2012	11:48:26 AM	SiCl4 MFC set to  0.000000
2/22/2012	11:48:26 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:48:26 AM	Tube furnace set to 0
2/22/2012	11:48:56 AM	H2 valve closed
2/22/2012	11:48:56 AM	BCl3 valve closed
2/22/2012	11:48:56 AM	PH3 valve closed
2/22/2012	11:48:56 AM	SiCl4 pre valve closed
2/22/2012	11:48:56 AM	SiCl4 post valve closed
2/22/2012	11:48:56 AM	Bypass valve closed
2/22/2012	11:48:56 AM	Bubbler valve closed
2/22/2012	11:48:56 AM	Helium valve opened
2/22/2012	11:48:56 AM	Main Vac valve opened
2/22/2012	11:48:56 AM	Helium MFC set to  20.000000
2/22/2012	11:48:56 AM	H2 MFC set to  0.000000
2/22/2012	11:48:56 AM	BCl3 MFC set to  0.000000
2/22/2012	11:48:56 AM	PH3 MFC set to  0.000000
2/22/2012	11:48:56 AM	SiCl4 MFC set to  0.000000
2/22/2012	11:48:56 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:48:57 AM	Tube furnace set to 0
2/22/2012	11:49:27 AM	Helium valve closed
2/22/2012	11:49:27 AM	H2 valve closed
2/22/2012	11:49:27 AM	BCl3 valve closed
2/22/2012	11:49:27 AM	PH3 valve closed
2/22/2012	11:49:27 AM	SiCl4 pre valve closed
2/22/2012	11:49:27 AM	SiCl4 post valve closed
2/22/2012	11:49:27 AM	Bypass valve closed
2/22/2012	11:49:27 AM	Bubbler valve closed
2/22/2012	11:49:27 AM	Main Vac valve opened
2/22/2012	11:49:27 AM	Helium MFC set to  0.000000
2/22/2012	11:49:27 AM	H2 MFC set to  0.000000
2/22/2012	11:49:27 AM	BCl3 MFC set to  0.000000
2/22/2012	11:49:27 AM	PH3 MFC set to  0.000000
2/22/2012	11:49:27 AM	SiCl4 MFC set to  0.000000
2/22/2012	11:49:27 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:49:27 AM	Tube furnace set to 0
2/22/2012	11:49:57 AM	H2 valve closed
2/22/2012	11:49:57 AM	BCl3 valve closed
2/22/2012	11:49:57 AM	PH3 valve closed
2/22/2012	11:49:57 AM	SiCl4 pre valve closed
2/22/2012	11:49:57 AM	SiCl4 post valve closed
2/22/2012	11:49:57 AM	Bypass valve closed
2/22/2012	11:49:57 AM	Bubbler valve closed
2/22/2012	11:49:57 AM	Helium valve opened
2/22/2012	11:49:57 AM	Main Vac valve opened
2/22/2012	11:49:57 AM	Helium MFC set to  20.000000
2/22/2012	11:49:57 AM	H2 MFC set to  0.000000
2/22/2012	11:49:57 AM	BCl3 MFC set to  0.000000
2/22/2012	11:49:57 AM	PH3 MFC set to  0.000000
2/22/2012	11:49:57 AM	SiCl4 MFC set to  0.000000
2/22/2012	11:49:57 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:49:57 AM	Tube furnace set to 0
2/22/2012	11:50:27 AM	Helium valve closed
2/22/2012	11:50:27 AM	H2 valve closed
2/22/2012	11:50:27 AM	BCl3 valve closed
2/22/2012	11:50:27 AM	PH3 valve closed
2/22/2012	11:50:27 AM	SiCl4 pre valve closed
2/22/2012	11:50:27 AM	SiCl4 post valve closed
2/22/2012	11:50:27 AM	Bypass valve closed
2/22/2012	11:50:27 AM	Bubbler valve closed
2/22/2012	11:50:27 AM	Main Vac valve opened
2/22/2012	11:50:27 AM	Helium MFC set to  0.000000
2/22/2012	11:50:27 AM	H2 MFC set to  0.000000
2/22/2012	11:50:27 AM	BCl3 MFC set to  0.000000
2/22/2012	11:50:27 AM	PH3 MFC set to  0.000000
2/22/2012	11:50:27 AM	SiCl4 MFC set to  0.000000
2/22/2012	11:50:27 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:50:27 AM	Tube furnace set to 0
2/22/2012	11:50:57 AM	H2 valve closed
2/22/2012	11:50:57 AM	BCl3 valve closed
2/22/2012	11:50:57 AM	PH3 valve closed
2/22/2012	11:50:57 AM	SiCl4 pre valve closed
2/22/2012	11:50:57 AM	SiCl4 post valve closed
2/22/2012	11:50:57 AM	Bypass valve closed
2/22/2012	11:50:57 AM	Bubbler valve closed
2/22/2012	11:50:57 AM	Helium valve opened
2/22/2012	11:50:57 AM	Main Vac valve opened
2/22/2012	11:50:57 AM	Helium MFC set to  20.000000
2/22/2012	11:50:57 AM	H2 MFC set to  0.000000
2/22/2012	11:50:57 AM	BCl3 MFC set to  0.000000
2/22/2012	11:50:57 AM	PH3 MFC set to  0.000000
2/22/2012	11:50:57 AM	SiCl4 MFC set to  0.000000
2/22/2012	11:50:57 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:50:57 AM	Tube furnace set to 0
2/22/2012	11:51:27 AM	Helium valve closed
2/22/2012	11:51:27 AM	H2 valve closed
2/22/2012	11:51:27 AM	BCl3 valve closed
2/22/2012	11:51:27 AM	PH3 valve closed
2/22/2012	11:51:27 AM	SiCl4 pre valve closed
2/22/2012	11:51:27 AM	SiCl4 post valve closed
2/22/2012	11:51:27 AM	Bypass valve closed
2/22/2012	11:51:27 AM	Bubbler valve closed
2/22/2012	11:51:27 AM	Main Vac valve opened
2/22/2012	11:51:27 AM	Helium MFC set to  0.000000
2/22/2012	11:51:27 AM	H2 MFC set to  0.000000
2/22/2012	11:51:27 AM	BCl3 MFC set to  0.000000
2/22/2012	11:51:27 AM	PH3 MFC set to  0.000000
2/22/2012	11:51:27 AM	SiCl4 MFC set to  0.000000
2/22/2012	11:51:27 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:51:28 AM	Tube furnace set to 0
2/22/2012	11:51:58 AM	H2 valve closed
2/22/2012	11:51:58 AM	BCl3 valve closed
2/22/2012	11:51:58 AM	PH3 valve closed
2/22/2012	11:51:58 AM	SiCl4 pre valve closed
2/22/2012	11:51:58 AM	SiCl4 post valve closed
2/22/2012	11:51:58 AM	Bypass valve closed
2/22/2012	11:51:58 AM	Bubbler valve closed
2/22/2012	11:51:58 AM	Helium valve opened
2/22/2012	11:51:58 AM	Main Vac valve opened
2/22/2012	11:51:58 AM	Helium MFC set to  20.000000
2/22/2012	11:51:58 AM	H2 MFC set to  0.000000
2/22/2012	11:51:58 AM	BCl3 MFC set to  0.000000
2/22/2012	11:51:58 AM	PH3 MFC set to  0.000000
2/22/2012	11:51:58 AM	SiCl4 MFC set to  0.000000
2/22/2012	11:51:58 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:51:58 AM	Tube furnace set to 0
2/22/2012	11:52:28 AM	Helium valve closed
2/22/2012	11:52:28 AM	H2 valve closed
2/22/2012	11:52:28 AM	BCl3 valve closed
2/22/2012	11:52:28 AM	PH3 valve closed
2/22/2012	11:52:28 AM	SiCl4 pre valve closed
2/22/2012	11:52:28 AM	SiCl4 post valve closed
2/22/2012	11:52:28 AM	Bypass valve closed
2/22/2012	11:52:28 AM	Bubbler valve closed
2/22/2012	11:52:28 AM	Main Vac valve opened
2/22/2012	11:52:28 AM	Helium MFC set to  0.000000
2/22/2012	11:52:28 AM	H2 MFC set to  0.000000
2/22/2012	11:52:28 AM	BCl3 MFC set to  0.000000
2/22/2012	11:52:28 AM	PH3 MFC set to  0.000000
2/22/2012	11:52:28 AM	SiCl4 MFC set to  0.000000
2/22/2012	11:52:28 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:52:28 AM	Tube furnace set to 0
2/22/2012	11:52:58 AM	H2 valve closed
2/22/2012	11:52:58 AM	BCl3 valve closed
2/22/2012	11:52:58 AM	PH3 valve closed
2/22/2012	11:52:58 AM	SiCl4 pre valve closed
2/22/2012	11:52:58 AM	SiCl4 post valve closed
2/22/2012	11:52:58 AM	Bypass valve closed
2/22/2012	11:52:58 AM	Bubbler valve closed
2/22/2012	11:52:58 AM	Helium valve opened
2/22/2012	11:52:58 AM	Main Vac valve opened
2/22/2012	11:52:58 AM	Helium MFC set to  20.000000
2/22/2012	11:52:58 AM	H2 MFC set to  0.000000
2/22/2012	11:52:58 AM	BCl3 MFC set to  0.000000
2/22/2012	11:52:58 AM	PH3 MFC set to  0.000000
2/22/2012	11:52:58 AM	SiCl4 MFC set to  0.000000
2/22/2012	11:52:58 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:52:58 AM	Tube furnace set to 0
2/22/2012	11:53:28 AM	Helium valve closed
2/22/2012	11:53:28 AM	H2 valve closed
2/22/2012	11:53:28 AM	BCl3 valve closed
2/22/2012	11:53:28 AM	PH3 valve closed
2/22/2012	11:53:28 AM	SiCl4 pre valve closed
2/22/2012	11:53:28 AM	SiCl4 post valve closed
2/22/2012	11:53:28 AM	Bypass valve closed
2/22/2012	11:53:28 AM	Bubbler valve closed
2/22/2012	11:53:28 AM	Main Vac valve opened
2/22/2012	11:53:28 AM	Helium MFC set to  0.000000
2/22/2012	11:53:28 AM	H2 MFC set to  0.000000
2/22/2012	11:53:28 AM	BCl3 MFC set to  0.000000
2/22/2012	11:53:28 AM	PH3 MFC set to  0.000000
2/22/2012	11:53:28 AM	SiCl4 MFC set to  0.000000
2/22/2012	11:53:28 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:53:28 AM	Tube furnace set to 0
2/22/2012	11:53:58 AM	H2 valve closed
2/22/2012	11:53:58 AM	BCl3 valve closed
2/22/2012	11:53:58 AM	PH3 valve closed
2/22/2012	11:53:58 AM	SiCl4 pre valve closed
2/22/2012	11:53:58 AM	SiCl4 post valve closed
2/22/2012	11:53:58 AM	Bypass valve closed
2/22/2012	11:53:58 AM	Bubbler valve closed
2/22/2012	11:53:58 AM	Helium valve opened
2/22/2012	11:53:58 AM	Main Vac valve opened
2/22/2012	11:53:58 AM	Helium MFC set to  20.000000
2/22/2012	11:53:58 AM	H2 MFC set to  0.000000
2/22/2012	11:53:58 AM	BCl3 MFC set to  0.000000
2/22/2012	11:53:58 AM	PH3 MFC set to  0.000000
2/22/2012	11:53:58 AM	SiCl4 MFC set to  0.000000
2/22/2012	11:53:58 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:53:59 AM	Tube furnace set to 0
2/22/2012	11:54:29 AM	Helium valve closed
2/22/2012	11:54:29 AM	H2 valve closed
2/22/2012	11:54:29 AM	BCl3 valve closed
2/22/2012	11:54:29 AM	PH3 valve closed
2/22/2012	11:54:29 AM	SiCl4 pre valve closed
2/22/2012	11:54:29 AM	SiCl4 post valve closed
2/22/2012	11:54:29 AM	Bypass valve closed
2/22/2012	11:54:29 AM	Bubbler valve closed
2/22/2012	11:54:29 AM	Main Vac valve opened
2/22/2012	11:54:29 AM	Helium MFC set to  0.000000
2/22/2012	11:54:29 AM	H2 MFC set to  0.000000
2/22/2012	11:54:29 AM	BCl3 MFC set to  0.000000
2/22/2012	11:54:29 AM	PH3 MFC set to  0.000000
2/22/2012	11:54:29 AM	SiCl4 MFC set to  0.000000
2/22/2012	11:54:29 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:54:29 AM	Tube furnace set to 200
2/22/2012	11:54:59 AM	H2 valve closed
2/22/2012	11:54:59 AM	BCl3 valve closed
2/22/2012	11:54:59 AM	PH3 valve closed
2/22/2012	11:54:59 AM	SiCl4 pre valve closed
2/22/2012	11:54:59 AM	SiCl4 post valve closed
2/22/2012	11:54:59 AM	Bypass valve closed
2/22/2012	11:54:59 AM	Bubbler valve closed
2/22/2012	11:54:59 AM	Helium valve opened
2/22/2012	11:54:59 AM	Main Vac valve opened
2/22/2012	11:54:59 AM	Helium MFC set to  20.000000
2/22/2012	11:54:59 AM	H2 MFC set to  0.000000
2/22/2012	11:54:59 AM	BCl3 MFC set to  0.000000
2/22/2012	11:54:59 AM	PH3 MFC set to  0.000000
2/22/2012	11:54:59 AM	SiCl4 MFC set to  0.000000
2/22/2012	11:54:59 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:54:59 AM	Tube furnace set to 200
2/22/2012	11:55:29 AM	Helium valve closed
2/22/2012	11:55:29 AM	H2 valve closed
2/22/2012	11:55:29 AM	BCl3 valve closed
2/22/2012	11:55:29 AM	PH3 valve closed
2/22/2012	11:55:29 AM	SiCl4 pre valve closed
2/22/2012	11:55:29 AM	SiCl4 post valve closed
2/22/2012	11:55:29 AM	Bypass valve closed
2/22/2012	11:55:29 AM	Bubbler valve closed
2/22/2012	11:55:29 AM	Main Vac valve opened
2/22/2012	11:55:29 AM	Helium MFC set to  0.000000
2/22/2012	11:55:29 AM	H2 MFC set to  0.000000
2/22/2012	11:55:29 AM	BCl3 MFC set to  0.000000
2/22/2012	11:55:29 AM	PH3 MFC set to  0.000000
2/22/2012	11:55:29 AM	SiCl4 MFC set to  0.000000
2/22/2012	11:55:29 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:55:29 AM	Tube furnace set to 200
2/22/2012	11:55:59 AM	H2 valve closed
2/22/2012	11:55:59 AM	BCl3 valve closed
2/22/2012	11:55:59 AM	PH3 valve closed
2/22/2012	11:55:59 AM	SiCl4 pre valve closed
2/22/2012	11:55:59 AM	SiCl4 post valve closed
2/22/2012	11:55:59 AM	Bypass valve closed
2/22/2012	11:55:59 AM	Bubbler valve closed
2/22/2012	11:55:59 AM	Helium valve opened
2/22/2012	11:55:59 AM	Main Vac valve opened
2/22/2012	11:55:59 AM	Helium MFC set to  20.000000
2/22/2012	11:55:59 AM	H2 MFC set to  0.000000
2/22/2012	11:55:59 AM	BCl3 MFC set to  0.000000
2/22/2012	11:55:59 AM	PH3 MFC set to  0.000000
2/22/2012	11:55:59 AM	SiCl4 MFC set to  0.000000
2/22/2012	11:55:59 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:55:59 AM	Tube furnace set to 200
2/22/2012	11:56:29 AM	Helium valve closed
2/22/2012	11:56:29 AM	H2 valve closed
2/22/2012	11:56:29 AM	BCl3 valve closed
2/22/2012	11:56:29 AM	PH3 valve closed
2/22/2012	11:56:29 AM	SiCl4 pre valve closed
2/22/2012	11:56:29 AM	SiCl4 post valve closed
2/22/2012	11:56:29 AM	Bypass valve closed
2/22/2012	11:56:29 AM	Bubbler valve closed
2/22/2012	11:56:29 AM	Main Vac valve opened
2/22/2012	11:56:29 AM	Helium MFC set to  0.000000
2/22/2012	11:56:29 AM	H2 MFC set to  0.000000
2/22/2012	11:56:29 AM	BCl3 MFC set to  0.000000
2/22/2012	11:56:29 AM	PH3 MFC set to  0.000000
2/22/2012	11:56:29 AM	SiCl4 MFC set to  0.000000
2/22/2012	11:56:29 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:56:30 AM	Tube furnace set to 200
2/22/2012	11:57:00 AM	H2 valve closed
2/22/2012	11:57:00 AM	BCl3 valve closed
2/22/2012	11:57:00 AM	PH3 valve closed
2/22/2012	11:57:00 AM	SiCl4 pre valve closed
2/22/2012	11:57:00 AM	SiCl4 post valve closed
2/22/2012	11:57:00 AM	Bypass valve closed
2/22/2012	11:57:00 AM	Bubbler valve closed
2/22/2012	11:57:00 AM	Helium valve opened
2/22/2012	11:57:00 AM	Main Vac valve opened
2/22/2012	11:57:00 AM	Helium MFC set to  20.000000
2/22/2012	11:57:00 AM	H2 MFC set to  0.000000
2/22/2012	11:57:00 AM	BCl3 MFC set to  0.000000
2/22/2012	11:57:00 AM	PH3 MFC set to  0.000000
2/22/2012	11:57:00 AM	SiCl4 MFC set to  0.000000
2/22/2012	11:57:00 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:57:00 AM	Tube furnace set to 200
2/22/2012	11:57:30 AM	Helium valve closed
2/22/2012	11:57:30 AM	H2 valve closed
2/22/2012	11:57:30 AM	BCl3 valve closed
2/22/2012	11:57:30 AM	PH3 valve closed
2/22/2012	11:57:30 AM	SiCl4 pre valve closed
2/22/2012	11:57:30 AM	SiCl4 post valve closed
2/22/2012	11:57:30 AM	Bypass valve closed
2/22/2012	11:57:30 AM	Bubbler valve closed
2/22/2012	11:57:30 AM	Main Vac valve opened
2/22/2012	11:57:30 AM	Helium MFC set to  0.000000
2/22/2012	11:57:30 AM	H2 MFC set to  0.000000
2/22/2012	11:57:30 AM	BCl3 MFC set to  0.000000
2/22/2012	11:57:30 AM	PH3 MFC set to  0.000000
2/22/2012	11:57:30 AM	SiCl4 MFC set to  0.000000
2/22/2012	11:57:30 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:57:30 AM	Tube furnace set to 200
2/22/2012	11:58:00 AM	H2 valve closed
2/22/2012	11:58:00 AM	BCl3 valve closed
2/22/2012	11:58:00 AM	PH3 valve closed
2/22/2012	11:58:00 AM	SiCl4 pre valve closed
2/22/2012	11:58:00 AM	SiCl4 post valve closed
2/22/2012	11:58:00 AM	Bypass valve closed
2/22/2012	11:58:00 AM	Bubbler valve closed
2/22/2012	11:58:00 AM	Helium valve opened
2/22/2012	11:58:00 AM	Main Vac valve opened
2/22/2012	11:58:00 AM	Helium MFC set to  20.000000
2/22/2012	11:58:00 AM	H2 MFC set to  0.000000
2/22/2012	11:58:00 AM	BCl3 MFC set to  0.000000
2/22/2012	11:58:00 AM	PH3 MFC set to  0.000000
2/22/2012	11:58:00 AM	SiCl4 MFC set to  0.000000
2/22/2012	11:58:00 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:58:00 AM	Tube furnace set to 200
2/22/2012	11:58:30 AM	Helium valve closed
2/22/2012	11:58:30 AM	H2 valve closed
2/22/2012	11:58:30 AM	BCl3 valve closed
2/22/2012	11:58:30 AM	PH3 valve closed
2/22/2012	11:58:30 AM	SiCl4 pre valve closed
2/22/2012	11:58:30 AM	SiCl4 post valve closed
2/22/2012	11:58:30 AM	Bypass valve closed
2/22/2012	11:58:30 AM	Bubbler valve closed
2/22/2012	11:58:30 AM	Main Vac valve opened
2/22/2012	11:58:30 AM	Helium MFC set to  0.000000
2/22/2012	11:58:30 AM	H2 MFC set to  0.000000
2/22/2012	11:58:30 AM	BCl3 MFC set to  0.000000
2/22/2012	11:58:30 AM	PH3 MFC set to  0.000000
2/22/2012	11:58:30 AM	SiCl4 MFC set to  0.000000
2/22/2012	11:58:30 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:58:30 AM	Tube furnace set to 200
2/22/2012	11:59:00 AM	H2 valve closed
2/22/2012	11:59:00 AM	BCl3 valve closed
2/22/2012	11:59:00 AM	PH3 valve closed
2/22/2012	11:59:00 AM	SiCl4 pre valve closed
2/22/2012	11:59:00 AM	SiCl4 post valve closed
2/22/2012	11:59:00 AM	Bypass valve closed
2/22/2012	11:59:00 AM	Bubbler valve closed
2/22/2012	11:59:00 AM	Helium valve opened
2/22/2012	11:59:00 AM	Main Vac valve opened
2/22/2012	11:59:00 AM	Helium MFC set to  20.000000
2/22/2012	11:59:00 AM	H2 MFC set to  0.000000
2/22/2012	11:59:00 AM	BCl3 MFC set to  0.000000
2/22/2012	11:59:00 AM	PH3 MFC set to  0.000000
2/22/2012	11:59:00 AM	SiCl4 MFC set to  0.000000
2/22/2012	11:59:00 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:59:01 AM	Tube furnace set to 200
2/22/2012	11:59:31 AM	Helium valve closed
2/22/2012	11:59:31 AM	H2 valve closed
2/22/2012	11:59:31 AM	BCl3 valve closed
2/22/2012	11:59:31 AM	PH3 valve closed
2/22/2012	11:59:31 AM	SiCl4 pre valve closed
2/22/2012	11:59:31 AM	SiCl4 post valve closed
2/22/2012	11:59:31 AM	Bypass valve closed
2/22/2012	11:59:31 AM	Bubbler valve closed
2/22/2012	11:59:31 AM	Main Vac valve opened
2/22/2012	11:59:31 AM	Helium MFC set to  0.000000
2/22/2012	11:59:31 AM	H2 MFC set to  0.000000
2/22/2012	11:59:31 AM	BCl3 MFC set to  0.000000
2/22/2012	11:59:31 AM	PH3 MFC set to  0.000000
2/22/2012	11:59:31 AM	SiCl4 MFC set to  0.000000
2/22/2012	11:59:31 AM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:59:31 AM	Tube furnace set to 200
2/22/2012	12:00:01 PM	H2 valve closed
2/22/2012	12:00:01 PM	BCl3 valve closed
2/22/2012	12:00:01 PM	PH3 valve closed
2/22/2012	12:00:01 PM	SiCl4 pre valve closed
2/22/2012	12:00:01 PM	SiCl4 post valve closed
2/22/2012	12:00:01 PM	Bypass valve closed
2/22/2012	12:00:01 PM	Bubbler valve closed
2/22/2012	12:00:01 PM	Helium valve opened
2/22/2012	12:00:01 PM	Main Vac valve opened
2/22/2012	12:00:01 PM	Helium MFC set to  20.000000
2/22/2012	12:00:01 PM	H2 MFC set to  0.000000
2/22/2012	12:00:01 PM	BCl3 MFC set to  0.000000
2/22/2012	12:00:01 PM	PH3 MFC set to  0.000000
2/22/2012	12:00:01 PM	SiCl4 MFC set to  0.000000
2/22/2012	12:00:01 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	12:00:01 PM	Tube furnace set to 200
2/22/2012	12:00:31 PM	Helium valve closed
2/22/2012	12:00:31 PM	H2 valve closed
2/22/2012	12:00:31 PM	BCl3 valve closed
2/22/2012	12:00:31 PM	PH3 valve closed
2/22/2012	12:00:31 PM	SiCl4 pre valve closed
2/22/2012	12:00:31 PM	SiCl4 post valve closed
2/22/2012	12:00:31 PM	Bypass valve closed
2/22/2012	12:00:31 PM	Bubbler valve closed
2/22/2012	12:00:31 PM	Main Vac valve opened
2/22/2012	12:00:31 PM	Helium MFC set to  0.000000
2/22/2012	12:00:31 PM	H2 MFC set to  0.000000
2/22/2012	12:00:31 PM	BCl3 MFC set to  0.000000
2/22/2012	12:00:31 PM	PH3 MFC set to  0.000000
2/22/2012	12:00:31 PM	SiCl4 MFC set to  0.000000
2/22/2012	12:00:31 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	12:00:31 PM	Tube furnace set to 0
2/22/2012	12:00:32 PM	Run finished at 12:00 PM
2/22/2012	12:01:58 PM	Main Vac valve closed
2/22/2012	12:02:06 PM	Main Vac valve opened
2/22/2012	12:03:36 PM	Recipe started at 12:03 PM
2/22/2012	12:03:36 PM	Helium valve closed
2/22/2012	12:03:36 PM	H2 valve closed
2/22/2012	12:03:36 PM	BCl3 valve closed
2/22/2012	12:03:36 PM	PH3 valve closed
2/22/2012	12:03:36 PM	SiCl4 pre valve closed
2/22/2012	12:03:36 PM	SiCl4 post valve closed
2/22/2012	12:03:36 PM	Main Vac valve closed
2/22/2012	12:03:36 PM	Bypass valve closed
2/22/2012	12:03:36 PM	Bubbler valve closed
2/22/2012	12:03:36 PM	Helium MFC set to  0.000000
2/22/2012	12:03:36 PM	H2 MFC set to  0.000000
2/22/2012	12:03:36 PM	BCl3 MFC set to  0.000000
2/22/2012	12:03:36 PM	PH3 MFC set to  0.000000
2/22/2012	12:03:36 PM	SiCl4 MFC set to  0.000000
2/22/2012	12:03:36 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	12:03:36 PM	Tube furnace set to 0
2/22/2012	12:03:39 PM	Helium valve closed
2/22/2012	12:03:39 PM	BCl3 valve closed
2/22/2012	12:03:39 PM	PH3 valve closed
2/22/2012	12:03:39 PM	SiCl4 pre valve closed
2/22/2012	12:03:39 PM	SiCl4 post valve closed
2/22/2012	12:03:39 PM	Main Vac valve closed
2/22/2012	12:03:39 PM	Bypass valve closed
2/22/2012	12:03:39 PM	Bubbler valve closed
2/22/2012	12:03:39 PM	H2 valve opened
2/22/2012	12:03:40 PM	Helium MFC set to  0.000000
2/22/2012	12:03:40 PM	H2 MFC set to  500.000000
2/22/2012	12:03:40 PM	BCl3 MFC set to  0.000000
2/22/2012	12:03:40 PM	PH3 MFC set to  0.000000
2/22/2012	12:03:40 PM	SiCl4 MFC set to  0.000000
2/22/2012	12:03:40 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	12:03:40 PM	Tube furnace set to 0
2/22/2012	12:04:44 PM	Helium valve closed
2/22/2012	12:04:44 PM	BCl3 valve closed
2/22/2012	12:04:44 PM	PH3 valve closed
2/22/2012	12:04:44 PM	SiCl4 pre valve closed
2/22/2012	12:04:44 PM	SiCl4 post valve closed
2/22/2012	12:04:44 PM	Main Vac valve closed
2/22/2012	12:04:44 PM	Bypass valve closed
2/22/2012	12:04:44 PM	H2 valve opened
2/22/2012	12:04:44 PM	Bubbler valve opened
2/22/2012	12:04:44 PM	Helium MFC set to  0.000000
2/22/2012	12:04:44 PM	H2 MFC set to  500.000000
2/22/2012	12:04:44 PM	BCl3 MFC set to  0.000000
2/22/2012	12:04:44 PM	PH3 MFC set to  0.000000
2/22/2012	12:04:44 PM	SiCl4 MFC set to  0.000000
2/22/2012	12:04:44 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	12:04:44 PM	Tube furnace set to 0
2/22/2012	12:04:45 PM	Helium valve closed
2/22/2012	12:04:45 PM	BCl3 valve closed
2/22/2012	12:04:45 PM	PH3 valve closed
2/22/2012	12:04:45 PM	SiCl4 pre valve closed
2/22/2012	12:04:45 PM	SiCl4 post valve closed
2/22/2012	12:04:45 PM	Main Vac valve closed
2/22/2012	12:04:45 PM	Bypass valve closed
2/22/2012	12:04:45 PM	H2 valve opened
2/22/2012	12:04:45 PM	Bubbler valve opened
2/22/2012	12:04:45 PM	Helium MFC set to  0.000000
2/22/2012	12:04:45 PM	H2 MFC set to  500.000000
2/22/2012	12:04:45 PM	BCl3 MFC set to  0.000000
2/22/2012	12:04:45 PM	PH3 MFC set to  0.000000
2/22/2012	12:04:45 PM	SiCl4 MFC set to  0.000000
2/22/2012	12:04:45 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	12:04:45 PM	Tube furnace set to 1000
2/22/2012	12:24:45 PM	Helium valve closed
2/22/2012	12:24:45 PM	PH3 valve closed
2/22/2012	12:24:45 PM	Main Vac valve closed
2/22/2012	12:24:45 PM	Bypass valve closed
2/22/2012	12:24:45 PM	H2 valve opened
2/22/2012	12:24:45 PM	BCl3 valve opened
2/22/2012	12:24:45 PM	SiCl4 pre valve opened
2/22/2012	12:24:45 PM	SiCl4 post valve opened
2/22/2012	12:24:45 PM	Bubbler valve opened
2/22/2012	12:24:45 PM	Helium MFC set to  0.000000
2/22/2012	12:24:45 PM	H2 MFC set to  450.000000
2/22/2012	12:24:45 PM	BCl3 MFC set to  1.500000
2/22/2012	12:24:45 PM	PH3 MFC set to  0.000000
2/22/2012	12:24:45 PM	SiCl4 MFC set to  50.000000
2/22/2012	12:24:45 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	12:24:45 PM	Tube furnace set to 1000
2/22/2012	12:36:45 PM	Helium valve closed
2/22/2012	12:36:45 PM	BCl3 valve closed
2/22/2012	12:36:45 PM	PH3 valve closed
2/22/2012	12:36:45 PM	SiCl4 pre valve closed
2/22/2012	12:36:45 PM	SiCl4 post valve closed
2/22/2012	12:36:45 PM	Main Vac valve closed
2/22/2012	12:36:45 PM	Bypass valve closed
2/22/2012	12:36:45 PM	H2 valve opened
2/22/2012	12:36:45 PM	Bubbler valve opened
2/22/2012	12:36:45 PM	Helium MFC set to  0.000000
2/22/2012	12:36:45 PM	H2 MFC set to  500.000000
2/22/2012	12:36:45 PM	BCl3 MFC set to  0.000000
2/22/2012	12:36:45 PM	PH3 MFC set to  0.000000
2/22/2012	12:36:45 PM	SiCl4 MFC set to  0.000000
2/22/2012	12:36:45 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	12:36:46 PM	Tube furnace set to 950
2/22/2012	12:38:46 PM	Helium valve closed
2/22/2012	12:38:46 PM	BCl3 valve closed
2/22/2012	12:38:46 PM	PH3 valve closed
2/22/2012	12:38:46 PM	SiCl4 pre valve closed
2/22/2012	12:38:46 PM	SiCl4 post valve closed
2/22/2012	12:38:46 PM	Main Vac valve closed
2/22/2012	12:38:46 PM	Bypass valve closed
2/22/2012	12:38:46 PM	H2 valve opened
2/22/2012	12:38:46 PM	Bubbler valve opened
2/22/2012	12:38:46 PM	Helium MFC set to  0.000000
2/22/2012	12:38:46 PM	H2 MFC set to  500.000000
2/22/2012	12:38:46 PM	BCl3 MFC set to  0.000000
2/22/2012	12:38:46 PM	PH3 MFC set to  0.000000
2/22/2012	12:38:46 PM	SiCl4 MFC set to  0.000000
2/22/2012	12:38:46 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	12:38:46 PM	Tube furnace set to 900
2/22/2012	12:40:46 PM	Helium valve closed
2/22/2012	12:40:46 PM	BCl3 valve closed
2/22/2012	12:40:46 PM	PH3 valve closed
2/22/2012	12:40:46 PM	SiCl4 pre valve closed
2/22/2012	12:40:46 PM	SiCl4 post valve closed
2/22/2012	12:40:46 PM	Main Vac valve closed
2/22/2012	12:40:46 PM	Bypass valve closed
2/22/2012	12:40:46 PM	H2 valve opened
2/22/2012	12:40:46 PM	Bubbler valve opened
2/22/2012	12:40:46 PM	Helium MFC set to  0.000000
2/22/2012	12:40:46 PM	H2 MFC set to  500.000000
2/22/2012	12:40:46 PM	BCl3 MFC set to  0.000000
2/22/2012	12:40:46 PM	PH3 MFC set to  0.000000
2/22/2012	12:40:46 PM	SiCl4 MFC set to  0.000000
2/22/2012	12:40:46 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	12:40:46 PM	Tube furnace set to 850
2/22/2012	12:42:46 PM	H2 valve closed
2/22/2012	12:42:46 PM	BCl3 valve closed
2/22/2012	12:42:46 PM	PH3 valve closed
2/22/2012	12:42:46 PM	SiCl4 pre valve closed
2/22/2012	12:42:46 PM	SiCl4 post valve closed
2/22/2012	12:42:46 PM	Main Vac valve closed
2/22/2012	12:42:46 PM	Bypass valve closed
2/22/2012	12:42:46 PM	Helium valve opened
2/22/2012	12:42:46 PM	Bubbler valve opened
2/22/2012	12:42:46 PM	Helium MFC set to  500.000000
2/22/2012	12:42:46 PM	H2 MFC set to  0.000000
2/22/2012	12:42:46 PM	BCl3 MFC set to  0.000000
2/22/2012	12:42:46 PM	PH3 MFC set to  0.000000
2/22/2012	12:42:46 PM	SiCl4 MFC set to  0.000000
2/22/2012	12:42:46 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	12:42:46 PM	Tube furnace set to 800
2/22/2012	12:44:46 PM	H2 valve closed
2/22/2012	12:44:46 PM	BCl3 valve closed
2/22/2012	12:44:46 PM	PH3 valve closed
2/22/2012	12:44:46 PM	SiCl4 pre valve closed
2/22/2012	12:44:46 PM	SiCl4 post valve closed
2/22/2012	12:44:46 PM	Main Vac valve closed
2/22/2012	12:44:46 PM	Bypass valve closed
2/22/2012	12:44:46 PM	Helium valve opened
2/22/2012	12:44:46 PM	Bubbler valve opened
2/22/2012	12:44:46 PM	Helium MFC set to  500.000000
2/22/2012	12:44:46 PM	H2 MFC set to  0.000000
2/22/2012	12:44:46 PM	BCl3 MFC set to  0.000000
2/22/2012	12:44:46 PM	PH3 MFC set to  0.000000
2/22/2012	12:44:46 PM	SiCl4 MFC set to  0.000000
2/22/2012	12:44:46 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	12:44:46 PM	Tube furnace set to 750
2/22/2012	12:46:46 PM	H2 valve closed
2/22/2012	12:46:46 PM	BCl3 valve closed
2/22/2012	12:46:46 PM	PH3 valve closed
2/22/2012	12:46:46 PM	SiCl4 pre valve closed
2/22/2012	12:46:46 PM	SiCl4 post valve closed
2/22/2012	12:46:46 PM	Main Vac valve closed
2/22/2012	12:46:46 PM	Bypass valve closed
2/22/2012	12:46:46 PM	Helium valve opened
2/22/2012	12:46:46 PM	Bubbler valve opened
2/22/2012	12:46:46 PM	Helium MFC set to  500.000000
2/22/2012	12:46:46 PM	H2 MFC set to  0.000000
2/22/2012	12:46:46 PM	BCl3 MFC set to  0.000000
2/22/2012	12:46:46 PM	PH3 MFC set to  0.000000
2/22/2012	12:46:46 PM	SiCl4 MFC set to  0.000000
2/22/2012	12:46:46 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	12:46:47 PM	Tube furnace set to 0
2/22/2012	1:06:47 PM	Helium valve closed
2/22/2012	1:06:47 PM	H2 valve closed
2/22/2012	1:06:47 PM	BCl3 valve closed
2/22/2012	1:06:47 PM	PH3 valve closed
2/22/2012	1:06:47 PM	SiCl4 pre valve closed
2/22/2012	1:06:47 PM	SiCl4 post valve closed
2/22/2012	1:06:47 PM	Main Vac valve closed
2/22/2012	1:06:47 PM	Bypass valve closed
2/22/2012	1:06:47 PM	Bubbler valve closed
2/22/2012	1:06:47 PM	Helium MFC set to  0.000000
2/22/2012	1:06:47 PM	H2 MFC set to  0.000000
2/22/2012	1:06:47 PM	BCl3 MFC set to  0.000000
2/22/2012	1:06:47 PM	PH3 MFC set to  0.000000
2/22/2012	1:06:47 PM	SiCl4 MFC set to  0.000000
2/22/2012	1:06:47 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	1:06:47 PM	Tube furnace set to 0
2/22/2012	1:06:48 PM	Helium valve closed
2/22/2012	1:06:48 PM	H2 valve closed
2/22/2012	1:06:48 PM	BCl3 valve closed
2/22/2012	1:06:48 PM	PH3 valve closed
2/22/2012	1:06:48 PM	SiCl4 pre valve closed
2/22/2012	1:06:48 PM	SiCl4 post valve closed
2/22/2012	1:06:48 PM	Main Vac valve closed
2/22/2012	1:06:48 PM	Bubbler valve closed
2/22/2012	1:06:48 PM	Bypass valve opened
2/22/2012	1:06:48 PM	Helium MFC set to  0.000000
2/22/2012	1:06:48 PM	H2 MFC set to  0.000000
2/22/2012	1:06:48 PM	BCl3 MFC set to  0.000000
2/22/2012	1:06:48 PM	PH3 MFC set to  0.000000
2/22/2012	1:06:48 PM	SiCl4 MFC set to  0.000000
2/22/2012	1:06:48 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	1:06:48 PM	Tube furnace set to 0
2/22/2012	1:07:35 PM	Helium valve closed
2/22/2012	1:07:35 PM	H2 valve closed
2/22/2012	1:07:35 PM	BCl3 valve closed
2/22/2012	1:07:35 PM	PH3 valve closed
2/22/2012	1:07:35 PM	SiCl4 pre valve closed
2/22/2012	1:07:35 PM	SiCl4 post valve closed
2/22/2012	1:07:35 PM	Main Vac valve closed
2/22/2012	1:07:35 PM	Bubbler valve closed
2/22/2012	1:07:35 PM	Bypass valve opened
2/22/2012	1:07:35 PM	Helium MFC set to  0.000000
2/22/2012	1:07:35 PM	H2 MFC set to  0.000000
2/22/2012	1:07:35 PM	BCl3 MFC set to  0.000000
2/22/2012	1:07:35 PM	PH3 MFC set to  0.000000
2/22/2012	1:07:35 PM	SiCl4 MFC set to  0.000000
2/22/2012	1:07:35 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	1:07:35 PM	Tube furnace set to 0
2/22/2012	1:08:35 PM	Helium valve closed
2/22/2012	1:08:35 PM	H2 valve closed
2/22/2012	1:08:35 PM	BCl3 valve closed
2/22/2012	1:08:35 PM	PH3 valve closed
2/22/2012	1:08:35 PM	SiCl4 pre valve closed
2/22/2012	1:08:35 PM	SiCl4 post valve closed
2/22/2012	1:08:35 PM	Bypass valve closed
2/22/2012	1:08:35 PM	Bubbler valve closed
2/22/2012	1:08:35 PM	Main Vac valve opened
2/22/2012	1:08:35 PM	Helium MFC set to  0.000000
2/22/2012	1:08:35 PM	H2 MFC set to  0.000000
2/22/2012	1:08:35 PM	BCl3 MFC set to  0.000000
2/22/2012	1:08:35 PM	PH3 MFC set to  0.000000
2/22/2012	1:08:35 PM	SiCl4 MFC set to  0.000000
2/22/2012	1:08:35 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	1:08:36 PM	Tube furnace set to 0
2/22/2012	1:08:37 PM	Run finished at 1:08 PM
2/22/2012	1:16:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/22/2012	1:16:51 PM	Recipe started at 1:16 PM
2/22/2012	1:16:51 PM	Helium valve closed
2/22/2012	1:16:51 PM	H2 valve closed
2/22/2012	1:16:51 PM	BCl3 valve closed
2/22/2012	1:16:51 PM	PH3 valve closed
2/22/2012	1:16:51 PM	SiCl4 pre valve closed
2/22/2012	1:16:51 PM	SiCl4 post valve closed
2/22/2012	1:16:51 PM	Main Vac valve closed
2/22/2012	1:16:51 PM	Bypass valve closed
2/22/2012	1:16:51 PM	Bubbler valve closed
2/22/2012	1:16:51 PM	Helium MFC set to  0.000000
2/22/2012	1:16:51 PM	H2 MFC set to  0.000000
2/22/2012	1:16:51 PM	BCl3 MFC set to  0.000000
2/22/2012	1:16:51 PM	PH3 MFC set to  0.000000
2/22/2012	1:16:51 PM	SiCl4 MFC set to  0.000000
2/22/2012	1:16:51 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	1:16:51 PM	Tube furnace set to 0
2/22/2012	1:16:54 PM	H2 valve closed
2/22/2012	1:16:54 PM	BCl3 valve closed
2/22/2012	1:16:54 PM	PH3 valve closed
2/22/2012	1:16:54 PM	SiCl4 pre valve closed
2/22/2012	1:16:54 PM	SiCl4 post valve closed
2/22/2012	1:16:54 PM	Main Vac valve closed
2/22/2012	1:16:54 PM	Bypass valve closed
2/22/2012	1:16:54 PM	Bubbler valve closed
2/22/2012	1:16:54 PM	Helium valve opened
2/22/2012	1:16:54 PM	Helium MFC set to  500.000000
2/22/2012	1:16:54 PM	H2 MFC set to  0.000000
2/22/2012	1:16:54 PM	BCl3 MFC set to  0.000000
2/22/2012	1:16:55 PM	PH3 MFC set to  0.000000
2/22/2012	1:16:55 PM	SiCl4 MFC set to  0.000000
2/22/2012	1:16:55 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	1:16:55 PM	Tube furnace set to 0
2/22/2012	1:17:57 PM	Helium valve closed
2/22/2012	1:17:57 PM	H2 valve closed
2/22/2012	1:17:57 PM	BCl3 valve closed
2/22/2012	1:17:57 PM	PH3 valve closed
2/22/2012	1:17:57 PM	SiCl4 pre valve closed
2/22/2012	1:17:57 PM	SiCl4 post valve closed
2/22/2012	1:17:57 PM	Main Vac valve closed
2/22/2012	1:17:57 PM	Bypass valve closed
2/22/2012	1:17:57 PM	Bubbler valve closed
2/22/2012	1:17:57 PM	Helium MFC set to  0.000000
2/22/2012	1:17:57 PM	H2 MFC set to  0.000000
2/22/2012	1:17:57 PM	BCl3 MFC set to  0.000000
2/22/2012	1:17:57 PM	PH3 MFC set to  0.000000
2/22/2012	1:17:57 PM	SiCl4 MFC set to  0.000000
2/22/2012	1:17:57 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	1:17:58 PM	Tube furnace set to 0
2/22/2012	1:17:59 PM	Run finished at 1:17 PM
2/22/2012	1:17:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/22/2012	1:20:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/22/2012	1:20:15 PM	Recipe started at 1:20 PM
2/22/2012	1:20:15 PM	Helium valve closed
2/22/2012	1:20:15 PM	H2 valve closed
2/22/2012	1:20:15 PM	BCl3 valve closed
2/22/2012	1:20:15 PM	PH3 valve closed
2/22/2012	1:20:15 PM	SiCl4 pre valve closed
2/22/2012	1:20:15 PM	SiCl4 post valve closed
2/22/2012	1:20:15 PM	Main Vac valve closed
2/22/2012	1:20:15 PM	Bubbler valve closed
2/22/2012	1:20:15 PM	Bypass valve opened
2/22/2012	1:20:15 PM	Helium MFC set to  0.000000
2/22/2012	1:20:15 PM	H2 MFC set to  0.000000
2/22/2012	1:20:15 PM	BCl3 MFC set to  0.000000
2/22/2012	1:20:15 PM	PH3 MFC set to  0.000000
2/22/2012	1:20:15 PM	SiCl4 MFC set to  0.000000
2/22/2012	1:20:15 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	1:20:15 PM	Tube furnace set to 0
2/22/2012	1:21:14 PM	Helium valve closed
2/22/2012	1:21:14 PM	H2 valve closed
2/22/2012	1:21:14 PM	BCl3 valve closed
2/22/2012	1:21:14 PM	PH3 valve closed
2/22/2012	1:21:14 PM	SiCl4 pre valve closed
2/22/2012	1:21:14 PM	SiCl4 post valve closed
2/22/2012	1:21:14 PM	Main Vac valve closed
2/22/2012	1:21:14 PM	Bubbler valve closed
2/22/2012	1:21:14 PM	Bypass valve opened
2/22/2012	1:21:14 PM	Helium MFC set to  0.000000
2/22/2012	1:21:14 PM	H2 MFC set to  0.000000
2/22/2012	1:21:14 PM	BCl3 MFC set to  0.000000
2/22/2012	1:21:14 PM	PH3 MFC set to  0.000000
2/22/2012	1:21:14 PM	SiCl4 MFC set to  0.000000
2/22/2012	1:21:14 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	1:21:14 PM	Tube furnace set to 0
2/22/2012	1:22:14 PM	Helium valve closed
2/22/2012	1:22:14 PM	H2 valve closed
2/22/2012	1:22:14 PM	BCl3 valve closed
2/22/2012	1:22:14 PM	PH3 valve closed
2/22/2012	1:22:14 PM	SiCl4 pre valve closed
2/22/2012	1:22:14 PM	SiCl4 post valve closed
2/22/2012	1:22:14 PM	Bypass valve closed
2/22/2012	1:22:14 PM	Bubbler valve closed
2/22/2012	1:22:14 PM	Main Vac valve opened
2/22/2012	1:22:14 PM	Helium MFC set to  0.000000
2/22/2012	1:22:14 PM	H2 MFC set to  0.000000
2/22/2012	1:22:14 PM	BCl3 MFC set to  0.000000
2/22/2012	1:22:14 PM	PH3 MFC set to  0.000000
2/22/2012	1:22:14 PM	SiCl4 MFC set to  0.000000
2/22/2012	1:22:14 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	1:22:14 PM	Tube furnace set to 0
2/22/2012	1:22:15 PM	Run finished at 1:22 PM
2/22/2012	1:22:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/22/2012	1:22:43 PM	Recipe started at 1:22 PM
2/22/2012	1:22:43 PM	Helium valve closed
2/22/2012	1:22:43 PM	H2 valve closed
2/22/2012	1:22:43 PM	BCl3 valve closed
2/22/2012	1:22:43 PM	PH3 valve closed
2/22/2012	1:22:43 PM	SiCl4 pre valve closed
2/22/2012	1:22:43 PM	SiCl4 post valve closed
2/22/2012	1:22:43 PM	Bypass valve closed
2/22/2012	1:22:43 PM	Bubbler valve closed
2/22/2012	1:22:43 PM	Main Vac valve opened
2/22/2012	1:22:43 PM	Helium MFC set to  0.000000
2/22/2012	1:22:43 PM	H2 MFC set to  0.000000
2/22/2012	1:22:43 PM	BCl3 MFC set to  0.000000
2/22/2012	1:22:43 PM	PH3 MFC set to  0.000000
2/22/2012	1:22:43 PM	SiCl4 MFC set to  0.000000
2/22/2012	1:22:43 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	1:22:44 PM	Tube furnace set to 0
2/22/2012	1:23:14 PM	H2 valve closed
2/22/2012	1:23:14 PM	BCl3 valve closed
2/22/2012	1:23:14 PM	PH3 valve closed
2/22/2012	1:23:14 PM	SiCl4 pre valve closed
2/22/2012	1:23:14 PM	SiCl4 post valve closed
2/22/2012	1:23:14 PM	Bypass valve closed
2/22/2012	1:23:14 PM	Bubbler valve closed
2/22/2012	1:23:14 PM	Helium valve opened
2/22/2012	1:23:14 PM	Main Vac valve opened
2/22/2012	1:23:14 PM	Helium MFC set to  20.000000
2/22/2012	1:23:14 PM	H2 MFC set to  0.000000
2/22/2012	1:23:14 PM	BCl3 MFC set to  0.000000
2/22/2012	1:23:14 PM	PH3 MFC set to  0.000000
2/22/2012	1:23:14 PM	SiCl4 MFC set to  0.000000
2/22/2012	1:23:14 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	1:23:14 PM	Tube furnace set to 0
2/22/2012	1:23:44 PM	Helium valve closed
2/22/2012	1:23:44 PM	H2 valve closed
2/22/2012	1:23:44 PM	BCl3 valve closed
2/22/2012	1:23:44 PM	PH3 valve closed
2/22/2012	1:23:44 PM	SiCl4 pre valve closed
2/22/2012	1:23:44 PM	SiCl4 post valve closed
2/22/2012	1:23:44 PM	Bypass valve closed
2/22/2012	1:23:44 PM	Bubbler valve closed
2/22/2012	1:23:44 PM	Main Vac valve opened
2/22/2012	1:23:44 PM	Helium MFC set to  0.000000
2/22/2012	1:23:44 PM	H2 MFC set to  0.000000
2/22/2012	1:23:44 PM	BCl3 MFC set to  0.000000
2/22/2012	1:23:44 PM	PH3 MFC set to  0.000000
2/22/2012	1:23:44 PM	SiCl4 MFC set to  0.000000
2/22/2012	1:23:44 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	1:23:44 PM	Tube furnace set to 0
2/22/2012	1:24:14 PM	H2 valve closed
2/22/2012	1:24:14 PM	BCl3 valve closed
2/22/2012	1:24:14 PM	PH3 valve closed
2/22/2012	1:24:14 PM	SiCl4 pre valve closed
2/22/2012	1:24:14 PM	SiCl4 post valve closed
2/22/2012	1:24:14 PM	Bypass valve closed
2/22/2012	1:24:14 PM	Bubbler valve closed
2/22/2012	1:24:14 PM	Helium valve opened
2/22/2012	1:24:14 PM	Main Vac valve opened
2/22/2012	1:24:14 PM	Helium MFC set to  20.000000
2/22/2012	1:24:14 PM	H2 MFC set to  0.000000
2/22/2012	1:24:14 PM	BCl3 MFC set to  0.000000
2/22/2012	1:24:14 PM	PH3 MFC set to  0.000000
2/22/2012	1:24:14 PM	SiCl4 MFC set to  0.000000
2/22/2012	1:24:14 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	1:24:14 PM	Tube furnace set to 0
2/22/2012	1:24:44 PM	Helium valve closed
2/22/2012	1:24:44 PM	H2 valve closed
2/22/2012	1:24:44 PM	BCl3 valve closed
2/22/2012	1:24:44 PM	PH3 valve closed
2/22/2012	1:24:44 PM	SiCl4 pre valve closed
2/22/2012	1:24:44 PM	SiCl4 post valve closed
2/22/2012	1:24:44 PM	Bypass valve closed
2/22/2012	1:24:44 PM	Bubbler valve closed
2/22/2012	1:24:44 PM	Main Vac valve opened
2/22/2012	1:24:44 PM	Helium MFC set to  0.000000
2/22/2012	1:24:44 PM	H2 MFC set to  0.000000
2/22/2012	1:24:44 PM	BCl3 MFC set to  0.000000
2/22/2012	1:24:44 PM	PH3 MFC set to  0.000000
2/22/2012	1:24:44 PM	SiCl4 MFC set to  0.000000
2/22/2012	1:24:44 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	1:24:44 PM	Tube furnace set to 0
2/22/2012	1:25:14 PM	H2 valve closed
2/22/2012	1:25:14 PM	BCl3 valve closed
2/22/2012	1:25:14 PM	PH3 valve closed
2/22/2012	1:25:14 PM	SiCl4 pre valve closed
2/22/2012	1:25:14 PM	SiCl4 post valve closed
2/22/2012	1:25:14 PM	Bypass valve closed
2/22/2012	1:25:14 PM	Bubbler valve closed
2/22/2012	1:25:14 PM	Helium valve opened
2/22/2012	1:25:14 PM	Main Vac valve opened
2/22/2012	1:25:14 PM	Helium MFC set to  20.000000
2/22/2012	1:25:14 PM	H2 MFC set to  0.000000
2/22/2012	1:25:14 PM	BCl3 MFC set to  0.000000
2/22/2012	1:25:14 PM	PH3 MFC set to  0.000000
2/22/2012	1:25:14 PM	SiCl4 MFC set to  0.000000
2/22/2012	1:25:14 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	1:25:15 PM	Tube furnace set to 0
2/22/2012	1:25:45 PM	Helium valve closed
2/22/2012	1:25:45 PM	H2 valve closed
2/22/2012	1:25:45 PM	BCl3 valve closed
2/22/2012	1:25:45 PM	PH3 valve closed
2/22/2012	1:25:45 PM	SiCl4 pre valve closed
2/22/2012	1:25:45 PM	SiCl4 post valve closed
2/22/2012	1:25:45 PM	Bypass valve closed
2/22/2012	1:25:45 PM	Bubbler valve closed
2/22/2012	1:25:45 PM	Main Vac valve opened
2/22/2012	1:25:45 PM	Helium MFC set to  0.000000
2/22/2012	1:25:45 PM	H2 MFC set to  0.000000
2/22/2012	1:25:45 PM	BCl3 MFC set to  0.000000
2/22/2012	1:25:45 PM	PH3 MFC set to  0.000000
2/22/2012	1:25:45 PM	SiCl4 MFC set to  0.000000
2/22/2012	1:25:45 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	1:25:45 PM	Tube furnace set to 0
2/22/2012	1:26:15 PM	H2 valve closed
2/22/2012	1:26:15 PM	BCl3 valve closed
2/22/2012	1:26:15 PM	PH3 valve closed
2/22/2012	1:26:15 PM	SiCl4 pre valve closed
2/22/2012	1:26:15 PM	SiCl4 post valve closed
2/22/2012	1:26:15 PM	Bypass valve closed
2/22/2012	1:26:15 PM	Bubbler valve closed
2/22/2012	1:26:15 PM	Helium valve opened
2/22/2012	1:26:15 PM	Main Vac valve opened
2/22/2012	1:26:15 PM	Helium MFC set to  20.000000
2/22/2012	1:26:15 PM	H2 MFC set to  0.000000
2/22/2012	1:26:15 PM	BCl3 MFC set to  0.000000
2/22/2012	1:26:15 PM	PH3 MFC set to  0.000000
2/22/2012	1:26:15 PM	SiCl4 MFC set to  0.000000
2/22/2012	1:26:15 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	1:26:15 PM	Tube furnace set to 0
2/22/2012	1:26:45 PM	Helium valve closed
2/22/2012	1:26:45 PM	H2 valve closed
2/22/2012	1:26:45 PM	BCl3 valve closed
2/22/2012	1:26:45 PM	PH3 valve closed
2/22/2012	1:26:45 PM	SiCl4 pre valve closed
2/22/2012	1:26:45 PM	SiCl4 post valve closed
2/22/2012	1:26:45 PM	Bypass valve closed
2/22/2012	1:26:45 PM	Bubbler valve closed
2/22/2012	1:26:45 PM	Main Vac valve opened
2/22/2012	1:26:45 PM	Helium MFC set to  0.000000
2/22/2012	1:26:45 PM	H2 MFC set to  0.000000
2/22/2012	1:26:45 PM	BCl3 MFC set to  0.000000
2/22/2012	1:26:45 PM	PH3 MFC set to  0.000000
2/22/2012	1:26:45 PM	SiCl4 MFC set to  0.000000
2/22/2012	1:26:45 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	1:26:45 PM	Tube furnace set to 0
2/22/2012	1:27:15 PM	H2 valve closed
2/22/2012	1:27:15 PM	BCl3 valve closed
2/22/2012	1:27:15 PM	PH3 valve closed
2/22/2012	1:27:15 PM	SiCl4 pre valve closed
2/22/2012	1:27:15 PM	SiCl4 post valve closed
2/22/2012	1:27:15 PM	Bypass valve closed
2/22/2012	1:27:15 PM	Bubbler valve closed
2/22/2012	1:27:15 PM	Helium valve opened
2/22/2012	1:27:15 PM	Main Vac valve opened
2/22/2012	1:27:15 PM	Helium MFC set to  20.000000
2/22/2012	1:27:15 PM	H2 MFC set to  0.000000
2/22/2012	1:27:15 PM	BCl3 MFC set to  0.000000
2/22/2012	1:27:15 PM	PH3 MFC set to  0.000000
2/22/2012	1:27:15 PM	SiCl4 MFC set to  0.000000
2/22/2012	1:27:15 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	1:27:15 PM	Tube furnace set to 0
2/22/2012	1:27:45 PM	Helium valve closed
2/22/2012	1:27:45 PM	H2 valve closed
2/22/2012	1:27:45 PM	BCl3 valve closed
2/22/2012	1:27:45 PM	PH3 valve closed
2/22/2012	1:27:45 PM	SiCl4 pre valve closed
2/22/2012	1:27:45 PM	SiCl4 post valve closed
2/22/2012	1:27:45 PM	Bypass valve closed
2/22/2012	1:27:45 PM	Bubbler valve closed
2/22/2012	1:27:45 PM	Main Vac valve opened
2/22/2012	1:27:45 PM	Helium MFC set to  0.000000
2/22/2012	1:27:45 PM	H2 MFC set to  0.000000
2/22/2012	1:27:45 PM	BCl3 MFC set to  0.000000
2/22/2012	1:27:46 PM	PH3 MFC set to  0.000000
2/22/2012	1:27:46 PM	SiCl4 MFC set to  0.000000
2/22/2012	1:27:46 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	1:27:46 PM	Tube furnace set to 0
2/22/2012	1:28:16 PM	H2 valve closed
2/22/2012	1:28:16 PM	BCl3 valve closed
2/22/2012	1:28:16 PM	PH3 valve closed
2/22/2012	1:28:16 PM	SiCl4 pre valve closed
2/22/2012	1:28:16 PM	SiCl4 post valve closed
2/22/2012	1:28:16 PM	Bypass valve closed
2/22/2012	1:28:16 PM	Bubbler valve closed
2/22/2012	1:28:16 PM	Helium valve opened
2/22/2012	1:28:16 PM	Main Vac valve opened
2/22/2012	1:28:16 PM	Helium MFC set to  20.000000
2/22/2012	1:28:16 PM	H2 MFC set to  0.000000
2/22/2012	1:28:16 PM	BCl3 MFC set to  0.000000
2/22/2012	1:28:16 PM	PH3 MFC set to  0.000000
2/22/2012	1:28:16 PM	SiCl4 MFC set to  0.000000
2/22/2012	1:28:16 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	1:28:16 PM	Tube furnace set to 0
2/22/2012	1:28:46 PM	Helium valve closed
2/22/2012	1:28:46 PM	H2 valve closed
2/22/2012	1:28:46 PM	BCl3 valve closed
2/22/2012	1:28:46 PM	PH3 valve closed
2/22/2012	1:28:46 PM	SiCl4 pre valve closed
2/22/2012	1:28:46 PM	SiCl4 post valve closed
2/22/2012	1:28:46 PM	Bypass valve closed
2/22/2012	1:28:46 PM	Bubbler valve closed
2/22/2012	1:28:46 PM	Main Vac valve opened
2/22/2012	1:28:46 PM	Helium MFC set to  0.000000
2/22/2012	1:28:46 PM	H2 MFC set to  0.000000
2/22/2012	1:28:46 PM	BCl3 MFC set to  0.000000
2/22/2012	1:28:46 PM	PH3 MFC set to  0.000000
2/22/2012	1:28:46 PM	SiCl4 MFC set to  0.000000
2/22/2012	1:28:46 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	1:28:46 PM	Tube furnace set to 0
2/22/2012	1:29:16 PM	H2 valve closed
2/22/2012	1:29:16 PM	BCl3 valve closed
2/22/2012	1:29:16 PM	PH3 valve closed
2/22/2012	1:29:16 PM	SiCl4 pre valve closed
2/22/2012	1:29:16 PM	SiCl4 post valve closed
2/22/2012	1:29:16 PM	Bypass valve closed
2/22/2012	1:29:16 PM	Bubbler valve closed
2/22/2012	1:29:16 PM	Helium valve opened
2/22/2012	1:29:16 PM	Main Vac valve opened
2/22/2012	1:29:16 PM	Helium MFC set to  20.000000
2/22/2012	1:29:16 PM	H2 MFC set to  0.000000
2/22/2012	1:29:16 PM	BCl3 MFC set to  0.000000
2/22/2012	1:29:16 PM	PH3 MFC set to  0.000000
2/22/2012	1:29:16 PM	SiCl4 MFC set to  0.000000
2/22/2012	1:29:16 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	1:29:16 PM	Tube furnace set to 0
2/22/2012	1:29:46 PM	Helium valve closed
2/22/2012	1:29:46 PM	H2 valve closed
2/22/2012	1:29:46 PM	BCl3 valve closed
2/22/2012	1:29:46 PM	PH3 valve closed
2/22/2012	1:29:46 PM	SiCl4 pre valve closed
2/22/2012	1:29:46 PM	SiCl4 post valve closed
2/22/2012	1:29:46 PM	Bypass valve closed
2/22/2012	1:29:46 PM	Bubbler valve closed
2/22/2012	1:29:46 PM	Main Vac valve opened
2/22/2012	1:29:46 PM	Helium MFC set to  0.000000
2/22/2012	1:29:46 PM	H2 MFC set to  0.000000
2/22/2012	1:29:46 PM	BCl3 MFC set to  0.000000
2/22/2012	1:29:46 PM	PH3 MFC set to  0.000000
2/22/2012	1:29:46 PM	SiCl4 MFC set to  0.000000
2/22/2012	1:29:46 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	1:29:47 PM	Tube furnace set to 0
2/22/2012	1:30:17 PM	H2 valve closed
2/22/2012	1:30:17 PM	BCl3 valve closed
2/22/2012	1:30:17 PM	PH3 valve closed
2/22/2012	1:30:17 PM	SiCl4 pre valve closed
2/22/2012	1:30:17 PM	SiCl4 post valve closed
2/22/2012	1:30:17 PM	Bypass valve closed
2/22/2012	1:30:17 PM	Bubbler valve closed
2/22/2012	1:30:17 PM	Helium valve opened
2/22/2012	1:30:17 PM	Main Vac valve opened
2/22/2012	1:30:17 PM	Helium MFC set to  20.000000
2/22/2012	1:30:17 PM	H2 MFC set to  0.000000
2/22/2012	1:30:17 PM	BCl3 MFC set to  0.000000
2/22/2012	1:30:17 PM	PH3 MFC set to  0.000000
2/22/2012	1:30:17 PM	SiCl4 MFC set to  0.000000
2/22/2012	1:30:17 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	1:30:17 PM	Tube furnace set to 0
2/22/2012	1:30:47 PM	Helium valve closed
2/22/2012	1:30:47 PM	H2 valve closed
2/22/2012	1:30:47 PM	BCl3 valve closed
2/22/2012	1:30:47 PM	PH3 valve closed
2/22/2012	1:30:47 PM	SiCl4 pre valve closed
2/22/2012	1:30:47 PM	SiCl4 post valve closed
2/22/2012	1:30:47 PM	Bypass valve closed
2/22/2012	1:30:47 PM	Bubbler valve closed
2/22/2012	1:30:47 PM	Main Vac valve opened
2/22/2012	1:30:47 PM	Helium MFC set to  0.000000
2/22/2012	1:30:47 PM	H2 MFC set to  0.000000
2/22/2012	1:30:47 PM	BCl3 MFC set to  0.000000
2/22/2012	1:30:47 PM	PH3 MFC set to  0.000000
2/22/2012	1:30:47 PM	SiCl4 MFC set to  0.000000
2/22/2012	1:30:47 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	1:30:47 PM	Tube furnace set to 0
2/22/2012	1:31:17 PM	H2 valve closed
2/22/2012	1:31:17 PM	BCl3 valve closed
2/22/2012	1:31:17 PM	PH3 valve closed
2/22/2012	1:31:17 PM	SiCl4 pre valve closed
2/22/2012	1:31:17 PM	SiCl4 post valve closed
2/22/2012	1:31:17 PM	Bypass valve closed
2/22/2012	1:31:17 PM	Bubbler valve closed
2/22/2012	1:31:17 PM	Helium valve opened
2/22/2012	1:31:17 PM	Main Vac valve opened
2/22/2012	1:31:17 PM	Helium MFC set to  20.000000
2/22/2012	1:31:17 PM	H2 MFC set to  0.000000
2/22/2012	1:31:17 PM	BCl3 MFC set to  0.000000
2/22/2012	1:31:17 PM	PH3 MFC set to  0.000000
2/22/2012	1:31:17 PM	SiCl4 MFC set to  0.000000
2/22/2012	1:31:17 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	1:31:17 PM	Tube furnace set to 0
2/22/2012	1:31:47 PM	Helium valve closed
2/22/2012	1:31:47 PM	H2 valve closed
2/22/2012	1:31:47 PM	BCl3 valve closed
2/22/2012	1:31:47 PM	PH3 valve closed
2/22/2012	1:31:47 PM	SiCl4 pre valve closed
2/22/2012	1:31:47 PM	SiCl4 post valve closed
2/22/2012	1:31:47 PM	Bypass valve closed
2/22/2012	1:31:47 PM	Bubbler valve closed
2/22/2012	1:31:47 PM	Main Vac valve opened
2/22/2012	1:31:47 PM	Helium MFC set to  0.000000
2/22/2012	1:31:47 PM	H2 MFC set to  0.000000
2/22/2012	1:31:47 PM	BCl3 MFC set to  0.000000
2/22/2012	1:31:47 PM	PH3 MFC set to  0.000000
2/22/2012	1:31:47 PM	SiCl4 MFC set to  0.000000
2/22/2012	1:31:47 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	1:31:47 PM	Tube furnace set to 200
2/22/2012	1:32:17 PM	H2 valve closed
2/22/2012	1:32:17 PM	BCl3 valve closed
2/22/2012	1:32:17 PM	PH3 valve closed
2/22/2012	1:32:17 PM	SiCl4 pre valve closed
2/22/2012	1:32:17 PM	SiCl4 post valve closed
2/22/2012	1:32:17 PM	Bypass valve closed
2/22/2012	1:32:17 PM	Bubbler valve closed
2/22/2012	1:32:17 PM	Helium valve opened
2/22/2012	1:32:17 PM	Main Vac valve opened
2/22/2012	1:32:17 PM	Helium MFC set to  20.000000
2/22/2012	1:32:17 PM	H2 MFC set to  0.000000
2/22/2012	1:32:17 PM	BCl3 MFC set to  0.000000
2/22/2012	1:32:17 PM	PH3 MFC set to  0.000000
2/22/2012	1:32:17 PM	SiCl4 MFC set to  0.000000
2/22/2012	1:32:17 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	1:32:18 PM	Tube furnace set to 200
2/22/2012	1:32:48 PM	Helium valve closed
2/22/2012	1:32:48 PM	H2 valve closed
2/22/2012	1:32:48 PM	BCl3 valve closed
2/22/2012	1:32:48 PM	PH3 valve closed
2/22/2012	1:32:48 PM	SiCl4 pre valve closed
2/22/2012	1:32:48 PM	SiCl4 post valve closed
2/22/2012	1:32:48 PM	Bypass valve closed
2/22/2012	1:32:48 PM	Bubbler valve closed
2/22/2012	1:32:48 PM	Main Vac valve opened
2/22/2012	1:32:48 PM	Helium MFC set to  0.000000
2/22/2012	1:32:48 PM	H2 MFC set to  0.000000
2/22/2012	1:32:48 PM	BCl3 MFC set to  0.000000
2/22/2012	1:32:48 PM	PH3 MFC set to  0.000000
2/22/2012	1:32:48 PM	SiCl4 MFC set to  0.000000
2/22/2012	1:32:48 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	1:32:48 PM	Tube furnace set to 200
2/22/2012	1:33:18 PM	H2 valve closed
2/22/2012	1:33:18 PM	BCl3 valve closed
2/22/2012	1:33:18 PM	PH3 valve closed
2/22/2012	1:33:18 PM	SiCl4 pre valve closed
2/22/2012	1:33:18 PM	SiCl4 post valve closed
2/22/2012	1:33:18 PM	Bypass valve closed
2/22/2012	1:33:18 PM	Bubbler valve closed
2/22/2012	1:33:18 PM	Helium valve opened
2/22/2012	1:33:18 PM	Main Vac valve opened
2/22/2012	1:33:18 PM	Helium MFC set to  20.000000
2/22/2012	1:33:18 PM	H2 MFC set to  0.000000
2/22/2012	1:33:18 PM	BCl3 MFC set to  0.000000
2/22/2012	1:33:18 PM	PH3 MFC set to  0.000000
2/22/2012	1:33:18 PM	SiCl4 MFC set to  0.000000
2/22/2012	1:33:18 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	1:33:18 PM	Tube furnace set to 200
2/22/2012	1:33:48 PM	Helium valve closed
2/22/2012	1:33:48 PM	H2 valve closed
2/22/2012	1:33:48 PM	BCl3 valve closed
2/22/2012	1:33:48 PM	PH3 valve closed
2/22/2012	1:33:48 PM	SiCl4 pre valve closed
2/22/2012	1:33:48 PM	SiCl4 post valve closed
2/22/2012	1:33:48 PM	Bypass valve closed
2/22/2012	1:33:48 PM	Bubbler valve closed
2/22/2012	1:33:48 PM	Main Vac valve opened
2/22/2012	1:33:48 PM	Helium MFC set to  0.000000
2/22/2012	1:33:48 PM	H2 MFC set to  0.000000
2/22/2012	1:33:48 PM	BCl3 MFC set to  0.000000
2/22/2012	1:33:48 PM	PH3 MFC set to  0.000000
2/22/2012	1:33:48 PM	SiCl4 MFC set to  0.000000
2/22/2012	1:33:48 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	1:33:48 PM	Tube furnace set to 200
2/22/2012	1:34:18 PM	H2 valve closed
2/22/2012	1:34:18 PM	BCl3 valve closed
2/22/2012	1:34:18 PM	PH3 valve closed
2/22/2012	1:34:18 PM	SiCl4 pre valve closed
2/22/2012	1:34:18 PM	SiCl4 post valve closed
2/22/2012	1:34:18 PM	Bypass valve closed
2/22/2012	1:34:18 PM	Bubbler valve closed
2/22/2012	1:34:18 PM	Helium valve opened
2/22/2012	1:34:18 PM	Main Vac valve opened
2/22/2012	1:34:18 PM	Helium MFC set to  20.000000
2/22/2012	1:34:18 PM	H2 MFC set to  0.000000
2/22/2012	1:34:18 PM	BCl3 MFC set to  0.000000
2/22/2012	1:34:18 PM	PH3 MFC set to  0.000000
2/22/2012	1:34:18 PM	SiCl4 MFC set to  0.000000
2/22/2012	1:34:18 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	1:34:18 PM	Tube furnace set to 200
2/22/2012	1:34:48 PM	Helium valve closed
2/22/2012	1:34:48 PM	H2 valve closed
2/22/2012	1:34:48 PM	BCl3 valve closed
2/22/2012	1:34:48 PM	PH3 valve closed
2/22/2012	1:34:48 PM	SiCl4 pre valve closed
2/22/2012	1:34:48 PM	SiCl4 post valve closed
2/22/2012	1:34:48 PM	Bypass valve closed
2/22/2012	1:34:48 PM	Bubbler valve closed
2/22/2012	1:34:48 PM	Main Vac valve opened
2/22/2012	1:34:48 PM	Helium MFC set to  0.000000
2/22/2012	1:34:48 PM	H2 MFC set to  0.000000
2/22/2012	1:34:48 PM	BCl3 MFC set to  0.000000
2/22/2012	1:34:49 PM	PH3 MFC set to  0.000000
2/22/2012	1:34:49 PM	SiCl4 MFC set to  0.000000
2/22/2012	1:34:49 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	1:34:49 PM	Tube furnace set to 200
2/22/2012	1:35:19 PM	H2 valve closed
2/22/2012	1:35:19 PM	BCl3 valve closed
2/22/2012	1:35:19 PM	PH3 valve closed
2/22/2012	1:35:19 PM	SiCl4 pre valve closed
2/22/2012	1:35:19 PM	SiCl4 post valve closed
2/22/2012	1:35:19 PM	Bypass valve closed
2/22/2012	1:35:19 PM	Bubbler valve closed
2/22/2012	1:35:19 PM	Helium valve opened
2/22/2012	1:35:19 PM	Main Vac valve opened
2/22/2012	1:35:19 PM	Helium MFC set to  20.000000
2/22/2012	1:35:19 PM	H2 MFC set to  0.000000
2/22/2012	1:35:19 PM	BCl3 MFC set to  0.000000
2/22/2012	1:35:19 PM	PH3 MFC set to  0.000000
2/22/2012	1:35:19 PM	SiCl4 MFC set to  0.000000
2/22/2012	1:35:19 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	1:35:19 PM	Tube furnace set to 200
2/22/2012	1:35:49 PM	Helium valve closed
2/22/2012	1:35:49 PM	H2 valve closed
2/22/2012	1:35:49 PM	BCl3 valve closed
2/22/2012	1:35:49 PM	PH3 valve closed
2/22/2012	1:35:49 PM	SiCl4 pre valve closed
2/22/2012	1:35:49 PM	SiCl4 post valve closed
2/22/2012	1:35:49 PM	Bypass valve closed
2/22/2012	1:35:49 PM	Bubbler valve closed
2/22/2012	1:35:49 PM	Main Vac valve opened
2/22/2012	1:35:49 PM	Helium MFC set to  0.000000
2/22/2012	1:35:49 PM	H2 MFC set to  0.000000
2/22/2012	1:35:49 PM	BCl3 MFC set to  0.000000
2/22/2012	1:35:49 PM	PH3 MFC set to  0.000000
2/22/2012	1:35:49 PM	SiCl4 MFC set to  0.000000
2/22/2012	1:35:49 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	1:35:49 PM	Tube furnace set to 200
2/22/2012	1:36:19 PM	H2 valve closed
2/22/2012	1:36:19 PM	BCl3 valve closed
2/22/2012	1:36:19 PM	PH3 valve closed
2/22/2012	1:36:19 PM	SiCl4 pre valve closed
2/22/2012	1:36:19 PM	SiCl4 post valve closed
2/22/2012	1:36:19 PM	Bypass valve closed
2/22/2012	1:36:19 PM	Bubbler valve closed
2/22/2012	1:36:19 PM	Helium valve opened
2/22/2012	1:36:19 PM	Main Vac valve opened
2/22/2012	1:36:19 PM	Helium MFC set to  20.000000
2/22/2012	1:36:19 PM	H2 MFC set to  0.000000
2/22/2012	1:36:19 PM	BCl3 MFC set to  0.000000
2/22/2012	1:36:19 PM	PH3 MFC set to  0.000000
2/22/2012	1:36:19 PM	SiCl4 MFC set to  0.000000
2/22/2012	1:36:19 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	1:36:19 PM	Tube furnace set to 200
2/22/2012	1:36:49 PM	Helium valve closed
2/22/2012	1:36:49 PM	H2 valve closed
2/22/2012	1:36:49 PM	BCl3 valve closed
2/22/2012	1:36:49 PM	PH3 valve closed
2/22/2012	1:36:49 PM	SiCl4 pre valve closed
2/22/2012	1:36:49 PM	SiCl4 post valve closed
2/22/2012	1:36:49 PM	Bypass valve closed
2/22/2012	1:36:49 PM	Bubbler valve closed
2/22/2012	1:36:49 PM	Main Vac valve opened
2/22/2012	1:36:49 PM	Helium MFC set to  0.000000
2/22/2012	1:36:49 PM	H2 MFC set to  0.000000
2/22/2012	1:36:49 PM	BCl3 MFC set to  0.000000
2/22/2012	1:36:49 PM	PH3 MFC set to  0.000000
2/22/2012	1:36:49 PM	SiCl4 MFC set to  0.000000
2/22/2012	1:36:49 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	1:36:50 PM	Tube furnace set to 200
2/22/2012	1:37:20 PM	H2 valve closed
2/22/2012	1:37:20 PM	BCl3 valve closed
2/22/2012	1:37:20 PM	PH3 valve closed
2/22/2012	1:37:20 PM	SiCl4 pre valve closed
2/22/2012	1:37:20 PM	SiCl4 post valve closed
2/22/2012	1:37:20 PM	Bypass valve closed
2/22/2012	1:37:20 PM	Bubbler valve closed
2/22/2012	1:37:20 PM	Helium valve opened
2/22/2012	1:37:20 PM	Main Vac valve opened
2/22/2012	1:37:20 PM	Helium MFC set to  20.000000
2/22/2012	1:37:20 PM	H2 MFC set to  0.000000
2/22/2012	1:37:20 PM	BCl3 MFC set to  0.000000
2/22/2012	1:37:20 PM	PH3 MFC set to  0.000000
2/22/2012	1:37:20 PM	SiCl4 MFC set to  0.000000
2/22/2012	1:37:20 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	1:37:20 PM	Tube furnace set to 200
2/22/2012	1:37:50 PM	Helium valve closed
2/22/2012	1:37:50 PM	H2 valve closed
2/22/2012	1:37:50 PM	BCl3 valve closed
2/22/2012	1:37:50 PM	PH3 valve closed
2/22/2012	1:37:50 PM	SiCl4 pre valve closed
2/22/2012	1:37:50 PM	SiCl4 post valve closed
2/22/2012	1:37:50 PM	Bypass valve closed
2/22/2012	1:37:50 PM	Bubbler valve closed
2/22/2012	1:37:50 PM	Main Vac valve opened
2/22/2012	1:37:50 PM	Helium MFC set to  0.000000
2/22/2012	1:37:50 PM	H2 MFC set to  0.000000
2/22/2012	1:37:50 PM	BCl3 MFC set to  0.000000
2/22/2012	1:37:50 PM	PH3 MFC set to  0.000000
2/22/2012	1:37:50 PM	SiCl4 MFC set to  0.000000
2/22/2012	1:37:50 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	1:37:50 PM	Tube furnace set to 0
2/22/2012	1:37:51 PM	Run finished at 1:37 PM
2/22/2012	1:40:47 PM	Main Vac valve closed
2/22/2012	1:40:56 PM	Main Vac valve opened
2/22/2012	1:42:41 PM	Recipe started at 1:42 PM
2/22/2012	1:42:41 PM	Helium valve closed
2/22/2012	1:42:41 PM	H2 valve closed
2/22/2012	1:42:41 PM	BCl3 valve closed
2/22/2012	1:42:41 PM	PH3 valve closed
2/22/2012	1:42:41 PM	SiCl4 pre valve closed
2/22/2012	1:42:41 PM	SiCl4 post valve closed
2/22/2012	1:42:41 PM	Main Vac valve closed
2/22/2012	1:42:41 PM	Bypass valve closed
2/22/2012	1:42:41 PM	Bubbler valve closed
2/22/2012	1:42:41 PM	Helium MFC set to  0.000000
2/22/2012	1:42:41 PM	H2 MFC set to  0.000000
2/22/2012	1:42:41 PM	BCl3 MFC set to  0.000000
2/22/2012	1:42:41 PM	PH3 MFC set to  0.000000
2/22/2012	1:42:41 PM	SiCl4 MFC set to  0.000000
2/22/2012	1:42:41 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	1:42:41 PM	Tube furnace set to 0
2/22/2012	1:42:44 PM	Helium valve closed
2/22/2012	1:42:44 PM	BCl3 valve closed
2/22/2012	1:42:44 PM	PH3 valve closed
2/22/2012	1:42:44 PM	SiCl4 pre valve closed
2/22/2012	1:42:44 PM	SiCl4 post valve closed
2/22/2012	1:42:44 PM	Main Vac valve closed
2/22/2012	1:42:44 PM	Bypass valve closed
2/22/2012	1:42:44 PM	Bubbler valve closed
2/22/2012	1:42:44 PM	H2 valve opened
2/22/2012	1:42:44 PM	Helium MFC set to  0.000000
2/22/2012	1:42:44 PM	H2 MFC set to  500.000000
2/22/2012	1:42:44 PM	BCl3 MFC set to  0.000000
2/22/2012	1:42:44 PM	PH3 MFC set to  0.000000
2/22/2012	1:42:44 PM	SiCl4 MFC set to  0.000000
2/22/2012	1:42:44 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	1:42:44 PM	Tube furnace set to 0
2/22/2012	1:43:48 PM	Helium valve closed
2/22/2012	1:43:48 PM	BCl3 valve closed
2/22/2012	1:43:48 PM	PH3 valve closed
2/22/2012	1:43:48 PM	SiCl4 pre valve closed
2/22/2012	1:43:48 PM	SiCl4 post valve closed
2/22/2012	1:43:48 PM	Main Vac valve closed
2/22/2012	1:43:48 PM	Bypass valve closed
2/22/2012	1:43:48 PM	H2 valve opened
2/22/2012	1:43:48 PM	Bubbler valve opened
2/22/2012	1:43:48 PM	Helium MFC set to  0.000000
2/22/2012	1:43:48 PM	H2 MFC set to  500.000000
2/22/2012	1:43:48 PM	BCl3 MFC set to  0.000000
2/22/2012	1:43:48 PM	PH3 MFC set to  0.000000
2/22/2012	1:43:48 PM	SiCl4 MFC set to  0.000000
2/22/2012	1:43:48 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	1:43:48 PM	Tube furnace set to 0
2/22/2012	1:43:49 PM	Helium valve closed
2/22/2012	1:43:49 PM	BCl3 valve closed
2/22/2012	1:43:49 PM	PH3 valve closed
2/22/2012	1:43:49 PM	SiCl4 pre valve closed
2/22/2012	1:43:49 PM	SiCl4 post valve closed
2/22/2012	1:43:49 PM	Main Vac valve closed
2/22/2012	1:43:49 PM	Bypass valve closed
2/22/2012	1:43:49 PM	H2 valve opened
2/22/2012	1:43:49 PM	Bubbler valve opened
2/22/2012	1:43:49 PM	Helium MFC set to  0.000000
2/22/2012	1:43:49 PM	H2 MFC set to  500.000000
2/22/2012	1:43:49 PM	BCl3 MFC set to  0.000000
2/22/2012	1:43:49 PM	PH3 MFC set to  0.000000
2/22/2012	1:43:49 PM	SiCl4 MFC set to  0.000000
2/22/2012	1:43:49 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	1:43:49 PM	Tube furnace set to 1000
2/22/2012	2:03:49 PM	Helium valve closed
2/22/2012	2:03:49 PM	PH3 valve closed
2/22/2012	2:03:49 PM	Main Vac valve closed
2/22/2012	2:03:49 PM	Bypass valve closed
2/22/2012	2:03:49 PM	H2 valve opened
2/22/2012	2:03:49 PM	BCl3 valve opened
2/22/2012	2:03:49 PM	SiCl4 pre valve opened
2/22/2012	2:03:49 PM	SiCl4 post valve opened
2/22/2012	2:03:49 PM	Bubbler valve opened
2/22/2012	2:03:49 PM	Helium MFC set to  0.000000
2/22/2012	2:03:49 PM	H2 MFC set to  450.000000
2/22/2012	2:03:49 PM	BCl3 MFC set to  1.500000
2/22/2012	2:03:49 PM	PH3 MFC set to  0.000000
2/22/2012	2:03:49 PM	SiCl4 MFC set to  50.000000
2/22/2012	2:03:49 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	2:03:49 PM	Tube furnace set to 1000
2/22/2012	2:15:49 PM	Helium valve closed
2/22/2012	2:15:49 PM	BCl3 valve closed
2/22/2012	2:15:49 PM	PH3 valve closed
2/22/2012	2:15:49 PM	SiCl4 pre valve closed
2/22/2012	2:15:49 PM	SiCl4 post valve closed
2/22/2012	2:15:49 PM	Main Vac valve closed
2/22/2012	2:15:49 PM	Bypass valve closed
2/22/2012	2:15:49 PM	H2 valve opened
2/22/2012	2:15:49 PM	Bubbler valve opened
2/22/2012	2:15:49 PM	Helium MFC set to  0.000000
2/22/2012	2:15:49 PM	H2 MFC set to  500.000000
2/22/2012	2:15:49 PM	BCl3 MFC set to  0.000000
2/22/2012	2:15:49 PM	PH3 MFC set to  0.000000
2/22/2012	2:15:49 PM	SiCl4 MFC set to  0.000000
2/22/2012	2:15:49 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	2:15:50 PM	Tube furnace set to 950
2/22/2012	2:17:50 PM	Helium valve closed
2/22/2012	2:17:50 PM	BCl3 valve closed
2/22/2012	2:17:50 PM	PH3 valve closed
2/22/2012	2:17:50 PM	SiCl4 pre valve closed
2/22/2012	2:17:50 PM	SiCl4 post valve closed
2/22/2012	2:17:50 PM	Main Vac valve closed
2/22/2012	2:17:50 PM	Bypass valve closed
2/22/2012	2:17:50 PM	H2 valve opened
2/22/2012	2:17:50 PM	Bubbler valve opened
2/22/2012	2:17:50 PM	Helium MFC set to  0.000000
2/22/2012	2:17:50 PM	H2 MFC set to  500.000000
2/22/2012	2:17:50 PM	BCl3 MFC set to  0.000000
2/22/2012	2:17:50 PM	PH3 MFC set to  0.000000
2/22/2012	2:17:50 PM	SiCl4 MFC set to  0.000000
2/22/2012	2:17:50 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	2:17:50 PM	Tube furnace set to 900
2/22/2012	2:19:50 PM	Helium valve closed
2/22/2012	2:19:50 PM	BCl3 valve closed
2/22/2012	2:19:50 PM	PH3 valve closed
2/22/2012	2:19:50 PM	SiCl4 pre valve closed
2/22/2012	2:19:50 PM	SiCl4 post valve closed
2/22/2012	2:19:50 PM	Main Vac valve closed
2/22/2012	2:19:50 PM	Bypass valve closed
2/22/2012	2:19:50 PM	H2 valve opened
2/22/2012	2:19:50 PM	Bubbler valve opened
2/22/2012	2:19:50 PM	Helium MFC set to  0.000000
2/22/2012	2:19:50 PM	H2 MFC set to  500.000000
2/22/2012	2:19:50 PM	BCl3 MFC set to  0.000000
2/22/2012	2:19:50 PM	PH3 MFC set to  0.000000
2/22/2012	2:19:50 PM	SiCl4 MFC set to  0.000000
2/22/2012	2:19:50 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	2:19:50 PM	Tube furnace set to 850
2/22/2012	2:21:50 PM	H2 valve closed
2/22/2012	2:21:50 PM	BCl3 valve closed
2/22/2012	2:21:50 PM	PH3 valve closed
2/22/2012	2:21:50 PM	SiCl4 pre valve closed
2/22/2012	2:21:50 PM	SiCl4 post valve closed
2/22/2012	2:21:50 PM	Main Vac valve closed
2/22/2012	2:21:50 PM	Bypass valve closed
2/22/2012	2:21:50 PM	Helium valve opened
2/22/2012	2:21:50 PM	Bubbler valve opened
2/22/2012	2:21:50 PM	Helium MFC set to  500.000000
2/22/2012	2:21:50 PM	H2 MFC set to  0.000000
2/22/2012	2:21:50 PM	BCl3 MFC set to  0.000000
2/22/2012	2:21:50 PM	PH3 MFC set to  0.000000
2/22/2012	2:21:50 PM	SiCl4 MFC set to  0.000000
2/22/2012	2:21:50 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	2:21:50 PM	Tube furnace set to 800
2/22/2012	2:23:50 PM	H2 valve closed
2/22/2012	2:23:50 PM	BCl3 valve closed
2/22/2012	2:23:50 PM	PH3 valve closed
2/22/2012	2:23:50 PM	SiCl4 pre valve closed
2/22/2012	2:23:50 PM	SiCl4 post valve closed
2/22/2012	2:23:50 PM	Main Vac valve closed
2/22/2012	2:23:50 PM	Bypass valve closed
2/22/2012	2:23:50 PM	Helium valve opened
2/22/2012	2:23:50 PM	Bubbler valve opened
2/22/2012	2:23:50 PM	Helium MFC set to  500.000000
2/22/2012	2:23:50 PM	H2 MFC set to  0.000000
2/22/2012	2:23:50 PM	BCl3 MFC set to  0.000000
2/22/2012	2:23:50 PM	PH3 MFC set to  0.000000
2/22/2012	2:23:50 PM	SiCl4 MFC set to  0.000000
2/22/2012	2:23:50 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	2:23:50 PM	Tube furnace set to 750
2/22/2012	2:25:50 PM	H2 valve closed
2/22/2012	2:25:50 PM	BCl3 valve closed
2/22/2012	2:25:50 PM	PH3 valve closed
2/22/2012	2:25:50 PM	SiCl4 pre valve closed
2/22/2012	2:25:50 PM	SiCl4 post valve closed
2/22/2012	2:25:50 PM	Main Vac valve closed
2/22/2012	2:25:50 PM	Bypass valve closed
2/22/2012	2:25:50 PM	Helium valve opened
2/22/2012	2:25:50 PM	Bubbler valve opened
2/22/2012	2:25:50 PM	Helium MFC set to  500.000000
2/22/2012	2:25:50 PM	H2 MFC set to  0.000000
2/22/2012	2:25:50 PM	BCl3 MFC set to  0.000000
2/22/2012	2:25:50 PM	PH3 MFC set to  0.000000
2/22/2012	2:25:50 PM	SiCl4 MFC set to  0.000000
2/22/2012	2:25:50 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	2:25:51 PM	Tube furnace set to 0
2/22/2012	2:45:51 PM	Helium valve closed
2/22/2012	2:45:51 PM	H2 valve closed
2/22/2012	2:45:51 PM	BCl3 valve closed
2/22/2012	2:45:51 PM	PH3 valve closed
2/22/2012	2:45:51 PM	SiCl4 pre valve closed
2/22/2012	2:45:51 PM	SiCl4 post valve closed
2/22/2012	2:45:51 PM	Main Vac valve closed
2/22/2012	2:45:51 PM	Bypass valve closed
2/22/2012	2:45:51 PM	Bubbler valve closed
2/22/2012	2:45:51 PM	Helium MFC set to  0.000000
2/22/2012	2:45:51 PM	H2 MFC set to  0.000000
2/22/2012	2:45:51 PM	BCl3 MFC set to  0.000000
2/22/2012	2:45:51 PM	PH3 MFC set to  0.000000
2/22/2012	2:45:51 PM	SiCl4 MFC set to  0.000000
2/22/2012	2:45:51 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	2:45:51 PM	Tube furnace set to 0
2/22/2012	2:45:52 PM	Helium valve closed
2/22/2012	2:45:52 PM	H2 valve closed
2/22/2012	2:45:52 PM	BCl3 valve closed
2/22/2012	2:45:52 PM	PH3 valve closed
2/22/2012	2:45:52 PM	SiCl4 pre valve closed
2/22/2012	2:45:52 PM	SiCl4 post valve closed
2/22/2012	2:45:52 PM	Main Vac valve closed
2/22/2012	2:45:52 PM	Bubbler valve closed
2/22/2012	2:45:52 PM	Bypass valve opened
2/22/2012	2:45:52 PM	Helium MFC set to  0.000000
2/22/2012	2:45:52 PM	H2 MFC set to  0.000000
2/22/2012	2:45:52 PM	BCl3 MFC set to  0.000000
2/22/2012	2:45:52 PM	PH3 MFC set to  0.000000
2/22/2012	2:45:52 PM	SiCl4 MFC set to  0.000000
2/22/2012	2:45:52 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	2:45:52 PM	Tube furnace set to 0
2/22/2012	2:46:43 PM	Helium valve closed
2/22/2012	2:46:43 PM	H2 valve closed
2/22/2012	2:46:43 PM	BCl3 valve closed
2/22/2012	2:46:43 PM	PH3 valve closed
2/22/2012	2:46:43 PM	SiCl4 pre valve closed
2/22/2012	2:46:43 PM	SiCl4 post valve closed
2/22/2012	2:46:43 PM	Main Vac valve closed
2/22/2012	2:46:43 PM	Bubbler valve closed
2/22/2012	2:46:43 PM	Bypass valve opened
2/22/2012	2:46:43 PM	Helium MFC set to  0.000000
2/22/2012	2:46:43 PM	H2 MFC set to  0.000000
2/22/2012	2:46:43 PM	BCl3 MFC set to  0.000000
2/22/2012	2:46:43 PM	PH3 MFC set to  0.000000
2/22/2012	2:46:43 PM	SiCl4 MFC set to  0.000000
2/22/2012	2:46:43 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	2:46:43 PM	Tube furnace set to 0
2/22/2012	2:47:43 PM	Helium valve closed
2/22/2012	2:47:43 PM	H2 valve closed
2/22/2012	2:47:43 PM	BCl3 valve closed
2/22/2012	2:47:43 PM	PH3 valve closed
2/22/2012	2:47:43 PM	SiCl4 pre valve closed
2/22/2012	2:47:43 PM	SiCl4 post valve closed
2/22/2012	2:47:43 PM	Bypass valve closed
2/22/2012	2:47:43 PM	Bubbler valve closed
2/22/2012	2:47:43 PM	Main Vac valve opened
2/22/2012	2:47:43 PM	Helium MFC set to  0.000000
2/22/2012	2:47:43 PM	H2 MFC set to  0.000000
2/22/2012	2:47:43 PM	BCl3 MFC set to  0.000000
2/22/2012	2:47:43 PM	PH3 MFC set to  0.000000
2/22/2012	2:47:43 PM	SiCl4 MFC set to  0.000000
2/22/2012	2:47:43 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	2:47:43 PM	Tube furnace set to 0
2/22/2012	2:47:44 PM	Run finished at 2:47 PM
2/22/2012	2:48:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/22/2012	2:48:23 PM	Recipe started at 2:48 PM
2/22/2012	2:48:23 PM	Helium valve closed
2/22/2012	2:48:23 PM	H2 valve closed
2/22/2012	2:48:23 PM	BCl3 valve closed
2/22/2012	2:48:23 PM	PH3 valve closed
2/22/2012	2:48:23 PM	SiCl4 pre valve closed
2/22/2012	2:48:23 PM	SiCl4 post valve closed
2/22/2012	2:48:23 PM	Main Vac valve closed
2/22/2012	2:48:23 PM	Bypass valve closed
2/22/2012	2:48:23 PM	Bubbler valve closed
2/22/2012	2:48:23 PM	Helium MFC set to  0.000000
2/22/2012	2:48:23 PM	H2 MFC set to  0.000000
2/22/2012	2:48:23 PM	BCl3 MFC set to  0.000000
2/22/2012	2:48:23 PM	PH3 MFC set to  0.000000
2/22/2012	2:48:23 PM	SiCl4 MFC set to  0.000000
2/22/2012	2:48:23 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	2:48:23 PM	Tube furnace set to 0
2/22/2012	2:48:26 PM	H2 valve closed
2/22/2012	2:48:26 PM	BCl3 valve closed
2/22/2012	2:48:26 PM	PH3 valve closed
2/22/2012	2:48:26 PM	SiCl4 pre valve closed
2/22/2012	2:48:26 PM	SiCl4 post valve closed
2/22/2012	2:48:26 PM	Main Vac valve closed
2/22/2012	2:48:26 PM	Bypass valve closed
2/22/2012	2:48:26 PM	Bubbler valve closed
2/22/2012	2:48:26 PM	Helium valve opened
2/22/2012	2:48:26 PM	Helium MFC set to  500.000000
2/22/2012	2:48:26 PM	H2 MFC set to  0.000000
2/22/2012	2:48:26 PM	BCl3 MFC set to  0.000000
2/22/2012	2:48:26 PM	PH3 MFC set to  0.000000
2/22/2012	2:48:26 PM	SiCl4 MFC set to  0.000000
2/22/2012	2:48:26 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	2:48:26 PM	Tube furnace set to 0
2/22/2012	2:49:29 PM	Helium valve closed
2/22/2012	2:49:29 PM	H2 valve closed
2/22/2012	2:49:29 PM	BCl3 valve closed
2/22/2012	2:49:29 PM	PH3 valve closed
2/22/2012	2:49:29 PM	SiCl4 pre valve closed
2/22/2012	2:49:29 PM	SiCl4 post valve closed
2/22/2012	2:49:29 PM	Main Vac valve closed
2/22/2012	2:49:29 PM	Bypass valve closed
2/22/2012	2:49:29 PM	Bubbler valve closed
2/22/2012	2:49:29 PM	Helium MFC set to  0.000000
2/22/2012	2:49:29 PM	H2 MFC set to  0.000000
2/22/2012	2:49:29 PM	BCl3 MFC set to  0.000000
2/22/2012	2:49:29 PM	PH3 MFC set to  0.000000
2/22/2012	2:49:29 PM	SiCl4 MFC set to  0.000000
2/22/2012	2:49:29 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	2:49:29 PM	Tube furnace set to 0
2/22/2012	2:49:30 PM	Run finished at 2:49 PM
2/22/2012	2:49:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/22/2012	2:53:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/22/2012	2:53:31 PM	Recipe started at 2:53 PM
2/22/2012	2:53:31 PM	Helium valve closed
2/22/2012	2:53:31 PM	H2 valve closed
2/22/2012	2:53:31 PM	BCl3 valve closed
2/22/2012	2:53:31 PM	PH3 valve closed
2/22/2012	2:53:31 PM	SiCl4 pre valve closed
2/22/2012	2:53:31 PM	SiCl4 post valve closed
2/22/2012	2:53:31 PM	Main Vac valve closed
2/22/2012	2:53:31 PM	Bubbler valve closed
2/22/2012	2:53:31 PM	Bypass valve opened
2/22/2012	2:53:31 PM	Helium MFC set to  0.000000
2/22/2012	2:53:31 PM	H2 MFC set to  0.000000
2/22/2012	2:53:31 PM	BCl3 MFC set to  0.000000
2/22/2012	2:53:31 PM	PH3 MFC set to  0.000000
2/22/2012	2:53:31 PM	SiCl4 MFC set to  0.000000
2/22/2012	2:53:31 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	2:53:31 PM	Tube furnace set to 0
2/22/2012	2:54:32 PM	Helium valve closed
2/22/2012	2:54:32 PM	H2 valve closed
2/22/2012	2:54:32 PM	BCl3 valve closed
2/22/2012	2:54:32 PM	PH3 valve closed
2/22/2012	2:54:32 PM	SiCl4 pre valve closed
2/22/2012	2:54:32 PM	SiCl4 post valve closed
2/22/2012	2:54:32 PM	Main Vac valve closed
2/22/2012	2:54:32 PM	Bubbler valve closed
2/22/2012	2:54:32 PM	Bypass valve opened
2/22/2012	2:54:32 PM	Helium MFC set to  0.000000
2/22/2012	2:54:32 PM	H2 MFC set to  0.000000
2/22/2012	2:54:32 PM	BCl3 MFC set to  0.000000
2/22/2012	2:54:32 PM	PH3 MFC set to  0.000000
2/22/2012	2:54:32 PM	SiCl4 MFC set to  0.000000
2/22/2012	2:54:32 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	2:54:32 PM	Tube furnace set to 0
2/22/2012	2:55:32 PM	Helium valve closed
2/22/2012	2:55:32 PM	H2 valve closed
2/22/2012	2:55:32 PM	BCl3 valve closed
2/22/2012	2:55:32 PM	PH3 valve closed
2/22/2012	2:55:32 PM	SiCl4 pre valve closed
2/22/2012	2:55:32 PM	SiCl4 post valve closed
2/22/2012	2:55:32 PM	Bypass valve closed
2/22/2012	2:55:32 PM	Bubbler valve closed
2/22/2012	2:55:32 PM	Main Vac valve opened
2/22/2012	2:55:32 PM	Helium MFC set to  0.000000
2/22/2012	2:55:32 PM	H2 MFC set to  0.000000
2/22/2012	2:55:32 PM	BCl3 MFC set to  0.000000
2/22/2012	2:55:32 PM	PH3 MFC set to  0.000000
2/22/2012	2:55:32 PM	SiCl4 MFC set to  0.000000
2/22/2012	2:55:32 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	2:55:32 PM	Tube furnace set to 0
2/22/2012	2:55:33 PM	Run finished at 2:55 PM
2/22/2012	2:55:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/22/2012	2:59:17 PM	Recipe started at 2:59 PM
2/22/2012	2:59:17 PM	Helium valve closed
2/22/2012	2:59:17 PM	H2 valve closed
2/22/2012	2:59:17 PM	BCl3 valve closed
2/22/2012	2:59:17 PM	PH3 valve closed
2/22/2012	2:59:17 PM	SiCl4 pre valve closed
2/22/2012	2:59:17 PM	SiCl4 post valve closed
2/22/2012	2:59:17 PM	Bypass valve closed
2/22/2012	2:59:17 PM	Bubbler valve closed
2/22/2012	2:59:17 PM	Main Vac valve opened
2/22/2012	2:59:17 PM	Helium MFC set to  0.000000
2/22/2012	2:59:17 PM	H2 MFC set to  0.000000
2/22/2012	2:59:17 PM	BCl3 MFC set to  0.000000
2/22/2012	2:59:17 PM	PH3 MFC set to  0.000000
2/22/2012	2:59:17 PM	SiCl4 MFC set to  0.000000
2/22/2012	2:59:17 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	2:59:17 PM	Tube furnace set to 0
2/22/2012	2:59:47 PM	H2 valve closed
2/22/2012	2:59:47 PM	BCl3 valve closed
2/22/2012	2:59:47 PM	PH3 valve closed
2/22/2012	2:59:47 PM	SiCl4 pre valve closed
2/22/2012	2:59:47 PM	SiCl4 post valve closed
2/22/2012	2:59:47 PM	Bypass valve closed
2/22/2012	2:59:47 PM	Bubbler valve closed
2/22/2012	2:59:47 PM	Helium valve opened
2/22/2012	2:59:47 PM	Main Vac valve opened
2/22/2012	2:59:47 PM	Helium MFC set to  20.000000
2/22/2012	2:59:47 PM	H2 MFC set to  0.000000
2/22/2012	2:59:47 PM	BCl3 MFC set to  0.000000
2/22/2012	2:59:47 PM	PH3 MFC set to  0.000000
2/22/2012	2:59:47 PM	SiCl4 MFC set to  0.000000
2/22/2012	2:59:47 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	2:59:47 PM	Tube furnace set to 0
2/22/2012	3:00:17 PM	Helium valve closed
2/22/2012	3:00:17 PM	H2 valve closed
2/22/2012	3:00:17 PM	BCl3 valve closed
2/22/2012	3:00:17 PM	PH3 valve closed
2/22/2012	3:00:17 PM	SiCl4 pre valve closed
2/22/2012	3:00:17 PM	SiCl4 post valve closed
2/22/2012	3:00:17 PM	Bypass valve closed
2/22/2012	3:00:17 PM	Bubbler valve closed
2/22/2012	3:00:17 PM	Main Vac valve opened
2/22/2012	3:00:17 PM	Helium MFC set to  0.000000
2/22/2012	3:00:17 PM	H2 MFC set to  0.000000
2/22/2012	3:00:17 PM	BCl3 MFC set to  0.000000
2/22/2012	3:00:17 PM	PH3 MFC set to  0.000000
2/22/2012	3:00:17 PM	SiCl4 MFC set to  0.000000
2/22/2012	3:00:17 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	3:00:17 PM	Tube furnace set to 0
2/22/2012	3:00:47 PM	H2 valve closed
2/22/2012	3:00:47 PM	BCl3 valve closed
2/22/2012	3:00:47 PM	PH3 valve closed
2/22/2012	3:00:47 PM	SiCl4 pre valve closed
2/22/2012	3:00:47 PM	SiCl4 post valve closed
2/22/2012	3:00:47 PM	Bypass valve closed
2/22/2012	3:00:47 PM	Bubbler valve closed
2/22/2012	3:00:47 PM	Helium valve opened
2/22/2012	3:00:47 PM	Main Vac valve opened
2/22/2012	3:00:47 PM	Helium MFC set to  20.000000
2/22/2012	3:00:47 PM	H2 MFC set to  0.000000
2/22/2012	3:00:47 PM	BCl3 MFC set to  0.000000
2/22/2012	3:00:47 PM	PH3 MFC set to  0.000000
2/22/2012	3:00:47 PM	SiCl4 MFC set to  0.000000
2/22/2012	3:00:47 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	3:00:48 PM	Tube furnace set to 0
2/22/2012	3:01:18 PM	Helium valve closed
2/22/2012	3:01:18 PM	H2 valve closed
2/22/2012	3:01:18 PM	BCl3 valve closed
2/22/2012	3:01:18 PM	PH3 valve closed
2/22/2012	3:01:18 PM	SiCl4 pre valve closed
2/22/2012	3:01:18 PM	SiCl4 post valve closed
2/22/2012	3:01:18 PM	Bypass valve closed
2/22/2012	3:01:18 PM	Bubbler valve closed
2/22/2012	3:01:18 PM	Main Vac valve opened
2/22/2012	3:01:18 PM	Helium MFC set to  0.000000
2/22/2012	3:01:18 PM	H2 MFC set to  0.000000
2/22/2012	3:01:18 PM	BCl3 MFC set to  0.000000
2/22/2012	3:01:18 PM	PH3 MFC set to  0.000000
2/22/2012	3:01:18 PM	SiCl4 MFC set to  0.000000
2/22/2012	3:01:18 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	3:01:18 PM	Tube furnace set to 0
2/22/2012	3:01:48 PM	H2 valve closed
2/22/2012	3:01:48 PM	BCl3 valve closed
2/22/2012	3:01:48 PM	PH3 valve closed
2/22/2012	3:01:48 PM	SiCl4 pre valve closed
2/22/2012	3:01:48 PM	SiCl4 post valve closed
2/22/2012	3:01:48 PM	Bypass valve closed
2/22/2012	3:01:48 PM	Bubbler valve closed
2/22/2012	3:01:48 PM	Helium valve opened
2/22/2012	3:01:48 PM	Main Vac valve opened
2/22/2012	3:01:48 PM	Helium MFC set to  20.000000
2/22/2012	3:01:48 PM	H2 MFC set to  0.000000
2/22/2012	3:01:48 PM	BCl3 MFC set to  0.000000
2/22/2012	3:01:48 PM	PH3 MFC set to  0.000000
2/22/2012	3:01:48 PM	SiCl4 MFC set to  0.000000
2/22/2012	3:01:48 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	3:01:48 PM	Tube furnace set to 0
2/22/2012	3:02:18 PM	Helium valve closed
2/22/2012	3:02:18 PM	H2 valve closed
2/22/2012	3:02:18 PM	BCl3 valve closed
2/22/2012	3:02:18 PM	PH3 valve closed
2/22/2012	3:02:18 PM	SiCl4 pre valve closed
2/22/2012	3:02:18 PM	SiCl4 post valve closed
2/22/2012	3:02:18 PM	Bypass valve closed
2/22/2012	3:02:18 PM	Bubbler valve closed
2/22/2012	3:02:18 PM	Main Vac valve opened
2/22/2012	3:02:18 PM	Helium MFC set to  0.000000
2/22/2012	3:02:18 PM	H2 MFC set to  0.000000
2/22/2012	3:02:18 PM	BCl3 MFC set to  0.000000
2/22/2012	3:02:18 PM	PH3 MFC set to  0.000000
2/22/2012	3:02:18 PM	SiCl4 MFC set to  0.000000
2/22/2012	3:02:18 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	3:02:18 PM	Tube furnace set to 0
2/22/2012	3:02:48 PM	H2 valve closed
2/22/2012	3:02:48 PM	BCl3 valve closed
2/22/2012	3:02:48 PM	PH3 valve closed
2/22/2012	3:02:48 PM	SiCl4 pre valve closed
2/22/2012	3:02:48 PM	SiCl4 post valve closed
2/22/2012	3:02:48 PM	Bypass valve closed
2/22/2012	3:02:48 PM	Bubbler valve closed
2/22/2012	3:02:48 PM	Helium valve opened
2/22/2012	3:02:48 PM	Main Vac valve opened
2/22/2012	3:02:48 PM	Helium MFC set to  20.000000
2/22/2012	3:02:48 PM	H2 MFC set to  0.000000
2/22/2012	3:02:48 PM	BCl3 MFC set to  0.000000
2/22/2012	3:02:48 PM	PH3 MFC set to  0.000000
2/22/2012	3:02:48 PM	SiCl4 MFC set to  0.000000
2/22/2012	3:02:48 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	3:02:48 PM	Tube furnace set to 0
2/22/2012	3:03:18 PM	Helium valve closed
2/22/2012	3:03:18 PM	H2 valve closed
2/22/2012	3:03:18 PM	BCl3 valve closed
2/22/2012	3:03:18 PM	PH3 valve closed
2/22/2012	3:03:18 PM	SiCl4 pre valve closed
2/22/2012	3:03:18 PM	SiCl4 post valve closed
2/22/2012	3:03:18 PM	Bypass valve closed
2/22/2012	3:03:19 PM	Bubbler valve closed
2/22/2012	3:03:19 PM	Main Vac valve opened
2/22/2012	3:03:19 PM	Helium MFC set to  0.000000
2/22/2012	3:03:19 PM	H2 MFC set to  0.000000
2/22/2012	3:03:19 PM	BCl3 MFC set to  0.000000
2/22/2012	3:03:19 PM	PH3 MFC set to  0.000000
2/22/2012	3:03:19 PM	SiCl4 MFC set to  0.000000
2/22/2012	3:03:19 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	3:03:19 PM	Tube furnace set to 0
2/22/2012	3:03:49 PM	H2 valve closed
2/22/2012	3:03:49 PM	BCl3 valve closed
2/22/2012	3:03:49 PM	PH3 valve closed
2/22/2012	3:03:49 PM	SiCl4 pre valve closed
2/22/2012	3:03:49 PM	SiCl4 post valve closed
2/22/2012	3:03:49 PM	Bypass valve closed
2/22/2012	3:03:49 PM	Bubbler valve closed
2/22/2012	3:03:49 PM	Helium valve opened
2/22/2012	3:03:49 PM	Main Vac valve opened
2/22/2012	3:03:49 PM	Helium MFC set to  20.000000
2/22/2012	3:03:49 PM	H2 MFC set to  0.000000
2/22/2012	3:03:49 PM	BCl3 MFC set to  0.000000
2/22/2012	3:03:49 PM	PH3 MFC set to  0.000000
2/22/2012	3:03:49 PM	SiCl4 MFC set to  0.000000
2/22/2012	3:03:49 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	3:03:49 PM	Tube furnace set to 0
2/22/2012	3:04:19 PM	Helium valve closed
2/22/2012	3:04:19 PM	H2 valve closed
2/22/2012	3:04:19 PM	BCl3 valve closed
2/22/2012	3:04:19 PM	PH3 valve closed
2/22/2012	3:04:19 PM	SiCl4 pre valve closed
2/22/2012	3:04:19 PM	SiCl4 post valve closed
2/22/2012	3:04:19 PM	Bypass valve closed
2/22/2012	3:04:19 PM	Bubbler valve closed
2/22/2012	3:04:19 PM	Main Vac valve opened
2/22/2012	3:04:19 PM	Helium MFC set to  0.000000
2/22/2012	3:04:19 PM	H2 MFC set to  0.000000
2/22/2012	3:04:19 PM	BCl3 MFC set to  0.000000
2/22/2012	3:04:19 PM	PH3 MFC set to  0.000000
2/22/2012	3:04:19 PM	SiCl4 MFC set to  0.000000
2/22/2012	3:04:19 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	3:04:19 PM	Tube furnace set to 0
2/22/2012	3:04:49 PM	H2 valve closed
2/22/2012	3:04:49 PM	BCl3 valve closed
2/22/2012	3:04:49 PM	PH3 valve closed
2/22/2012	3:04:49 PM	SiCl4 pre valve closed
2/22/2012	3:04:49 PM	SiCl4 post valve closed
2/22/2012	3:04:49 PM	Bypass valve closed
2/22/2012	3:04:49 PM	Bubbler valve closed
2/22/2012	3:04:49 PM	Helium valve opened
2/22/2012	3:04:49 PM	Main Vac valve opened
2/22/2012	3:04:49 PM	Helium MFC set to  20.000000
2/22/2012	3:04:49 PM	H2 MFC set to  0.000000
2/22/2012	3:04:49 PM	BCl3 MFC set to  0.000000
2/22/2012	3:04:49 PM	PH3 MFC set to  0.000000
2/22/2012	3:04:49 PM	SiCl4 MFC set to  0.000000
2/22/2012	3:04:49 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	3:04:49 PM	Tube furnace set to 0
2/22/2012	3:05:19 PM	Helium valve closed
2/22/2012	3:05:19 PM	H2 valve closed
2/22/2012	3:05:19 PM	BCl3 valve closed
2/22/2012	3:05:19 PM	PH3 valve closed
2/22/2012	3:05:19 PM	SiCl4 pre valve closed
2/22/2012	3:05:19 PM	SiCl4 post valve closed
2/22/2012	3:05:19 PM	Bypass valve closed
2/22/2012	3:05:19 PM	Bubbler valve closed
2/22/2012	3:05:19 PM	Main Vac valve opened
2/22/2012	3:05:19 PM	Helium MFC set to  0.000000
2/22/2012	3:05:19 PM	H2 MFC set to  0.000000
2/22/2012	3:05:19 PM	BCl3 MFC set to  0.000000
2/22/2012	3:05:19 PM	PH3 MFC set to  0.000000
2/22/2012	3:05:19 PM	SiCl4 MFC set to  0.000000
2/22/2012	3:05:19 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	3:05:19 PM	Tube furnace set to 0
2/22/2012	3:05:49 PM	H2 valve closed
2/22/2012	3:05:50 PM	BCl3 valve closed
2/22/2012	3:05:50 PM	PH3 valve closed
2/22/2012	3:05:50 PM	SiCl4 pre valve closed
2/22/2012	3:05:50 PM	SiCl4 post valve closed
2/22/2012	3:05:50 PM	Bypass valve closed
2/22/2012	3:05:50 PM	Bubbler valve closed
2/22/2012	3:05:50 PM	Helium valve opened
2/22/2012	3:05:50 PM	Main Vac valve opened
2/22/2012	3:05:50 PM	Helium MFC set to  20.000000
2/22/2012	3:05:50 PM	H2 MFC set to  0.000000
2/22/2012	3:05:50 PM	BCl3 MFC set to  0.000000
2/22/2012	3:05:50 PM	PH3 MFC set to  0.000000
2/22/2012	3:05:50 PM	SiCl4 MFC set to  0.000000
2/22/2012	3:05:50 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	3:05:50 PM	Tube furnace set to 0
2/22/2012	3:06:20 PM	Helium valve closed
2/22/2012	3:06:20 PM	H2 valve closed
2/22/2012	3:06:20 PM	BCl3 valve closed
2/22/2012	3:06:20 PM	PH3 valve closed
2/22/2012	3:06:20 PM	SiCl4 pre valve closed
2/22/2012	3:06:20 PM	SiCl4 post valve closed
2/22/2012	3:06:20 PM	Bypass valve closed
2/22/2012	3:06:20 PM	Bubbler valve closed
2/22/2012	3:06:20 PM	Main Vac valve opened
2/22/2012	3:06:20 PM	Helium MFC set to  0.000000
2/22/2012	3:06:20 PM	H2 MFC set to  0.000000
2/22/2012	3:06:20 PM	BCl3 MFC set to  0.000000
2/22/2012	3:06:20 PM	PH3 MFC set to  0.000000
2/22/2012	3:06:20 PM	SiCl4 MFC set to  0.000000
2/22/2012	3:06:20 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	3:06:20 PM	Tube furnace set to 0
2/22/2012	3:06:50 PM	H2 valve closed
2/22/2012	3:06:50 PM	BCl3 valve closed
2/22/2012	3:06:50 PM	PH3 valve closed
2/22/2012	3:06:50 PM	SiCl4 pre valve closed
2/22/2012	3:06:50 PM	SiCl4 post valve closed
2/22/2012	3:06:50 PM	Bypass valve closed
2/22/2012	3:06:50 PM	Bubbler valve closed
2/22/2012	3:06:50 PM	Helium valve opened
2/22/2012	3:06:50 PM	Main Vac valve opened
2/22/2012	3:06:50 PM	Helium MFC set to  20.000000
2/22/2012	3:06:50 PM	H2 MFC set to  0.000000
2/22/2012	3:06:50 PM	BCl3 MFC set to  0.000000
2/22/2012	3:06:50 PM	PH3 MFC set to  0.000000
2/22/2012	3:06:50 PM	SiCl4 MFC set to  0.000000
2/22/2012	3:06:50 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	3:06:50 PM	Tube furnace set to 0
2/22/2012	3:07:20 PM	Helium valve closed
2/22/2012	3:07:20 PM	H2 valve closed
2/22/2012	3:07:20 PM	BCl3 valve closed
2/22/2012	3:07:20 PM	PH3 valve closed
2/22/2012	3:07:20 PM	SiCl4 pre valve closed
2/22/2012	3:07:20 PM	SiCl4 post valve closed
2/22/2012	3:07:20 PM	Bypass valve closed
2/22/2012	3:07:20 PM	Bubbler valve closed
2/22/2012	3:07:20 PM	Main Vac valve opened
2/22/2012	3:07:20 PM	Helium MFC set to  0.000000
2/22/2012	3:07:20 PM	H2 MFC set to  0.000000
2/22/2012	3:07:20 PM	BCl3 MFC set to  0.000000
2/22/2012	3:07:20 PM	PH3 MFC set to  0.000000
2/22/2012	3:07:20 PM	SiCl4 MFC set to  0.000000
2/22/2012	3:07:20 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	3:07:20 PM	Tube furnace set to 0
2/22/2012	3:07:50 PM	H2 valve closed
2/22/2012	3:07:50 PM	BCl3 valve closed
2/22/2012	3:07:50 PM	PH3 valve closed
2/22/2012	3:07:50 PM	SiCl4 pre valve closed
2/22/2012	3:07:50 PM	SiCl4 post valve closed
2/22/2012	3:07:50 PM	Bypass valve closed
2/22/2012	3:07:50 PM	Bubbler valve closed
2/22/2012	3:07:50 PM	Helium valve opened
2/22/2012	3:07:50 PM	Main Vac valve opened
2/22/2012	3:07:50 PM	Helium MFC set to  20.000000
2/22/2012	3:07:50 PM	H2 MFC set to  0.000000
2/22/2012	3:07:50 PM	BCl3 MFC set to  0.000000
2/22/2012	3:07:50 PM	PH3 MFC set to  0.000000
2/22/2012	3:07:50 PM	SiCl4 MFC set to  0.000000
2/22/2012	3:07:50 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	3:07:51 PM	Tube furnace set to 0
2/22/2012	3:08:21 PM	Helium valve closed
2/22/2012	3:08:21 PM	H2 valve closed
2/22/2012	3:08:21 PM	BCl3 valve closed
2/22/2012	3:08:21 PM	PH3 valve closed
2/22/2012	3:08:21 PM	SiCl4 pre valve closed
2/22/2012	3:08:21 PM	SiCl4 post valve closed
2/22/2012	3:08:21 PM	Bypass valve closed
2/22/2012	3:08:21 PM	Bubbler valve closed
2/22/2012	3:08:21 PM	Main Vac valve opened
2/22/2012	3:08:21 PM	Helium MFC set to  0.000000
2/22/2012	3:08:21 PM	H2 MFC set to  0.000000
2/22/2012	3:08:21 PM	BCl3 MFC set to  0.000000
2/22/2012	3:08:21 PM	PH3 MFC set to  0.000000
2/22/2012	3:08:21 PM	SiCl4 MFC set to  0.000000
2/22/2012	3:08:21 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	3:08:21 PM	Tube furnace set to 200
2/22/2012	3:08:51 PM	H2 valve closed
2/22/2012	3:08:51 PM	BCl3 valve closed
2/22/2012	3:08:51 PM	PH3 valve closed
2/22/2012	3:08:51 PM	SiCl4 pre valve closed
2/22/2012	3:08:51 PM	SiCl4 post valve closed
2/22/2012	3:08:51 PM	Bypass valve closed
2/22/2012	3:08:51 PM	Bubbler valve closed
2/22/2012	3:08:51 PM	Helium valve opened
2/22/2012	3:08:51 PM	Main Vac valve opened
2/22/2012	3:08:51 PM	Helium MFC set to  20.000000
2/22/2012	3:08:51 PM	H2 MFC set to  0.000000
2/22/2012	3:08:51 PM	BCl3 MFC set to  0.000000
2/22/2012	3:08:51 PM	PH3 MFC set to  0.000000
2/22/2012	3:08:51 PM	SiCl4 MFC set to  0.000000
2/22/2012	3:08:51 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	3:08:51 PM	Tube furnace set to 200
2/22/2012	3:09:21 PM	Helium valve closed
2/22/2012	3:09:21 PM	H2 valve closed
2/22/2012	3:09:21 PM	BCl3 valve closed
2/22/2012	3:09:21 PM	PH3 valve closed
2/22/2012	3:09:21 PM	SiCl4 pre valve closed
2/22/2012	3:09:21 PM	SiCl4 post valve closed
2/22/2012	3:09:21 PM	Bypass valve closed
2/22/2012	3:09:21 PM	Bubbler valve closed
2/22/2012	3:09:21 PM	Main Vac valve opened
2/22/2012	3:09:21 PM	Helium MFC set to  0.000000
2/22/2012	3:09:21 PM	H2 MFC set to  0.000000
2/22/2012	3:09:21 PM	BCl3 MFC set to  0.000000
2/22/2012	3:09:21 PM	PH3 MFC set to  0.000000
2/22/2012	3:09:21 PM	SiCl4 MFC set to  0.000000
2/22/2012	3:09:21 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	3:09:21 PM	Tube furnace set to 200
2/22/2012	3:09:51 PM	H2 valve closed
2/22/2012	3:09:51 PM	BCl3 valve closed
2/22/2012	3:09:51 PM	PH3 valve closed
2/22/2012	3:09:51 PM	SiCl4 pre valve closed
2/22/2012	3:09:51 PM	SiCl4 post valve closed
2/22/2012	3:09:51 PM	Bypass valve closed
2/22/2012	3:09:51 PM	Bubbler valve closed
2/22/2012	3:09:51 PM	Helium valve opened
2/22/2012	3:09:51 PM	Main Vac valve opened
2/22/2012	3:09:51 PM	Helium MFC set to  20.000000
2/22/2012	3:09:51 PM	H2 MFC set to  0.000000
2/22/2012	3:09:51 PM	BCl3 MFC set to  0.000000
2/22/2012	3:09:51 PM	PH3 MFC set to  0.000000
2/22/2012	3:09:51 PM	SiCl4 MFC set to  0.000000
2/22/2012	3:09:51 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	3:09:51 PM	Tube furnace set to 200
2/22/2012	3:10:21 PM	Helium valve closed
2/22/2012	3:10:21 PM	H2 valve closed
2/22/2012	3:10:21 PM	BCl3 valve closed
2/22/2012	3:10:21 PM	PH3 valve closed
2/22/2012	3:10:21 PM	SiCl4 pre valve closed
2/22/2012	3:10:21 PM	SiCl4 post valve closed
2/22/2012	3:10:21 PM	Bypass valve closed
2/22/2012	3:10:21 PM	Bubbler valve closed
2/22/2012	3:10:21 PM	Main Vac valve opened
2/22/2012	3:10:21 PM	Helium MFC set to  0.000000
2/22/2012	3:10:21 PM	H2 MFC set to  0.000000
2/22/2012	3:10:21 PM	BCl3 MFC set to  0.000000
2/22/2012	3:10:21 PM	PH3 MFC set to  0.000000
2/22/2012	3:10:21 PM	SiCl4 MFC set to  0.000000
2/22/2012	3:10:21 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	3:10:22 PM	Tube furnace set to 200
2/22/2012	3:10:52 PM	H2 valve closed
2/22/2012	3:10:52 PM	BCl3 valve closed
2/22/2012	3:10:52 PM	PH3 valve closed
2/22/2012	3:10:52 PM	SiCl4 pre valve closed
2/22/2012	3:10:52 PM	SiCl4 post valve closed
2/22/2012	3:10:52 PM	Bypass valve closed
2/22/2012	3:10:52 PM	Bubbler valve closed
2/22/2012	3:10:52 PM	Helium valve opened
2/22/2012	3:10:52 PM	Main Vac valve opened
2/22/2012	3:10:52 PM	Helium MFC set to  20.000000
2/22/2012	3:10:52 PM	H2 MFC set to  0.000000
2/22/2012	3:10:52 PM	BCl3 MFC set to  0.000000
2/22/2012	3:10:52 PM	PH3 MFC set to  0.000000
2/22/2012	3:10:52 PM	SiCl4 MFC set to  0.000000
2/22/2012	3:10:52 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	3:10:52 PM	Tube furnace set to 200
2/22/2012	3:11:22 PM	Helium valve closed
2/22/2012	3:11:22 PM	H2 valve closed
2/22/2012	3:11:22 PM	BCl3 valve closed
2/22/2012	3:11:22 PM	PH3 valve closed
2/22/2012	3:11:22 PM	SiCl4 pre valve closed
2/22/2012	3:11:22 PM	SiCl4 post valve closed
2/22/2012	3:11:22 PM	Bypass valve closed
2/22/2012	3:11:22 PM	Bubbler valve closed
2/22/2012	3:11:22 PM	Main Vac valve opened
2/22/2012	3:11:22 PM	Helium MFC set to  0.000000
2/22/2012	3:11:22 PM	H2 MFC set to  0.000000
2/22/2012	3:11:22 PM	BCl3 MFC set to  0.000000
2/22/2012	3:11:22 PM	PH3 MFC set to  0.000000
2/22/2012	3:11:22 PM	SiCl4 MFC set to  0.000000
2/22/2012	3:11:22 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	3:11:22 PM	Tube furnace set to 200
2/22/2012	3:11:52 PM	H2 valve closed
2/22/2012	3:11:52 PM	BCl3 valve closed
2/22/2012	3:11:52 PM	PH3 valve closed
2/22/2012	3:11:52 PM	SiCl4 pre valve closed
2/22/2012	3:11:52 PM	SiCl4 post valve closed
2/22/2012	3:11:52 PM	Bypass valve closed
2/22/2012	3:11:52 PM	Bubbler valve closed
2/22/2012	3:11:52 PM	Helium valve opened
2/22/2012	3:11:52 PM	Main Vac valve opened
2/22/2012	3:11:52 PM	Helium MFC set to  20.000000
2/22/2012	3:11:52 PM	H2 MFC set to  0.000000
2/22/2012	3:11:52 PM	BCl3 MFC set to  0.000000
2/22/2012	3:11:52 PM	PH3 MFC set to  0.000000
2/22/2012	3:11:52 PM	SiCl4 MFC set to  0.000000
2/22/2012	3:11:52 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	3:11:52 PM	Tube furnace set to 200
2/22/2012	3:12:22 PM	Helium valve closed
2/22/2012	3:12:22 PM	H2 valve closed
2/22/2012	3:12:22 PM	BCl3 valve closed
2/22/2012	3:12:22 PM	PH3 valve closed
2/22/2012	3:12:22 PM	SiCl4 pre valve closed
2/22/2012	3:12:22 PM	SiCl4 post valve closed
2/22/2012	3:12:22 PM	Bypass valve closed
2/22/2012	3:12:22 PM	Bubbler valve closed
2/22/2012	3:12:22 PM	Main Vac valve opened
2/22/2012	3:12:22 PM	Helium MFC set to  0.000000
2/22/2012	3:12:22 PM	H2 MFC set to  0.000000
2/22/2012	3:12:22 PM	BCl3 MFC set to  0.000000
2/22/2012	3:12:22 PM	PH3 MFC set to  0.000000
2/22/2012	3:12:22 PM	SiCl4 MFC set to  0.000000
2/22/2012	3:12:22 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	3:12:22 PM	Tube furnace set to 200
2/22/2012	3:12:52 PM	H2 valve closed
2/22/2012	3:12:52 PM	BCl3 valve closed
2/22/2012	3:12:52 PM	PH3 valve closed
2/22/2012	3:12:52 PM	SiCl4 pre valve closed
2/22/2012	3:12:52 PM	SiCl4 post valve closed
2/22/2012	3:12:52 PM	Bypass valve closed
2/22/2012	3:12:52 PM	Bubbler valve closed
2/22/2012	3:12:52 PM	Helium valve opened
2/22/2012	3:12:52 PM	Main Vac valve opened
2/22/2012	3:12:52 PM	Helium MFC set to  20.000000
2/22/2012	3:12:52 PM	H2 MFC set to  0.000000
2/22/2012	3:12:52 PM	BCl3 MFC set to  0.000000
2/22/2012	3:12:52 PM	PH3 MFC set to  0.000000
2/22/2012	3:12:52 PM	SiCl4 MFC set to  0.000000
2/22/2012	3:12:52 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	3:12:53 PM	Tube furnace set to 200
2/22/2012	3:13:23 PM	Helium valve closed
2/22/2012	3:13:23 PM	H2 valve closed
2/22/2012	3:13:23 PM	BCl3 valve closed
2/22/2012	3:13:23 PM	PH3 valve closed
2/22/2012	3:13:23 PM	SiCl4 pre valve closed
2/22/2012	3:13:23 PM	SiCl4 post valve closed
2/22/2012	3:13:23 PM	Bypass valve closed
2/22/2012	3:13:23 PM	Bubbler valve closed
2/22/2012	3:13:23 PM	Main Vac valve opened
2/22/2012	3:13:23 PM	Helium MFC set to  0.000000
2/22/2012	3:13:23 PM	H2 MFC set to  0.000000
2/22/2012	3:13:23 PM	BCl3 MFC set to  0.000000
2/22/2012	3:13:23 PM	PH3 MFC set to  0.000000
2/22/2012	3:13:23 PM	SiCl4 MFC set to  0.000000
2/22/2012	3:13:23 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	3:13:23 PM	Tube furnace set to 200
2/22/2012	3:13:53 PM	H2 valve closed
2/22/2012	3:13:53 PM	BCl3 valve closed
2/22/2012	3:13:53 PM	PH3 valve closed
2/22/2012	3:13:53 PM	SiCl4 pre valve closed
2/22/2012	3:13:53 PM	SiCl4 post valve closed
2/22/2012	3:13:53 PM	Bypass valve closed
2/22/2012	3:13:53 PM	Bubbler valve closed
2/22/2012	3:13:53 PM	Helium valve opened
2/22/2012	3:13:53 PM	Main Vac valve opened
2/22/2012	3:13:53 PM	Helium MFC set to  20.000000
2/22/2012	3:13:53 PM	H2 MFC set to  0.000000
2/22/2012	3:13:53 PM	BCl3 MFC set to  0.000000
2/22/2012	3:13:53 PM	PH3 MFC set to  0.000000
2/22/2012	3:13:53 PM	SiCl4 MFC set to  0.000000
2/22/2012	3:13:53 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	3:13:53 PM	Tube furnace set to 200
2/22/2012	3:14:23 PM	Helium valve closed
2/22/2012	3:14:23 PM	H2 valve closed
2/22/2012	3:14:23 PM	BCl3 valve closed
2/22/2012	3:14:23 PM	PH3 valve closed
2/22/2012	3:14:23 PM	SiCl4 pre valve closed
2/22/2012	3:14:23 PM	SiCl4 post valve closed
2/22/2012	3:14:23 PM	Bypass valve closed
2/22/2012	3:14:23 PM	Bubbler valve closed
2/22/2012	3:14:23 PM	Main Vac valve opened
2/22/2012	3:14:23 PM	Helium MFC set to  0.000000
2/22/2012	3:14:23 PM	H2 MFC set to  0.000000
2/22/2012	3:14:23 PM	BCl3 MFC set to  0.000000
2/22/2012	3:14:23 PM	PH3 MFC set to  0.000000
2/22/2012	3:14:23 PM	SiCl4 MFC set to  0.000000
2/22/2012	3:14:23 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	3:14:23 PM	Tube furnace set to 0
2/22/2012	3:14:24 PM	Run finished at 3:14 PM
2/22/2012	3:29:26 PM	Main Vac valve closed
2/22/2012	3:29:31 PM	Main Vac valve opened
2/22/2012	3:30:40 PM	Recipe started at 3:30 PM
2/22/2012	3:30:40 PM	Helium valve closed
2/22/2012	3:30:40 PM	H2 valve closed
2/22/2012	3:30:40 PM	BCl3 valve closed
2/22/2012	3:30:40 PM	PH3 valve closed
2/22/2012	3:30:40 PM	SiCl4 pre valve closed
2/22/2012	3:30:40 PM	SiCl4 post valve closed
2/22/2012	3:30:40 PM	Main Vac valve closed
2/22/2012	3:30:40 PM	Bypass valve closed
2/22/2012	3:30:40 PM	Bubbler valve closed
2/22/2012	3:30:40 PM	Helium MFC set to  0.000000
2/22/2012	3:30:40 PM	H2 MFC set to  0.000000
2/22/2012	3:30:40 PM	BCl3 MFC set to  0.000000
2/22/2012	3:30:40 PM	PH3 MFC set to  0.000000
2/22/2012	3:30:40 PM	SiCl4 MFC set to  0.000000
2/22/2012	3:30:40 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	3:30:40 PM	Tube furnace set to 0
2/22/2012	3:30:43 PM	Helium valve closed
2/22/2012	3:30:43 PM	BCl3 valve closed
2/22/2012	3:30:43 PM	PH3 valve closed
2/22/2012	3:30:43 PM	SiCl4 pre valve closed
2/22/2012	3:30:43 PM	SiCl4 post valve closed
2/22/2012	3:30:43 PM	Main Vac valve closed
2/22/2012	3:30:43 PM	Bypass valve closed
2/22/2012	3:30:43 PM	Bubbler valve closed
2/22/2012	3:30:43 PM	H2 valve opened
2/22/2012	3:30:43 PM	Helium MFC set to  0.000000
2/22/2012	3:30:43 PM	H2 MFC set to  500.000000
2/22/2012	3:30:43 PM	BCl3 MFC set to  0.000000
2/22/2012	3:30:43 PM	PH3 MFC set to  0.000000
2/22/2012	3:30:43 PM	SiCl4 MFC set to  0.000000
2/22/2012	3:30:43 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	3:30:43 PM	Tube furnace set to 0
2/22/2012	3:31:47 PM	Helium valve closed
2/22/2012	3:31:47 PM	BCl3 valve closed
2/22/2012	3:31:47 PM	PH3 valve closed
2/22/2012	3:31:47 PM	SiCl4 pre valve closed
2/22/2012	3:31:47 PM	SiCl4 post valve closed
2/22/2012	3:31:47 PM	Main Vac valve closed
2/22/2012	3:31:47 PM	Bypass valve closed
2/22/2012	3:31:47 PM	H2 valve opened
2/22/2012	3:31:47 PM	Bubbler valve opened
2/22/2012	3:31:47 PM	Helium MFC set to  0.000000
2/22/2012	3:31:47 PM	H2 MFC set to  500.000000
2/22/2012	3:31:47 PM	BCl3 MFC set to  0.000000
2/22/2012	3:31:47 PM	PH3 MFC set to  0.000000
2/22/2012	3:31:47 PM	SiCl4 MFC set to  0.000000
2/22/2012	3:31:47 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	3:31:47 PM	Tube furnace set to 0
2/22/2012	3:31:48 PM	Helium valve closed
2/22/2012	3:31:48 PM	BCl3 valve closed
2/22/2012	3:31:48 PM	PH3 valve closed
2/22/2012	3:31:48 PM	SiCl4 pre valve closed
2/22/2012	3:31:48 PM	SiCl4 post valve closed
2/22/2012	3:31:48 PM	Main Vac valve closed
2/22/2012	3:31:48 PM	Bypass valve closed
2/22/2012	3:31:48 PM	H2 valve opened
2/22/2012	3:31:48 PM	Bubbler valve opened
2/22/2012	3:31:48 PM	Helium MFC set to  0.000000
2/22/2012	3:31:48 PM	H2 MFC set to  500.000000
2/22/2012	3:31:48 PM	BCl3 MFC set to  0.000000
2/22/2012	3:31:48 PM	PH3 MFC set to  0.000000
2/22/2012	3:31:48 PM	SiCl4 MFC set to  0.000000
2/22/2012	3:31:48 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	3:31:49 PM	Tube furnace set to 1000
2/22/2012	3:51:49 PM	Helium valve closed
2/22/2012	3:51:49 PM	PH3 valve closed
2/22/2012	3:51:49 PM	Main Vac valve closed
2/22/2012	3:51:49 PM	Bypass valve closed
2/22/2012	3:51:49 PM	H2 valve opened
2/22/2012	3:51:49 PM	BCl3 valve opened
2/22/2012	3:51:49 PM	SiCl4 pre valve opened
2/22/2012	3:51:49 PM	SiCl4 post valve opened
2/22/2012	3:51:49 PM	Bubbler valve opened
2/22/2012	3:51:49 PM	Helium MFC set to  0.000000
2/22/2012	3:51:49 PM	H2 MFC set to  450.000000
2/22/2012	3:51:49 PM	BCl3 MFC set to  1.500000
2/22/2012	3:51:49 PM	PH3 MFC set to  0.000000
2/22/2012	3:51:49 PM	SiCl4 MFC set to  50.000000
2/22/2012	3:51:49 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	3:51:49 PM	Tube furnace set to 1000
2/22/2012	4:03:49 PM	Helium valve closed
2/22/2012	4:03:49 PM	BCl3 valve closed
2/22/2012	4:03:49 PM	PH3 valve closed
2/22/2012	4:03:49 PM	SiCl4 pre valve closed
2/22/2012	4:03:49 PM	SiCl4 post valve closed
2/22/2012	4:03:49 PM	Main Vac valve closed
2/22/2012	4:03:49 PM	Bypass valve closed
2/22/2012	4:03:49 PM	H2 valve opened
2/22/2012	4:03:49 PM	Bubbler valve opened
2/22/2012	4:03:49 PM	Helium MFC set to  0.000000
2/22/2012	4:03:49 PM	H2 MFC set to  500.000000
2/22/2012	4:03:49 PM	BCl3 MFC set to  0.000000
2/22/2012	4:03:49 PM	PH3 MFC set to  0.000000
2/22/2012	4:03:49 PM	SiCl4 MFC set to  0.000000
2/22/2012	4:03:49 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	4:03:49 PM	Tube furnace set to 950
2/22/2012	4:05:49 PM	Helium valve closed
2/22/2012	4:05:49 PM	BCl3 valve closed
2/22/2012	4:05:49 PM	PH3 valve closed
2/22/2012	4:05:49 PM	SiCl4 pre valve closed
2/22/2012	4:05:49 PM	SiCl4 post valve closed
2/22/2012	4:05:49 PM	Main Vac valve closed
2/22/2012	4:05:49 PM	Bypass valve closed
2/22/2012	4:05:49 PM	H2 valve opened
2/22/2012	4:05:49 PM	Bubbler valve opened
2/22/2012	4:05:49 PM	Helium MFC set to  0.000000
2/22/2012	4:05:49 PM	H2 MFC set to  500.000000
2/22/2012	4:05:49 PM	BCl3 MFC set to  0.000000
2/22/2012	4:05:49 PM	PH3 MFC set to  0.000000
2/22/2012	4:05:49 PM	SiCl4 MFC set to  0.000000
2/22/2012	4:05:49 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	4:05:49 PM	Tube furnace set to 900
2/22/2012	4:07:49 PM	Helium valve closed
2/22/2012	4:07:49 PM	BCl3 valve closed
2/22/2012	4:07:49 PM	PH3 valve closed
2/22/2012	4:07:49 PM	SiCl4 pre valve closed
2/22/2012	4:07:49 PM	SiCl4 post valve closed
2/22/2012	4:07:49 PM	Main Vac valve closed
2/22/2012	4:07:49 PM	Bypass valve closed
2/22/2012	4:07:49 PM	H2 valve opened
2/22/2012	4:07:49 PM	Bubbler valve opened
2/22/2012	4:07:49 PM	Helium MFC set to  0.000000
2/22/2012	4:07:49 PM	H2 MFC set to  500.000000
2/22/2012	4:07:49 PM	BCl3 MFC set to  0.000000
2/22/2012	4:07:49 PM	PH3 MFC set to  0.000000
2/22/2012	4:07:49 PM	SiCl4 MFC set to  0.000000
2/22/2012	4:07:49 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	4:07:49 PM	Tube furnace set to 850
2/22/2012	4:09:49 PM	H2 valve closed
2/22/2012	4:09:49 PM	BCl3 valve closed
2/22/2012	4:09:49 PM	PH3 valve closed
2/22/2012	4:09:49 PM	SiCl4 pre valve closed
2/22/2012	4:09:49 PM	SiCl4 post valve closed
2/22/2012	4:09:49 PM	Main Vac valve closed
2/22/2012	4:09:49 PM	Bypass valve closed
2/22/2012	4:09:49 PM	Helium valve opened
2/22/2012	4:09:49 PM	Bubbler valve opened
2/22/2012	4:09:49 PM	Helium MFC set to  500.000000
2/22/2012	4:09:49 PM	H2 MFC set to  0.000000
2/22/2012	4:09:49 PM	BCl3 MFC set to  0.000000
2/22/2012	4:09:49 PM	PH3 MFC set to  0.000000
2/22/2012	4:09:49 PM	SiCl4 MFC set to  0.000000
2/22/2012	4:09:49 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	4:09:50 PM	Tube furnace set to 800
2/22/2012	4:11:50 PM	H2 valve closed
2/22/2012	4:11:50 PM	BCl3 valve closed
2/22/2012	4:11:50 PM	PH3 valve closed
2/22/2012	4:11:50 PM	SiCl4 pre valve closed
2/22/2012	4:11:50 PM	SiCl4 post valve closed
2/22/2012	4:11:50 PM	Main Vac valve closed
2/22/2012	4:11:50 PM	Bypass valve closed
2/22/2012	4:11:50 PM	Helium valve opened
2/22/2012	4:11:50 PM	Bubbler valve opened
2/22/2012	4:11:50 PM	Helium MFC set to  500.000000
2/22/2012	4:11:50 PM	H2 MFC set to  0.000000
2/22/2012	4:11:50 PM	BCl3 MFC set to  0.000000
2/22/2012	4:11:50 PM	PH3 MFC set to  0.000000
2/22/2012	4:11:50 PM	SiCl4 MFC set to  0.000000
2/22/2012	4:11:50 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	4:11:50 PM	Tube furnace set to 750
2/22/2012	4:13:50 PM	H2 valve closed
2/22/2012	4:13:50 PM	BCl3 valve closed
2/22/2012	4:13:50 PM	PH3 valve closed
2/22/2012	4:13:50 PM	SiCl4 pre valve closed
2/22/2012	4:13:50 PM	SiCl4 post valve closed
2/22/2012	4:13:50 PM	Main Vac valve closed
2/22/2012	4:13:50 PM	Bypass valve closed
2/22/2012	4:13:50 PM	Helium valve opened
2/22/2012	4:13:50 PM	Bubbler valve opened
2/22/2012	4:13:50 PM	Helium MFC set to  500.000000
2/22/2012	4:13:50 PM	H2 MFC set to  0.000000
2/22/2012	4:13:50 PM	BCl3 MFC set to  0.000000
2/22/2012	4:13:50 PM	PH3 MFC set to  0.000000
2/22/2012	4:13:50 PM	SiCl4 MFC set to  0.000000
2/22/2012	4:13:50 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	4:13:50 PM	Tube furnace set to 0
2/22/2012	4:33:50 PM	Helium valve closed
2/22/2012	4:33:50 PM	H2 valve closed
2/22/2012	4:33:50 PM	BCl3 valve closed
2/22/2012	4:33:50 PM	PH3 valve closed
2/22/2012	4:33:50 PM	SiCl4 pre valve closed
2/22/2012	4:33:50 PM	SiCl4 post valve closed
2/22/2012	4:33:50 PM	Main Vac valve closed
2/22/2012	4:33:50 PM	Bypass valve closed
2/22/2012	4:33:50 PM	Bubbler valve closed
2/22/2012	4:33:50 PM	Helium MFC set to  0.000000
2/22/2012	4:33:50 PM	H2 MFC set to  0.000000
2/22/2012	4:33:50 PM	BCl3 MFC set to  0.000000
2/22/2012	4:33:50 PM	PH3 MFC set to  0.000000
2/22/2012	4:33:50 PM	SiCl4 MFC set to  0.000000
2/22/2012	4:33:50 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	4:33:50 PM	Tube furnace set to 0
2/22/2012	4:33:51 PM	Helium valve closed
2/22/2012	4:33:51 PM	H2 valve closed
2/22/2012	4:33:51 PM	BCl3 valve closed
2/22/2012	4:33:51 PM	PH3 valve closed
2/22/2012	4:33:51 PM	SiCl4 pre valve closed
2/22/2012	4:33:51 PM	SiCl4 post valve closed
2/22/2012	4:33:51 PM	Main Vac valve closed
2/22/2012	4:33:51 PM	Bubbler valve closed
2/22/2012	4:33:51 PM	Bypass valve opened
2/22/2012	4:33:51 PM	Helium MFC set to  0.000000
2/22/2012	4:33:51 PM	H2 MFC set to  0.000000
2/22/2012	4:33:51 PM	BCl3 MFC set to  0.000000
2/22/2012	4:33:51 PM	PH3 MFC set to  0.000000
2/22/2012	4:33:51 PM	SiCl4 MFC set to  0.000000
2/22/2012	4:33:51 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	4:33:51 PM	Tube furnace set to 0
2/22/2012	4:34:38 PM	Helium valve closed
2/22/2012	4:34:38 PM	H2 valve closed
2/22/2012	4:34:38 PM	BCl3 valve closed
2/22/2012	4:34:38 PM	PH3 valve closed
2/22/2012	4:34:38 PM	SiCl4 pre valve closed
2/22/2012	4:34:38 PM	SiCl4 post valve closed
2/22/2012	4:34:38 PM	Main Vac valve closed
2/22/2012	4:34:38 PM	Bubbler valve closed
2/22/2012	4:34:38 PM	Bypass valve opened
2/22/2012	4:34:38 PM	Helium MFC set to  0.000000
2/22/2012	4:34:38 PM	H2 MFC set to  0.000000
2/22/2012	4:34:38 PM	BCl3 MFC set to  0.000000
2/22/2012	4:34:38 PM	PH3 MFC set to  0.000000
2/22/2012	4:34:38 PM	SiCl4 MFC set to  0.000000
2/22/2012	4:34:38 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	4:34:38 PM	Tube furnace set to 0
2/22/2012	4:35:38 PM	Helium valve closed
2/22/2012	4:35:38 PM	H2 valve closed
2/22/2012	4:35:38 PM	BCl3 valve closed
2/22/2012	4:35:38 PM	PH3 valve closed
2/22/2012	4:35:38 PM	SiCl4 pre valve closed
2/22/2012	4:35:38 PM	SiCl4 post valve closed
2/22/2012	4:35:38 PM	Bypass valve closed
2/22/2012	4:35:38 PM	Bubbler valve closed
2/22/2012	4:35:38 PM	Main Vac valve opened
2/22/2012	4:35:38 PM	Helium MFC set to  0.000000
2/22/2012	4:35:38 PM	H2 MFC set to  0.000000
2/22/2012	4:35:38 PM	BCl3 MFC set to  0.000000
2/22/2012	4:35:38 PM	PH3 MFC set to  0.000000
2/22/2012	4:35:38 PM	SiCl4 MFC set to  0.000000
2/22/2012	4:35:38 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	4:35:38 PM	Tube furnace set to 0
2/22/2012	4:35:39 PM	Run finished at 4:35 PM
2/22/2012	5:19:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/22/2012	5:19:10 PM	Recipe started at 5:19 PM
2/22/2012	5:19:10 PM	Helium valve closed
2/22/2012	5:19:10 PM	H2 valve closed
2/22/2012	5:19:10 PM	BCl3 valve closed
2/22/2012	5:19:10 PM	PH3 valve closed
2/22/2012	5:19:10 PM	SiCl4 pre valve closed
2/22/2012	5:19:10 PM	SiCl4 post valve closed
2/22/2012	5:19:10 PM	Main Vac valve closed
2/22/2012	5:19:10 PM	Bypass valve closed
2/22/2012	5:19:10 PM	Bubbler valve closed
2/22/2012	5:19:10 PM	Helium MFC set to  0.000000
2/22/2012	5:19:10 PM	H2 MFC set to  0.000000
2/22/2012	5:19:10 PM	BCl3 MFC set to  0.000000
2/22/2012	5:19:10 PM	PH3 MFC set to  0.000000
2/22/2012	5:19:10 PM	SiCl4 MFC set to  0.000000
2/22/2012	5:19:10 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	5:19:10 PM	Tube furnace set to 0
2/22/2012	5:19:13 PM	H2 valve closed
2/22/2012	5:19:13 PM	BCl3 valve closed
2/22/2012	5:19:13 PM	PH3 valve closed
2/22/2012	5:19:13 PM	SiCl4 pre valve closed
2/22/2012	5:19:13 PM	SiCl4 post valve closed
2/22/2012	5:19:13 PM	Main Vac valve closed
2/22/2012	5:19:13 PM	Bypass valve closed
2/22/2012	5:19:13 PM	Bubbler valve closed
2/22/2012	5:19:13 PM	Helium valve opened
2/22/2012	5:19:13 PM	Helium MFC set to  500.000000
2/22/2012	5:19:13 PM	H2 MFC set to  0.000000
2/22/2012	5:19:13 PM	BCl3 MFC set to  0.000000
2/22/2012	5:19:13 PM	PH3 MFC set to  0.000000
2/22/2012	5:19:13 PM	SiCl4 MFC set to  0.000000
2/22/2012	5:19:13 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	5:19:13 PM	Tube furnace set to 0
2/22/2012	5:20:18 PM	Helium valve closed
2/22/2012	5:20:18 PM	H2 valve closed
2/22/2012	5:20:18 PM	BCl3 valve closed
2/22/2012	5:20:18 PM	PH3 valve closed
2/22/2012	5:20:18 PM	SiCl4 pre valve closed
2/22/2012	5:20:18 PM	SiCl4 post valve closed
2/22/2012	5:20:18 PM	Main Vac valve closed
2/22/2012	5:20:19 PM	Bypass valve closed
2/22/2012	5:20:19 PM	Bubbler valve closed
2/22/2012	5:20:19 PM	Helium MFC set to  0.000000
2/22/2012	5:20:19 PM	H2 MFC set to  0.000000
2/22/2012	5:20:19 PM	BCl3 MFC set to  0.000000
2/22/2012	5:20:19 PM	PH3 MFC set to  0.000000
2/22/2012	5:20:19 PM	SiCl4 MFC set to  0.000000
2/22/2012	5:20:19 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	5:20:19 PM	Tube furnace set to 0
2/22/2012	5:20:20 PM	Run finished at 5:20 PM
2/22/2012	5:20:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/22/2012	5:26:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/22/2012	5:26:17 PM	Recipe started at 5:26 PM
2/22/2012	5:26:17 PM	Helium valve closed
2/22/2012	5:26:17 PM	H2 valve closed
2/22/2012	5:26:17 PM	BCl3 valve closed
2/22/2012	5:26:17 PM	PH3 valve closed
2/22/2012	5:26:17 PM	SiCl4 pre valve closed
2/22/2012	5:26:17 PM	SiCl4 post valve closed
2/22/2012	5:26:17 PM	Main Vac valve closed
2/22/2012	5:26:17 PM	Bubbler valve closed
2/22/2012	5:26:17 PM	Bypass valve opened
2/22/2012	5:26:17 PM	Helium MFC set to  0.000000
2/22/2012	5:26:17 PM	H2 MFC set to  0.000000
2/22/2012	5:26:17 PM	BCl3 MFC set to  0.000000
2/22/2012	5:26:17 PM	PH3 MFC set to  0.000000
2/22/2012	5:26:17 PM	SiCl4 MFC set to  0.000000
2/22/2012	5:26:17 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	5:26:18 PM	Tube furnace set to 0
2/22/2012	5:27:20 PM	Helium valve closed
2/22/2012	5:27:20 PM	H2 valve closed
2/22/2012	5:27:20 PM	BCl3 valve closed
2/22/2012	5:27:20 PM	PH3 valve closed
2/22/2012	5:27:20 PM	SiCl4 pre valve closed
2/22/2012	5:27:20 PM	SiCl4 post valve closed
2/22/2012	5:27:20 PM	Main Vac valve closed
2/22/2012	5:27:20 PM	Bubbler valve closed
2/22/2012	5:27:20 PM	Bypass valve opened
2/22/2012	5:27:20 PM	Helium MFC set to  0.000000
2/22/2012	5:27:20 PM	H2 MFC set to  0.000000
2/22/2012	5:27:20 PM	BCl3 MFC set to  0.000000
2/22/2012	5:27:20 PM	PH3 MFC set to  0.000000
2/22/2012	5:27:20 PM	SiCl4 MFC set to  0.000000
2/22/2012	5:27:20 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	5:27:20 PM	Tube furnace set to 0
2/22/2012	5:28:20 PM	Helium valve closed
2/22/2012	5:28:20 PM	H2 valve closed
2/22/2012	5:28:20 PM	BCl3 valve closed
2/22/2012	5:28:20 PM	PH3 valve closed
2/22/2012	5:28:20 PM	SiCl4 pre valve closed
2/22/2012	5:28:20 PM	SiCl4 post valve closed
2/22/2012	5:28:20 PM	Bypass valve closed
2/22/2012	5:28:20 PM	Bubbler valve closed
2/22/2012	5:28:20 PM	Main Vac valve opened
2/22/2012	5:28:20 PM	Helium MFC set to  0.000000
2/22/2012	5:28:20 PM	H2 MFC set to  0.000000
2/22/2012	5:28:20 PM	BCl3 MFC set to  0.000000
2/22/2012	5:28:20 PM	PH3 MFC set to  0.000000
2/22/2012	5:28:20 PM	SiCl4 MFC set to  0.000000
2/22/2012	5:28:20 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	5:28:21 PM	Tube furnace set to 0
2/22/2012	5:28:22 PM	Run finished at 5:28 PM
2/22/2012	5:28:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/22/2012	5:28:52 PM	Recipe started at 5:28 PM
2/22/2012	5:28:52 PM	Helium valve closed
2/22/2012	5:28:52 PM	H2 valve closed
2/22/2012	5:28:52 PM	BCl3 valve closed
2/22/2012	5:28:52 PM	PH3 valve closed
2/22/2012	5:28:52 PM	SiCl4 pre valve closed
2/22/2012	5:28:52 PM	SiCl4 post valve closed
2/22/2012	5:28:52 PM	Bypass valve closed
2/22/2012	5:28:52 PM	Bubbler valve closed
2/22/2012	5:28:52 PM	Main Vac valve opened
2/22/2012	5:28:52 PM	Helium MFC set to  0.000000
2/22/2012	5:28:52 PM	H2 MFC set to  0.000000
2/22/2012	5:28:52 PM	BCl3 MFC set to  0.000000
2/22/2012	5:28:53 PM	PH3 MFC set to  0.000000
2/22/2012	5:28:53 PM	SiCl4 MFC set to  0.000000
2/22/2012	5:28:53 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	5:28:53 PM	Tube furnace set to 0
2/22/2012	5:29:23 PM	H2 valve closed
2/22/2012	5:29:23 PM	BCl3 valve closed
2/22/2012	5:29:23 PM	PH3 valve closed
2/22/2012	5:29:23 PM	SiCl4 pre valve closed
2/22/2012	5:29:23 PM	SiCl4 post valve closed
2/22/2012	5:29:23 PM	Bypass valve closed
2/22/2012	5:29:23 PM	Bubbler valve closed
2/22/2012	5:29:23 PM	Helium valve opened
2/22/2012	5:29:23 PM	Main Vac valve opened
2/22/2012	5:29:23 PM	Helium MFC set to  20.000000
2/22/2012	5:29:23 PM	H2 MFC set to  0.000000
2/22/2012	5:29:23 PM	BCl3 MFC set to  0.000000
2/22/2012	5:29:23 PM	PH3 MFC set to  0.000000
2/22/2012	5:29:23 PM	SiCl4 MFC set to  0.000000
2/22/2012	5:29:23 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	5:29:23 PM	Tube furnace set to 0
2/22/2012	5:29:53 PM	Helium valve closed
2/22/2012	5:29:53 PM	H2 valve closed
2/22/2012	5:29:53 PM	BCl3 valve closed
2/22/2012	5:29:53 PM	PH3 valve closed
2/22/2012	5:29:53 PM	SiCl4 pre valve closed
2/22/2012	5:29:53 PM	SiCl4 post valve closed
2/22/2012	5:29:53 PM	Bypass valve closed
2/22/2012	5:29:53 PM	Bubbler valve closed
2/22/2012	5:29:53 PM	Main Vac valve opened
2/22/2012	5:29:53 PM	Helium MFC set to  0.000000
2/22/2012	5:29:53 PM	H2 MFC set to  0.000000
2/22/2012	5:29:53 PM	BCl3 MFC set to  0.000000
2/22/2012	5:29:53 PM	PH3 MFC set to  0.000000
2/22/2012	5:29:53 PM	SiCl4 MFC set to  0.000000
2/22/2012	5:29:53 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	5:29:53 PM	Tube furnace set to 0
2/22/2012	5:30:23 PM	H2 valve closed
2/22/2012	5:30:23 PM	BCl3 valve closed
2/22/2012	5:30:23 PM	PH3 valve closed
2/22/2012	5:30:23 PM	SiCl4 pre valve closed
2/22/2012	5:30:23 PM	SiCl4 post valve closed
2/22/2012	5:30:23 PM	Bypass valve closed
2/22/2012	5:30:23 PM	Bubbler valve closed
2/22/2012	5:30:23 PM	Helium valve opened
2/22/2012	5:30:23 PM	Main Vac valve opened
2/22/2012	5:30:23 PM	Helium MFC set to  20.000000
2/22/2012	5:30:23 PM	H2 MFC set to  0.000000
2/22/2012	5:30:23 PM	BCl3 MFC set to  0.000000
2/22/2012	5:30:23 PM	PH3 MFC set to  0.000000
2/22/2012	5:30:23 PM	SiCl4 MFC set to  0.000000
2/22/2012	5:30:23 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	5:30:23 PM	Tube furnace set to 0
2/22/2012	5:30:53 PM	Helium valve closed
2/22/2012	5:30:53 PM	H2 valve closed
2/22/2012	5:30:53 PM	BCl3 valve closed
2/22/2012	5:30:53 PM	PH3 valve closed
2/22/2012	5:30:53 PM	SiCl4 pre valve closed
2/22/2012	5:30:53 PM	SiCl4 post valve closed
2/22/2012	5:30:53 PM	Bypass valve closed
2/22/2012	5:30:53 PM	Bubbler valve closed
2/22/2012	5:30:53 PM	Main Vac valve opened
2/22/2012	5:30:53 PM	Helium MFC set to  0.000000
2/22/2012	5:30:53 PM	H2 MFC set to  0.000000
2/22/2012	5:30:53 PM	BCl3 MFC set to  0.000000
2/22/2012	5:30:53 PM	PH3 MFC set to  0.000000
2/22/2012	5:30:53 PM	SiCl4 MFC set to  0.000000
2/22/2012	5:30:53 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	5:30:53 PM	Tube furnace set to 0
2/22/2012	5:31:23 PM	H2 valve closed
2/22/2012	5:31:23 PM	BCl3 valve closed
2/22/2012	5:31:23 PM	PH3 valve closed
2/22/2012	5:31:23 PM	SiCl4 pre valve closed
2/22/2012	5:31:23 PM	SiCl4 post valve closed
2/22/2012	5:31:24 PM	Bypass valve closed
2/22/2012	5:31:24 PM	Bubbler valve closed
2/22/2012	5:31:24 PM	Helium valve opened
2/22/2012	5:31:24 PM	Main Vac valve opened
2/22/2012	5:31:24 PM	Helium MFC set to  20.000000
2/22/2012	5:31:24 PM	H2 MFC set to  0.000000
2/22/2012	5:31:24 PM	BCl3 MFC set to  0.000000
2/22/2012	5:31:24 PM	PH3 MFC set to  0.000000
2/22/2012	5:31:24 PM	SiCl4 MFC set to  0.000000
2/22/2012	5:31:24 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	5:31:24 PM	Tube furnace set to 0
2/22/2012	5:31:54 PM	Helium valve closed
2/22/2012	5:31:54 PM	H2 valve closed
2/22/2012	5:31:54 PM	BCl3 valve closed
2/22/2012	5:31:54 PM	PH3 valve closed
2/22/2012	5:31:54 PM	SiCl4 pre valve closed
2/22/2012	5:31:54 PM	SiCl4 post valve closed
2/22/2012	5:31:54 PM	Bypass valve closed
2/22/2012	5:31:54 PM	Bubbler valve closed
2/22/2012	5:31:54 PM	Main Vac valve opened
2/22/2012	5:31:54 PM	Helium MFC set to  0.000000
2/22/2012	5:31:54 PM	H2 MFC set to  0.000000
2/22/2012	5:31:54 PM	BCl3 MFC set to  0.000000
2/22/2012	5:31:54 PM	PH3 MFC set to  0.000000
2/22/2012	5:31:54 PM	SiCl4 MFC set to  0.000000
2/22/2012	5:31:54 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	5:31:54 PM	Tube furnace set to 0
2/22/2012	5:32:24 PM	H2 valve closed
2/22/2012	5:32:24 PM	BCl3 valve closed
2/22/2012	5:32:24 PM	PH3 valve closed
2/22/2012	5:32:24 PM	SiCl4 pre valve closed
2/22/2012	5:32:24 PM	SiCl4 post valve closed
2/22/2012	5:32:24 PM	Bypass valve closed
2/22/2012	5:32:24 PM	Bubbler valve closed
2/22/2012	5:32:24 PM	Helium valve opened
2/22/2012	5:32:24 PM	Main Vac valve opened
2/22/2012	5:32:24 PM	Helium MFC set to  20.000000
2/22/2012	5:32:24 PM	H2 MFC set to  0.000000
2/22/2012	5:32:24 PM	BCl3 MFC set to  0.000000
2/22/2012	5:32:24 PM	PH3 MFC set to  0.000000
2/22/2012	5:32:24 PM	SiCl4 MFC set to  0.000000
2/22/2012	5:32:24 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	5:32:24 PM	Tube furnace set to 0
2/22/2012	5:32:54 PM	Helium valve closed
2/22/2012	5:32:54 PM	H2 valve closed
2/22/2012	5:32:54 PM	BCl3 valve closed
2/22/2012	5:32:54 PM	PH3 valve closed
2/22/2012	5:32:54 PM	SiCl4 pre valve closed
2/22/2012	5:32:54 PM	SiCl4 post valve closed
2/22/2012	5:32:54 PM	Bypass valve closed
2/22/2012	5:32:54 PM	Bubbler valve closed
2/22/2012	5:32:54 PM	Main Vac valve opened
2/22/2012	5:32:54 PM	Helium MFC set to  0.000000
2/22/2012	5:32:54 PM	H2 MFC set to  0.000000
2/22/2012	5:32:54 PM	BCl3 MFC set to  0.000000
2/22/2012	5:32:54 PM	PH3 MFC set to  0.000000
2/22/2012	5:32:54 PM	SiCl4 MFC set to  0.000000
2/22/2012	5:32:54 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	5:32:54 PM	Tube furnace set to 0
2/22/2012	5:33:24 PM	H2 valve closed
2/22/2012	5:33:24 PM	BCl3 valve closed
2/22/2012	5:33:24 PM	PH3 valve closed
2/22/2012	5:33:24 PM	SiCl4 pre valve closed
2/22/2012	5:33:24 PM	SiCl4 post valve closed
2/22/2012	5:33:24 PM	Bypass valve closed
2/22/2012	5:33:24 PM	Bubbler valve closed
2/22/2012	5:33:24 PM	Helium valve opened
2/22/2012	5:33:24 PM	Main Vac valve opened
2/22/2012	5:33:24 PM	Helium MFC set to  20.000000
2/22/2012	5:33:24 PM	H2 MFC set to  0.000000
2/22/2012	5:33:24 PM	BCl3 MFC set to  0.000000
2/22/2012	5:33:24 PM	PH3 MFC set to  0.000000
2/22/2012	5:33:24 PM	SiCl4 MFC set to  0.000000
2/22/2012	5:33:24 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	5:33:24 PM	Tube furnace set to 0
2/22/2012	5:33:55 PM	Helium valve closed
2/22/2012	5:33:55 PM	H2 valve closed
2/22/2012	5:33:55 PM	BCl3 valve closed
2/22/2012	5:33:55 PM	PH3 valve closed
2/22/2012	5:33:55 PM	SiCl4 pre valve closed
2/22/2012	5:33:55 PM	SiCl4 post valve closed
2/22/2012	5:33:55 PM	Bypass valve closed
2/22/2012	5:33:55 PM	Bubbler valve closed
2/22/2012	5:33:55 PM	Main Vac valve opened
2/22/2012	5:33:55 PM	Helium MFC set to  0.000000
2/22/2012	5:33:55 PM	H2 MFC set to  0.000000
2/22/2012	5:33:55 PM	BCl3 MFC set to  0.000000
2/22/2012	5:33:55 PM	PH3 MFC set to  0.000000
2/22/2012	5:33:55 PM	SiCl4 MFC set to  0.000000
2/22/2012	5:33:55 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	5:33:55 PM	Tube furnace set to 0
2/22/2012	5:34:25 PM	H2 valve closed
2/22/2012	5:34:25 PM	BCl3 valve closed
2/22/2012	5:34:25 PM	PH3 valve closed
2/22/2012	5:34:25 PM	SiCl4 pre valve closed
2/22/2012	5:34:25 PM	SiCl4 post valve closed
2/22/2012	5:34:25 PM	Bypass valve closed
2/22/2012	5:34:25 PM	Bubbler valve closed
2/22/2012	5:34:25 PM	Helium valve opened
2/22/2012	5:34:25 PM	Main Vac valve opened
2/22/2012	5:34:25 PM	Helium MFC set to  20.000000
2/22/2012	5:34:25 PM	H2 MFC set to  0.000000
2/22/2012	5:34:25 PM	BCl3 MFC set to  0.000000
2/22/2012	5:34:25 PM	PH3 MFC set to  0.000000
2/22/2012	5:34:25 PM	SiCl4 MFC set to  0.000000
2/22/2012	5:34:25 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	5:34:25 PM	Tube furnace set to 0
2/22/2012	5:34:55 PM	Helium valve closed
2/22/2012	5:34:55 PM	H2 valve closed
2/22/2012	5:34:55 PM	BCl3 valve closed
2/22/2012	5:34:55 PM	PH3 valve closed
2/22/2012	5:34:55 PM	SiCl4 pre valve closed
2/22/2012	5:34:55 PM	SiCl4 post valve closed
2/22/2012	5:34:55 PM	Bypass valve closed
2/22/2012	5:34:55 PM	Bubbler valve closed
2/22/2012	5:34:55 PM	Main Vac valve opened
2/22/2012	5:34:55 PM	Helium MFC set to  0.000000
2/22/2012	5:34:55 PM	H2 MFC set to  0.000000
2/22/2012	5:34:55 PM	BCl3 MFC set to  0.000000
2/22/2012	5:34:55 PM	PH3 MFC set to  0.000000
2/22/2012	5:34:55 PM	SiCl4 MFC set to  0.000000
2/22/2012	5:34:55 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	5:34:55 PM	Tube furnace set to 0
2/22/2012	5:35:25 PM	H2 valve closed
2/22/2012	5:35:25 PM	BCl3 valve closed
2/22/2012	5:35:25 PM	PH3 valve closed
2/22/2012	5:35:25 PM	SiCl4 pre valve closed
2/22/2012	5:35:25 PM	SiCl4 post valve closed
2/22/2012	5:35:25 PM	Bypass valve closed
2/22/2012	5:35:25 PM	Bubbler valve closed
2/22/2012	5:35:25 PM	Helium valve opened
2/22/2012	5:35:25 PM	Main Vac valve opened
2/22/2012	5:35:25 PM	Helium MFC set to  20.000000
2/22/2012	5:35:25 PM	H2 MFC set to  0.000000
2/22/2012	5:35:25 PM	BCl3 MFC set to  0.000000
2/22/2012	5:35:25 PM	PH3 MFC set to  0.000000
2/22/2012	5:35:25 PM	SiCl4 MFC set to  0.000000
2/22/2012	5:35:25 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	5:35:25 PM	Tube furnace set to 0
2/22/2012	5:35:55 PM	Helium valve closed
2/22/2012	5:35:55 PM	H2 valve closed
2/22/2012	5:35:55 PM	BCl3 valve closed
2/22/2012	5:35:55 PM	PH3 valve closed
2/22/2012	5:35:55 PM	SiCl4 pre valve closed
2/22/2012	5:35:55 PM	SiCl4 post valve closed
2/22/2012	5:35:55 PM	Bypass valve closed
2/22/2012	5:35:55 PM	Bubbler valve closed
2/22/2012	5:35:55 PM	Main Vac valve opened
2/22/2012	5:35:55 PM	Helium MFC set to  0.000000
2/22/2012	5:35:55 PM	H2 MFC set to  0.000000
2/22/2012	5:35:55 PM	BCl3 MFC set to  0.000000
2/22/2012	5:35:55 PM	PH3 MFC set to  0.000000
2/22/2012	5:35:55 PM	SiCl4 MFC set to  0.000000
2/22/2012	5:35:55 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	5:35:56 PM	Tube furnace set to 0
2/22/2012	5:36:26 PM	H2 valve closed
2/22/2012	5:36:26 PM	BCl3 valve closed
2/22/2012	5:36:26 PM	PH3 valve closed
2/22/2012	5:36:26 PM	SiCl4 pre valve closed
2/22/2012	5:36:26 PM	SiCl4 post valve closed
2/22/2012	5:36:26 PM	Bypass valve closed
2/22/2012	5:36:26 PM	Bubbler valve closed
2/22/2012	5:36:26 PM	Helium valve opened
2/22/2012	5:36:26 PM	Main Vac valve opened
2/22/2012	5:36:26 PM	Helium MFC set to  20.000000
2/22/2012	5:36:26 PM	H2 MFC set to  0.000000
2/22/2012	5:36:26 PM	BCl3 MFC set to  0.000000
2/22/2012	5:36:26 PM	PH3 MFC set to  0.000000
2/22/2012	5:36:26 PM	SiCl4 MFC set to  0.000000
2/22/2012	5:36:26 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	5:36:26 PM	Tube furnace set to 0
2/22/2012	5:36:56 PM	Helium valve closed
2/22/2012	5:36:56 PM	H2 valve closed
2/22/2012	5:36:56 PM	BCl3 valve closed
2/22/2012	5:36:56 PM	PH3 valve closed
2/22/2012	5:36:56 PM	SiCl4 pre valve closed
2/22/2012	5:36:56 PM	SiCl4 post valve closed
2/22/2012	5:36:56 PM	Bypass valve closed
2/22/2012	5:36:56 PM	Bubbler valve closed
2/22/2012	5:36:56 PM	Main Vac valve opened
2/22/2012	5:36:56 PM	Helium MFC set to  0.000000
2/22/2012	5:36:56 PM	H2 MFC set to  0.000000
2/22/2012	5:36:56 PM	BCl3 MFC set to  0.000000
2/22/2012	5:36:56 PM	PH3 MFC set to  0.000000
2/22/2012	5:36:56 PM	SiCl4 MFC set to  0.000000
2/22/2012	5:36:56 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	5:36:56 PM	Tube furnace set to 0
2/22/2012	5:37:26 PM	H2 valve closed
2/22/2012	5:37:26 PM	BCl3 valve closed
2/22/2012	5:37:26 PM	PH3 valve closed
2/22/2012	5:37:26 PM	SiCl4 pre valve closed
2/22/2012	5:37:26 PM	SiCl4 post valve closed
2/22/2012	5:37:26 PM	Bypass valve closed
2/22/2012	5:37:26 PM	Bubbler valve closed
2/22/2012	5:37:26 PM	Helium valve opened
2/22/2012	5:37:26 PM	Main Vac valve opened
2/22/2012	5:37:26 PM	Helium MFC set to  20.000000
2/22/2012	5:37:26 PM	H2 MFC set to  0.000000
2/22/2012	5:37:26 PM	BCl3 MFC set to  0.000000
2/22/2012	5:37:26 PM	PH3 MFC set to  0.000000
2/22/2012	5:37:26 PM	SiCl4 MFC set to  0.000000
2/22/2012	5:37:26 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	5:37:26 PM	Tube furnace set to 0
2/22/2012	5:37:56 PM	Helium valve closed
2/22/2012	5:37:56 PM	H2 valve closed
2/22/2012	5:37:56 PM	BCl3 valve closed
2/22/2012	5:37:56 PM	PH3 valve closed
2/22/2012	5:37:56 PM	SiCl4 pre valve closed
2/22/2012	5:37:56 PM	SiCl4 post valve closed
2/22/2012	5:37:56 PM	Bypass valve closed
2/22/2012	5:37:56 PM	Bubbler valve closed
2/22/2012	5:37:56 PM	Main Vac valve opened
2/22/2012	5:37:56 PM	Helium MFC set to  0.000000
2/22/2012	5:37:56 PM	H2 MFC set to  0.000000
2/22/2012	5:37:56 PM	BCl3 MFC set to  0.000000
2/22/2012	5:37:56 PM	PH3 MFC set to  0.000000
2/22/2012	5:37:56 PM	SiCl4 MFC set to  0.000000
2/22/2012	5:37:56 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	5:37:56 PM	Tube furnace set to 200
2/22/2012	5:38:26 PM	H2 valve closed
2/22/2012	5:38:26 PM	BCl3 valve closed
2/22/2012	5:38:26 PM	PH3 valve closed
2/22/2012	5:38:26 PM	SiCl4 pre valve closed
2/22/2012	5:38:26 PM	SiCl4 post valve closed
2/22/2012	5:38:26 PM	Bypass valve closed
2/22/2012	5:38:26 PM	Bubbler valve closed
2/22/2012	5:38:26 PM	Helium valve opened
2/22/2012	5:38:26 PM	Main Vac valve opened
2/22/2012	5:38:26 PM	Helium MFC set to  20.000000
2/22/2012	5:38:26 PM	H2 MFC set to  0.000000
2/22/2012	5:38:26 PM	BCl3 MFC set to  0.000000
2/22/2012	5:38:26 PM	PH3 MFC set to  0.000000
2/22/2012	5:38:26 PM	SiCl4 MFC set to  0.000000
2/22/2012	5:38:26 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	5:38:27 PM	Tube furnace set to 200
2/22/2012	5:38:57 PM	Helium valve closed
2/22/2012	5:38:57 PM	H2 valve closed
2/22/2012	5:38:57 PM	BCl3 valve closed
2/22/2012	5:38:57 PM	PH3 valve closed
2/22/2012	5:38:57 PM	SiCl4 pre valve closed
2/22/2012	5:38:57 PM	SiCl4 post valve closed
2/22/2012	5:38:57 PM	Bypass valve closed
2/22/2012	5:38:57 PM	Bubbler valve closed
2/22/2012	5:38:57 PM	Main Vac valve opened
2/22/2012	5:38:57 PM	Helium MFC set to  0.000000
2/22/2012	5:38:57 PM	H2 MFC set to  0.000000
2/22/2012	5:38:57 PM	BCl3 MFC set to  0.000000
2/22/2012	5:38:57 PM	PH3 MFC set to  0.000000
2/22/2012	5:38:57 PM	SiCl4 MFC set to  0.000000
2/22/2012	5:38:57 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	5:38:57 PM	Tube furnace set to 200
2/22/2012	5:39:27 PM	H2 valve closed
2/22/2012	5:39:27 PM	BCl3 valve closed
2/22/2012	5:39:27 PM	PH3 valve closed
2/22/2012	5:39:27 PM	SiCl4 pre valve closed
2/22/2012	5:39:27 PM	SiCl4 post valve closed
2/22/2012	5:39:27 PM	Bypass valve closed
2/22/2012	5:39:27 PM	Bubbler valve closed
2/22/2012	5:39:27 PM	Helium valve opened
2/22/2012	5:39:27 PM	Main Vac valve opened
2/22/2012	5:39:27 PM	Helium MFC set to  20.000000
2/22/2012	5:39:27 PM	H2 MFC set to  0.000000
2/22/2012	5:39:27 PM	BCl3 MFC set to  0.000000
2/22/2012	5:39:27 PM	PH3 MFC set to  0.000000
2/22/2012	5:39:27 PM	SiCl4 MFC set to  0.000000
2/22/2012	5:39:27 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	5:39:27 PM	Tube furnace set to 200
2/22/2012	5:39:57 PM	Helium valve closed
2/22/2012	5:39:57 PM	H2 valve closed
2/22/2012	5:39:57 PM	BCl3 valve closed
2/22/2012	5:39:57 PM	PH3 valve closed
2/22/2012	5:39:57 PM	SiCl4 pre valve closed
2/22/2012	5:39:57 PM	SiCl4 post valve closed
2/22/2012	5:39:57 PM	Bypass valve closed
2/22/2012	5:39:57 PM	Bubbler valve closed
2/22/2012	5:39:57 PM	Main Vac valve opened
2/22/2012	5:39:57 PM	Helium MFC set to  0.000000
2/22/2012	5:39:57 PM	H2 MFC set to  0.000000
2/22/2012	5:39:57 PM	BCl3 MFC set to  0.000000
2/22/2012	5:39:57 PM	PH3 MFC set to  0.000000
2/22/2012	5:39:57 PM	SiCl4 MFC set to  0.000000
2/22/2012	5:39:57 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	5:39:57 PM	Tube furnace set to 200
2/22/2012	5:40:27 PM	H2 valve closed
2/22/2012	5:40:27 PM	BCl3 valve closed
2/22/2012	5:40:27 PM	PH3 valve closed
2/22/2012	5:40:27 PM	SiCl4 pre valve closed
2/22/2012	5:40:27 PM	SiCl4 post valve closed
2/22/2012	5:40:27 PM	Bypass valve closed
2/22/2012	5:40:27 PM	Bubbler valve closed
2/22/2012	5:40:27 PM	Helium valve opened
2/22/2012	5:40:27 PM	Main Vac valve opened
2/22/2012	5:40:27 PM	Helium MFC set to  20.000000
2/22/2012	5:40:27 PM	H2 MFC set to  0.000000
2/22/2012	5:40:27 PM	BCl3 MFC set to  0.000000
2/22/2012	5:40:27 PM	PH3 MFC set to  0.000000
2/22/2012	5:40:27 PM	SiCl4 MFC set to  0.000000
2/22/2012	5:40:27 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	5:40:27 PM	Tube furnace set to 200
2/22/2012	5:40:57 PM	Helium valve closed
2/22/2012	5:40:57 PM	H2 valve closed
2/22/2012	5:40:57 PM	BCl3 valve closed
2/22/2012	5:40:57 PM	PH3 valve closed
2/22/2012	5:40:57 PM	SiCl4 pre valve closed
2/22/2012	5:40:57 PM	SiCl4 post valve closed
2/22/2012	5:40:57 PM	Bypass valve closed
2/22/2012	5:40:57 PM	Bubbler valve closed
2/22/2012	5:40:57 PM	Main Vac valve opened
2/22/2012	5:40:57 PM	Helium MFC set to  0.000000
2/22/2012	5:40:57 PM	H2 MFC set to  0.000000
2/22/2012	5:40:57 PM	BCl3 MFC set to  0.000000
2/22/2012	5:40:57 PM	PH3 MFC set to  0.000000
2/22/2012	5:40:57 PM	SiCl4 MFC set to  0.000000
2/22/2012	5:40:57 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	5:40:58 PM	Tube furnace set to 200
2/22/2012	5:41:28 PM	H2 valve closed
2/22/2012	5:41:28 PM	BCl3 valve closed
2/22/2012	5:41:28 PM	PH3 valve closed
2/22/2012	5:41:28 PM	SiCl4 pre valve closed
2/22/2012	5:41:28 PM	SiCl4 post valve closed
2/22/2012	5:41:28 PM	Bypass valve closed
2/22/2012	5:41:28 PM	Bubbler valve closed
2/22/2012	5:41:28 PM	Helium valve opened
2/22/2012	5:41:28 PM	Main Vac valve opened
2/22/2012	5:41:28 PM	Helium MFC set to  20.000000
2/22/2012	5:41:28 PM	H2 MFC set to  0.000000
2/22/2012	5:41:28 PM	BCl3 MFC set to  0.000000
2/22/2012	5:41:28 PM	PH3 MFC set to  0.000000
2/22/2012	5:41:28 PM	SiCl4 MFC set to  0.000000
2/22/2012	5:41:28 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	5:41:28 PM	Tube furnace set to 200
2/22/2012	5:41:58 PM	Helium valve closed
2/22/2012	5:41:58 PM	H2 valve closed
2/22/2012	5:41:58 PM	BCl3 valve closed
2/22/2012	5:41:58 PM	PH3 valve closed
2/22/2012	5:41:58 PM	SiCl4 pre valve closed
2/22/2012	5:41:58 PM	SiCl4 post valve closed
2/22/2012	5:41:58 PM	Bypass valve closed
2/22/2012	5:41:58 PM	Bubbler valve closed
2/22/2012	5:41:58 PM	Main Vac valve opened
2/22/2012	5:41:58 PM	Helium MFC set to  0.000000
2/22/2012	5:41:58 PM	H2 MFC set to  0.000000
2/22/2012	5:41:58 PM	BCl3 MFC set to  0.000000
2/22/2012	5:41:58 PM	PH3 MFC set to  0.000000
2/22/2012	5:41:58 PM	SiCl4 MFC set to  0.000000
2/22/2012	5:41:58 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	5:41:58 PM	Tube furnace set to 200
2/22/2012	5:42:28 PM	H2 valve closed
2/22/2012	5:42:28 PM	BCl3 valve closed
2/22/2012	5:42:28 PM	PH3 valve closed
2/22/2012	5:42:28 PM	SiCl4 pre valve closed
2/22/2012	5:42:28 PM	SiCl4 post valve closed
2/22/2012	5:42:28 PM	Bypass valve closed
2/22/2012	5:42:28 PM	Bubbler valve closed
2/22/2012	5:42:28 PM	Helium valve opened
2/22/2012	5:42:28 PM	Main Vac valve opened
2/22/2012	5:42:28 PM	Helium MFC set to  20.000000
2/22/2012	5:42:28 PM	H2 MFC set to  0.000000
2/22/2012	5:42:28 PM	BCl3 MFC set to  0.000000
2/22/2012	5:42:28 PM	PH3 MFC set to  0.000000
2/22/2012	5:42:28 PM	SiCl4 MFC set to  0.000000
2/22/2012	5:42:28 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	5:42:28 PM	Tube furnace set to 200
2/22/2012	5:42:58 PM	Helium valve closed
2/22/2012	5:42:58 PM	H2 valve closed
2/22/2012	5:42:58 PM	BCl3 valve closed
2/22/2012	5:42:58 PM	PH3 valve closed
2/22/2012	5:42:58 PM	SiCl4 pre valve closed
2/22/2012	5:42:58 PM	SiCl4 post valve closed
2/22/2012	5:42:58 PM	Bypass valve closed
2/22/2012	5:42:58 PM	Bubbler valve closed
2/22/2012	5:42:58 PM	Main Vac valve opened
2/22/2012	5:42:58 PM	Helium MFC set to  0.000000
2/22/2012	5:42:58 PM	H2 MFC set to  0.000000
2/22/2012	5:42:58 PM	BCl3 MFC set to  0.000000
2/22/2012	5:42:58 PM	PH3 MFC set to  0.000000
2/22/2012	5:42:58 PM	SiCl4 MFC set to  0.000000
2/22/2012	5:42:58 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	5:42:58 PM	Tube furnace set to 200
2/22/2012	5:43:28 PM	H2 valve closed
2/22/2012	5:43:28 PM	BCl3 valve closed
2/22/2012	5:43:28 PM	PH3 valve closed
2/22/2012	5:43:28 PM	SiCl4 pre valve closed
2/22/2012	5:43:28 PM	SiCl4 post valve closed
2/22/2012	5:43:28 PM	Bypass valve closed
2/22/2012	5:43:28 PM	Bubbler valve closed
2/22/2012	5:43:28 PM	Helium valve opened
2/22/2012	5:43:28 PM	Main Vac valve opened
2/22/2012	5:43:28 PM	Helium MFC set to  20.000000
2/22/2012	5:43:28 PM	H2 MFC set to  0.000000
2/22/2012	5:43:28 PM	BCl3 MFC set to  0.000000
2/22/2012	5:43:28 PM	PH3 MFC set to  0.000000
2/22/2012	5:43:28 PM	SiCl4 MFC set to  0.000000
2/22/2012	5:43:28 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	5:43:29 PM	Tube furnace set to 200
2/22/2012	5:43:59 PM	Helium valve closed
2/22/2012	5:43:59 PM	H2 valve closed
2/22/2012	5:43:59 PM	BCl3 valve closed
2/22/2012	5:43:59 PM	PH3 valve closed
2/22/2012	5:43:59 PM	SiCl4 pre valve closed
2/22/2012	5:43:59 PM	SiCl4 post valve closed
2/22/2012	5:43:59 PM	Bypass valve closed
2/22/2012	5:43:59 PM	Bubbler valve closed
2/22/2012	5:43:59 PM	Main Vac valve opened
2/22/2012	5:43:59 PM	Helium MFC set to  0.000000
2/22/2012	5:43:59 PM	H2 MFC set to  0.000000
2/22/2012	5:43:59 PM	BCl3 MFC set to  0.000000
2/22/2012	5:43:59 PM	PH3 MFC set to  0.000000
2/22/2012	5:43:59 PM	SiCl4 MFC set to  0.000000
2/22/2012	5:43:59 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	5:43:59 PM	Tube furnace set to 0
2/22/2012	5:44:00 PM	Run finished at 5:44 PM
2/22/2012	5:50:33 PM	Recipe started at 5:50 PM
2/22/2012	5:50:33 PM	Helium valve closed
2/22/2012	5:50:33 PM	H2 valve closed
2/22/2012	5:50:33 PM	BCl3 valve closed
2/22/2012	5:50:33 PM	PH3 valve closed
2/22/2012	5:50:33 PM	SiCl4 pre valve closed
2/22/2012	5:50:33 PM	SiCl4 post valve closed
2/22/2012	5:50:33 PM	Main Vac valve closed
2/22/2012	5:50:33 PM	Bypass valve closed
2/22/2012	5:50:33 PM	Bubbler valve closed
2/22/2012	5:50:33 PM	Helium MFC set to  0.000000
2/22/2012	5:50:33 PM	H2 MFC set to  0.000000
2/22/2012	5:50:33 PM	BCl3 MFC set to  0.000000
2/22/2012	5:50:33 PM	PH3 MFC set to  0.000000
2/22/2012	5:50:33 PM	SiCl4 MFC set to  0.000000
2/22/2012	5:50:33 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	5:50:33 PM	Tube furnace set to 0
2/22/2012	5:50:36 PM	Helium valve closed
2/22/2012	5:50:36 PM	BCl3 valve closed
2/22/2012	5:50:36 PM	PH3 valve closed
2/22/2012	5:50:36 PM	SiCl4 pre valve closed
2/22/2012	5:50:36 PM	SiCl4 post valve closed
2/22/2012	5:50:36 PM	Main Vac valve closed
2/22/2012	5:50:36 PM	Bypass valve closed
2/22/2012	5:50:36 PM	Bubbler valve closed
2/22/2012	5:50:36 PM	H2 valve opened
2/22/2012	5:50:36 PM	Helium MFC set to  0.000000
2/22/2012	5:50:36 PM	H2 MFC set to  500.000000
2/22/2012	5:50:36 PM	BCl3 MFC set to  0.000000
2/22/2012	5:50:36 PM	PH3 MFC set to  0.000000
2/22/2012	5:50:36 PM	SiCl4 MFC set to  0.000000
2/22/2012	5:50:36 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	5:50:37 PM	Tube furnace set to 0
2/22/2012	5:51:41 PM	Helium valve closed
2/22/2012	5:51:41 PM	BCl3 valve closed
2/22/2012	5:51:41 PM	PH3 valve closed
2/22/2012	5:51:41 PM	SiCl4 pre valve closed
2/22/2012	5:51:41 PM	SiCl4 post valve closed
2/22/2012	5:51:41 PM	Main Vac valve closed
2/22/2012	5:51:41 PM	Bypass valve closed
2/22/2012	5:51:41 PM	H2 valve opened
2/22/2012	5:51:41 PM	Bubbler valve opened
2/22/2012	5:51:41 PM	Helium MFC set to  0.000000
2/22/2012	5:51:41 PM	H2 MFC set to  500.000000
2/22/2012	5:51:41 PM	BCl3 MFC set to  0.000000
2/22/2012	5:51:41 PM	PH3 MFC set to  0.000000
2/22/2012	5:51:41 PM	SiCl4 MFC set to  0.000000
2/22/2012	5:51:41 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	5:51:41 PM	Tube furnace set to 0
2/22/2012	5:51:42 PM	Helium valve closed
2/22/2012	5:51:42 PM	BCl3 valve closed
2/22/2012	5:51:42 PM	PH3 valve closed
2/22/2012	5:51:42 PM	SiCl4 pre valve closed
2/22/2012	5:51:42 PM	SiCl4 post valve closed
2/22/2012	5:51:42 PM	Main Vac valve closed
2/22/2012	5:51:42 PM	Bypass valve closed
2/22/2012	5:51:42 PM	H2 valve opened
2/22/2012	5:51:42 PM	Bubbler valve opened
2/22/2012	5:51:42 PM	Helium MFC set to  0.000000
2/22/2012	5:51:42 PM	H2 MFC set to  500.000000
2/22/2012	5:51:42 PM	BCl3 MFC set to  0.000000
2/22/2012	5:51:42 PM	PH3 MFC set to  0.000000
2/22/2012	5:51:42 PM	SiCl4 MFC set to  0.000000
2/22/2012	5:51:42 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	5:51:42 PM	Tube furnace set to 1000
2/22/2012	6:11:42 PM	Helium valve closed
2/22/2012	6:11:42 PM	PH3 valve closed
2/22/2012	6:11:42 PM	Main Vac valve closed
2/22/2012	6:11:42 PM	Bypass valve closed
2/22/2012	6:11:42 PM	H2 valve opened
2/22/2012	6:11:42 PM	BCl3 valve opened
2/22/2012	6:11:42 PM	SiCl4 pre valve opened
2/22/2012	6:11:42 PM	SiCl4 post valve opened
2/22/2012	6:11:42 PM	Bubbler valve opened
2/22/2012	6:11:42 PM	Helium MFC set to  0.000000
2/22/2012	6:11:42 PM	H2 MFC set to  450.000000
2/22/2012	6:11:42 PM	BCl3 MFC set to  1.500000
2/22/2012	6:11:42 PM	PH3 MFC set to  0.000000
2/22/2012	6:11:42 PM	SiCl4 MFC set to  50.000000
2/22/2012	6:11:42 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	6:11:42 PM	Tube furnace set to 1000
2/22/2012	6:24:42 PM	Helium valve closed
2/22/2012	6:24:42 PM	BCl3 valve closed
2/22/2012	6:24:42 PM	Main Vac valve closed
2/22/2012	6:24:42 PM	Bypass valve closed
2/22/2012	6:24:42 PM	H2 valve opened
2/22/2012	6:24:42 PM	PH3 valve opened
2/22/2012	6:24:42 PM	SiCl4 pre valve opened
2/22/2012	6:24:42 PM	SiCl4 post valve opened
2/22/2012	6:24:42 PM	Bubbler valve opened
2/22/2012	6:24:42 PM	Helium MFC set to  0.000000
2/22/2012	6:24:42 PM	H2 MFC set to  450.000000
2/22/2012	6:24:42 PM	BCl3 MFC set to  0.000000
2/22/2012	6:24:42 PM	PH3 MFC set to  20.000000
2/22/2012	6:24:42 PM	SiCl4 MFC set to  50.000000
2/22/2012	6:24:42 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	6:24:42 PM	Tube furnace set to 1000
2/22/2012	6:30:42 PM	Helium valve closed
2/22/2012	6:30:42 PM	BCl3 valve closed
2/22/2012	6:30:42 PM	PH3 valve closed
2/22/2012	6:30:42 PM	SiCl4 pre valve closed
2/22/2012	6:30:42 PM	SiCl4 post valve closed
2/22/2012	6:30:42 PM	Main Vac valve closed
2/22/2012	6:30:42 PM	Bypass valve closed
2/22/2012	6:30:42 PM	H2 valve opened
2/22/2012	6:30:42 PM	Bubbler valve opened
2/22/2012	6:30:42 PM	Helium MFC set to  0.000000
2/22/2012	6:30:42 PM	H2 MFC set to  500.000000
2/22/2012	6:30:42 PM	BCl3 MFC set to  0.000000
2/22/2012	6:30:42 PM	PH3 MFC set to  0.000000
2/22/2012	6:30:42 PM	SiCl4 MFC set to  0.000000
2/22/2012	6:30:42 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	6:30:42 PM	Tube furnace set to 950
2/22/2012	6:32:42 PM	Helium valve closed
2/22/2012	6:32:42 PM	BCl3 valve closed
2/22/2012	6:32:42 PM	PH3 valve closed
2/22/2012	6:32:42 PM	SiCl4 pre valve closed
2/22/2012	6:32:42 PM	SiCl4 post valve closed
2/22/2012	6:32:42 PM	Main Vac valve closed
2/22/2012	6:32:42 PM	Bypass valve closed
2/22/2012	6:32:42 PM	H2 valve opened
2/22/2012	6:32:42 PM	Bubbler valve opened
2/22/2012	6:32:42 PM	Helium MFC set to  0.000000
2/22/2012	6:32:42 PM	H2 MFC set to  500.000000
2/22/2012	6:32:42 PM	BCl3 MFC set to  0.000000
2/22/2012	6:32:42 PM	PH3 MFC set to  0.000000
2/22/2012	6:32:42 PM	SiCl4 MFC set to  0.000000
2/22/2012	6:32:42 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	6:32:43 PM	Tube furnace set to 900
2/22/2012	6:34:43 PM	Helium valve closed
2/22/2012	6:34:43 PM	BCl3 valve closed
2/22/2012	6:34:43 PM	PH3 valve closed
2/22/2012	6:34:43 PM	SiCl4 pre valve closed
2/22/2012	6:34:43 PM	SiCl4 post valve closed
2/22/2012	6:34:43 PM	Main Vac valve closed
2/22/2012	6:34:43 PM	Bypass valve closed
2/22/2012	6:34:43 PM	H2 valve opened
2/22/2012	6:34:43 PM	Bubbler valve opened
2/22/2012	6:34:43 PM	Helium MFC set to  0.000000
2/22/2012	6:34:43 PM	H2 MFC set to  500.000000
2/22/2012	6:34:43 PM	BCl3 MFC set to  0.000000
2/22/2012	6:34:43 PM	PH3 MFC set to  0.000000
2/22/2012	6:34:43 PM	SiCl4 MFC set to  0.000000
2/22/2012	6:34:43 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	6:34:43 PM	Tube furnace set to 850
2/22/2012	6:36:43 PM	H2 valve closed
2/22/2012	6:36:43 PM	BCl3 valve closed
2/22/2012	6:36:43 PM	PH3 valve closed
2/22/2012	6:36:43 PM	SiCl4 pre valve closed
2/22/2012	6:36:43 PM	SiCl4 post valve closed
2/22/2012	6:36:43 PM	Main Vac valve closed
2/22/2012	6:36:43 PM	Bypass valve closed
2/22/2012	6:36:43 PM	Helium valve opened
2/22/2012	6:36:43 PM	Bubbler valve opened
2/22/2012	6:36:43 PM	Helium MFC set to  500.000000
2/22/2012	6:36:43 PM	H2 MFC set to  0.000000
2/22/2012	6:36:43 PM	BCl3 MFC set to  0.000000
2/22/2012	6:36:43 PM	PH3 MFC set to  0.000000
2/22/2012	6:36:43 PM	SiCl4 MFC set to  0.000000
2/22/2012	6:36:43 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	6:36:43 PM	Tube furnace set to 800
2/22/2012	6:38:43 PM	H2 valve closed
2/22/2012	6:38:43 PM	BCl3 valve closed
2/22/2012	6:38:43 PM	PH3 valve closed
2/22/2012	6:38:43 PM	SiCl4 pre valve closed
2/22/2012	6:38:43 PM	SiCl4 post valve closed
2/22/2012	6:38:43 PM	Main Vac valve closed
2/22/2012	6:38:43 PM	Bypass valve closed
2/22/2012	6:38:43 PM	Helium valve opened
2/22/2012	6:38:43 PM	Bubbler valve opened
2/22/2012	6:38:43 PM	Helium MFC set to  500.000000
2/22/2012	6:38:43 PM	H2 MFC set to  0.000000
2/22/2012	6:38:43 PM	BCl3 MFC set to  0.000000
2/22/2012	6:38:43 PM	PH3 MFC set to  0.000000
2/22/2012	6:38:43 PM	SiCl4 MFC set to  0.000000
2/22/2012	6:38:43 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	6:38:43 PM	Tube furnace set to 750
2/22/2012	6:40:43 PM	H2 valve closed
2/22/2012	6:40:43 PM	BCl3 valve closed
2/22/2012	6:40:43 PM	PH3 valve closed
2/22/2012	6:40:43 PM	SiCl4 pre valve closed
2/22/2012	6:40:43 PM	SiCl4 post valve closed
2/22/2012	6:40:43 PM	Main Vac valve closed
2/22/2012	6:40:43 PM	Bypass valve closed
2/22/2012	6:40:43 PM	Helium valve opened
2/22/2012	6:40:43 PM	Bubbler valve opened
2/22/2012	6:40:43 PM	Helium MFC set to  500.000000
2/22/2012	6:40:43 PM	H2 MFC set to  0.000000
2/22/2012	6:40:43 PM	BCl3 MFC set to  0.000000
2/22/2012	6:40:43 PM	PH3 MFC set to  0.000000
2/22/2012	6:40:43 PM	SiCl4 MFC set to  0.000000
2/22/2012	6:40:43 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	6:40:43 PM	Tube furnace set to 0
2/22/2012	7:00:43 PM	Helium valve closed
2/22/2012	7:00:43 PM	H2 valve closed
2/22/2012	7:00:43 PM	BCl3 valve closed
2/22/2012	7:00:43 PM	PH3 valve closed
2/22/2012	7:00:43 PM	SiCl4 pre valve closed
2/22/2012	7:00:43 PM	SiCl4 post valve closed
2/22/2012	7:00:43 PM	Main Vac valve closed
2/22/2012	7:00:43 PM	Bypass valve closed
2/22/2012	7:00:43 PM	Bubbler valve closed
2/22/2012	7:00:43 PM	Helium MFC set to  0.000000
2/22/2012	7:00:43 PM	H2 MFC set to  0.000000
2/22/2012	7:00:43 PM	BCl3 MFC set to  0.000000
2/22/2012	7:00:43 PM	PH3 MFC set to  0.000000
2/22/2012	7:00:43 PM	SiCl4 MFC set to  0.000000
2/22/2012	7:00:43 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	7:00:44 PM	Tube furnace set to 0
2/22/2012	7:00:45 PM	Helium valve closed
2/22/2012	7:00:45 PM	H2 valve closed
2/22/2012	7:00:45 PM	BCl3 valve closed
2/22/2012	7:00:45 PM	PH3 valve closed
2/22/2012	7:00:45 PM	SiCl4 pre valve closed
2/22/2012	7:00:45 PM	SiCl4 post valve closed
2/22/2012	7:00:45 PM	Main Vac valve closed
2/22/2012	7:00:45 PM	Bubbler valve closed
2/22/2012	7:00:45 PM	Bypass valve opened
2/22/2012	7:00:45 PM	Helium MFC set to  0.000000
2/22/2012	7:00:45 PM	H2 MFC set to  0.000000
2/22/2012	7:00:45 PM	BCl3 MFC set to  0.000000
2/22/2012	7:00:45 PM	PH3 MFC set to  0.000000
2/22/2012	7:00:45 PM	SiCl4 MFC set to  0.000000
2/22/2012	7:00:45 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	7:00:45 PM	Tube furnace set to 0
2/22/2012	7:01:34 PM	Helium valve closed
2/22/2012	7:01:34 PM	H2 valve closed
2/22/2012	7:01:34 PM	BCl3 valve closed
2/22/2012	7:01:34 PM	PH3 valve closed
2/22/2012	7:01:34 PM	SiCl4 pre valve closed
2/22/2012	7:01:34 PM	SiCl4 post valve closed
2/22/2012	7:01:34 PM	Main Vac valve closed
2/22/2012	7:01:34 PM	Bubbler valve closed
2/22/2012	7:01:34 PM	Bypass valve opened
2/22/2012	7:01:34 PM	Helium MFC set to  0.000000
2/22/2012	7:01:34 PM	H2 MFC set to  0.000000
2/22/2012	7:01:34 PM	BCl3 MFC set to  0.000000
2/22/2012	7:01:34 PM	PH3 MFC set to  0.000000
2/22/2012	7:01:34 PM	SiCl4 MFC set to  0.000000
2/22/2012	7:01:34 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	7:01:34 PM	Tube furnace set to 0
2/22/2012	7:02:35 PM	Helium valve closed
2/22/2012	7:02:35 PM	H2 valve closed
2/22/2012	7:02:35 PM	BCl3 valve closed
2/22/2012	7:02:35 PM	PH3 valve closed
2/22/2012	7:02:35 PM	SiCl4 pre valve closed
2/22/2012	7:02:35 PM	SiCl4 post valve closed
2/22/2012	7:02:35 PM	Bypass valve closed
2/22/2012	7:02:35 PM	Bubbler valve closed
2/22/2012	7:02:35 PM	Main Vac valve opened
2/22/2012	7:02:35 PM	Helium MFC set to  0.000000
2/22/2012	7:02:35 PM	H2 MFC set to  0.000000
2/22/2012	7:02:35 PM	BCl3 MFC set to  0.000000
2/22/2012	7:02:35 PM	PH3 MFC set to  0.000000
2/22/2012	7:02:35 PM	SiCl4 MFC set to  0.000000
2/22/2012	7:02:35 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	7:02:35 PM	Tube furnace set to 0
2/22/2012	7:02:36 PM	Run finished at 7:02 PM
2/22/2012	7:06:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/22/2012	7:06:45 PM	Recipe started at 7:06 PM
2/22/2012	7:06:45 PM	Helium valve closed
2/22/2012	7:06:45 PM	H2 valve closed
2/22/2012	7:06:45 PM	BCl3 valve closed
2/22/2012	7:06:45 PM	PH3 valve closed
2/22/2012	7:06:45 PM	SiCl4 pre valve closed
2/22/2012	7:06:45 PM	SiCl4 post valve closed
2/22/2012	7:06:45 PM	Main Vac valve closed
2/22/2012	7:06:45 PM	Bypass valve closed
2/22/2012	7:06:45 PM	Bubbler valve closed
2/22/2012	7:06:45 PM	Helium MFC set to  0.000000
2/22/2012	7:06:45 PM	H2 MFC set to  0.000000
2/22/2012	7:06:45 PM	BCl3 MFC set to  0.000000
2/22/2012	7:06:45 PM	PH3 MFC set to  0.000000
2/22/2012	7:06:45 PM	SiCl4 MFC set to  0.000000
2/22/2012	7:06:45 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	7:06:45 PM	Tube furnace set to 0
2/22/2012	7:06:48 PM	H2 valve closed
2/22/2012	7:06:48 PM	BCl3 valve closed
2/22/2012	7:06:48 PM	PH3 valve closed
2/22/2012	7:06:48 PM	SiCl4 pre valve closed
2/22/2012	7:06:48 PM	SiCl4 post valve closed
2/22/2012	7:06:48 PM	Main Vac valve closed
2/22/2012	7:06:48 PM	Bypass valve closed
2/22/2012	7:06:48 PM	Bubbler valve closed
2/22/2012	7:06:48 PM	Helium valve opened
2/22/2012	7:06:48 PM	Helium MFC set to  500.000000
2/22/2012	7:06:48 PM	H2 MFC set to  0.000000
2/22/2012	7:06:48 PM	BCl3 MFC set to  0.000000
2/22/2012	7:06:48 PM	PH3 MFC set to  0.000000
2/22/2012	7:06:48 PM	SiCl4 MFC set to  0.000000
2/22/2012	7:06:48 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	7:06:48 PM	Tube furnace set to 0
2/22/2012	7:07:51 PM	Helium valve closed
2/22/2012	7:07:51 PM	H2 valve closed
2/22/2012	7:07:51 PM	BCl3 valve closed
2/22/2012	7:07:51 PM	PH3 valve closed
2/22/2012	7:07:51 PM	SiCl4 pre valve closed
2/22/2012	7:07:51 PM	SiCl4 post valve closed
2/22/2012	7:07:51 PM	Main Vac valve closed
2/22/2012	7:07:51 PM	Bypass valve closed
2/22/2012	7:07:51 PM	Bubbler valve closed
2/22/2012	7:07:51 PM	Helium MFC set to  0.000000
2/22/2012	7:07:51 PM	H2 MFC set to  0.000000
2/22/2012	7:07:51 PM	BCl3 MFC set to  0.000000
2/22/2012	7:07:51 PM	PH3 MFC set to  0.000000
2/22/2012	7:07:51 PM	SiCl4 MFC set to  0.000000
2/22/2012	7:07:51 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	7:07:51 PM	Tube furnace set to 0
2/22/2012	7:07:52 PM	Run finished at 7:07 PM
2/22/2012	7:07:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/22/2012	7:11:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/22/2012	7:11:09 PM	Recipe started at 7:11 PM
2/22/2012	7:11:09 PM	Helium valve closed
2/22/2012	7:11:09 PM	H2 valve closed
2/22/2012	7:11:09 PM	BCl3 valve closed
2/22/2012	7:11:09 PM	PH3 valve closed
2/22/2012	7:11:09 PM	SiCl4 pre valve closed
2/22/2012	7:11:09 PM	SiCl4 post valve closed
2/22/2012	7:11:09 PM	Main Vac valve closed
2/22/2012	7:11:09 PM	Bubbler valve closed
2/22/2012	7:11:09 PM	Bypass valve opened
2/22/2012	7:11:09 PM	Helium MFC set to  0.000000
2/22/2012	7:11:09 PM	H2 MFC set to  0.000000
2/22/2012	7:11:09 PM	BCl3 MFC set to  0.000000
2/22/2012	7:11:09 PM	PH3 MFC set to  0.000000
2/22/2012	7:11:09 PM	SiCl4 MFC set to  0.000000
2/22/2012	7:11:09 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	7:11:09 PM	Tube furnace set to 0
2/22/2012	7:12:11 PM	Helium valve closed
2/22/2012	7:12:11 PM	H2 valve closed
2/22/2012	7:12:11 PM	BCl3 valve closed
2/22/2012	7:12:11 PM	PH3 valve closed
2/22/2012	7:12:11 PM	SiCl4 pre valve closed
2/22/2012	7:12:11 PM	SiCl4 post valve closed
2/22/2012	7:12:11 PM	Main Vac valve closed
2/22/2012	7:12:11 PM	Bubbler valve closed
2/22/2012	7:12:11 PM	Bypass valve opened
2/22/2012	7:12:11 PM	Helium MFC set to  0.000000
2/22/2012	7:12:11 PM	H2 MFC set to  0.000000
2/22/2012	7:12:11 PM	BCl3 MFC set to  0.000000
2/22/2012	7:12:11 PM	PH3 MFC set to  0.000000
2/22/2012	7:12:11 PM	SiCl4 MFC set to  0.000000
2/22/2012	7:12:11 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	7:12:11 PM	Tube furnace set to 0
2/22/2012	7:13:11 PM	Helium valve closed
2/22/2012	7:13:11 PM	H2 valve closed
2/22/2012	7:13:11 PM	BCl3 valve closed
2/22/2012	7:13:11 PM	PH3 valve closed
2/22/2012	7:13:11 PM	SiCl4 pre valve closed
2/22/2012	7:13:11 PM	SiCl4 post valve closed
2/22/2012	7:13:11 PM	Bypass valve closed
2/22/2012	7:13:11 PM	Bubbler valve closed
2/22/2012	7:13:11 PM	Main Vac valve opened
2/22/2012	7:13:11 PM	Helium MFC set to  0.000000
2/22/2012	7:13:11 PM	H2 MFC set to  0.000000
2/22/2012	7:13:11 PM	BCl3 MFC set to  0.000000
2/22/2012	7:13:11 PM	PH3 MFC set to  0.000000
2/22/2012	7:13:11 PM	SiCl4 MFC set to  0.000000
2/22/2012	7:13:11 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	7:13:12 PM	Tube furnace set to 0
2/22/2012	7:13:13 PM	Run finished at 7:13 PM
2/22/2012	7:13:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/22/2012	7:14:37 PM	Recipe started at 7:14 PM
2/22/2012	7:14:37 PM	Helium valve closed
2/22/2012	7:14:37 PM	H2 valve closed
2/22/2012	7:14:37 PM	BCl3 valve closed
2/22/2012	7:14:37 PM	PH3 valve closed
2/22/2012	7:14:37 PM	SiCl4 pre valve closed
2/22/2012	7:14:37 PM	SiCl4 post valve closed
2/22/2012	7:14:37 PM	Bypass valve closed
2/22/2012	7:14:37 PM	Bubbler valve closed
2/22/2012	7:14:37 PM	Main Vac valve opened
2/22/2012	7:14:37 PM	Helium MFC set to  0.000000
2/22/2012	7:14:37 PM	H2 MFC set to  0.000000
2/22/2012	7:14:37 PM	BCl3 MFC set to  0.000000
2/22/2012	7:14:37 PM	PH3 MFC set to  0.000000
2/22/2012	7:14:37 PM	SiCl4 MFC set to  0.000000
2/22/2012	7:14:37 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	7:14:37 PM	Tube furnace set to 0
2/22/2012	7:15:07 PM	H2 valve closed
2/22/2012	7:15:07 PM	BCl3 valve closed
2/22/2012	7:15:07 PM	PH3 valve closed
2/22/2012	7:15:07 PM	SiCl4 pre valve closed
2/22/2012	7:15:07 PM	SiCl4 post valve closed
2/22/2012	7:15:07 PM	Bypass valve closed
2/22/2012	7:15:07 PM	Bubbler valve closed
2/22/2012	7:15:07 PM	Helium valve opened
2/22/2012	7:15:07 PM	Main Vac valve opened
2/22/2012	7:15:07 PM	Helium MFC set to  20.000000
2/22/2012	7:15:07 PM	H2 MFC set to  0.000000
2/22/2012	7:15:07 PM	BCl3 MFC set to  0.000000
2/22/2012	7:15:07 PM	PH3 MFC set to  0.000000
2/22/2012	7:15:07 PM	SiCl4 MFC set to  0.000000
2/22/2012	7:15:07 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	7:15:07 PM	Tube furnace set to 0
2/22/2012	7:15:37 PM	Helium valve closed
2/22/2012	7:15:37 PM	H2 valve closed
2/22/2012	7:15:37 PM	BCl3 valve closed
2/22/2012	7:15:37 PM	PH3 valve closed
2/22/2012	7:15:37 PM	SiCl4 pre valve closed
2/22/2012	7:15:37 PM	SiCl4 post valve closed
2/22/2012	7:15:37 PM	Bypass valve closed
2/22/2012	7:15:37 PM	Bubbler valve closed
2/22/2012	7:15:37 PM	Main Vac valve opened
2/22/2012	7:15:37 PM	Helium MFC set to  0.000000
2/22/2012	7:15:37 PM	H2 MFC set to  0.000000
2/22/2012	7:15:37 PM	BCl3 MFC set to  0.000000
2/22/2012	7:15:37 PM	PH3 MFC set to  0.000000
2/22/2012	7:15:37 PM	SiCl4 MFC set to  0.000000
2/22/2012	7:15:37 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	7:15:37 PM	Tube furnace set to 0
2/22/2012	7:16:07 PM	H2 valve closed
2/22/2012	7:16:07 PM	BCl3 valve closed
2/22/2012	7:16:07 PM	PH3 valve closed
2/22/2012	7:16:07 PM	SiCl4 pre valve closed
2/22/2012	7:16:07 PM	SiCl4 post valve closed
2/22/2012	7:16:07 PM	Bypass valve closed
2/22/2012	7:16:07 PM	Bubbler valve closed
2/22/2012	7:16:07 PM	Helium valve opened
2/22/2012	7:16:07 PM	Main Vac valve opened
2/22/2012	7:16:07 PM	Helium MFC set to  20.000000
2/22/2012	7:16:07 PM	H2 MFC set to  0.000000
2/22/2012	7:16:07 PM	BCl3 MFC set to  0.000000
2/22/2012	7:16:07 PM	PH3 MFC set to  0.000000
2/22/2012	7:16:07 PM	SiCl4 MFC set to  0.000000
2/22/2012	7:16:07 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	7:16:07 PM	Tube furnace set to 0
2/22/2012	7:16:38 PM	Helium valve closed
2/22/2012	7:16:38 PM	H2 valve closed
2/22/2012	7:16:38 PM	BCl3 valve closed
2/22/2012	7:16:38 PM	PH3 valve closed
2/22/2012	7:16:38 PM	SiCl4 pre valve closed
2/22/2012	7:16:38 PM	SiCl4 post valve closed
2/22/2012	7:16:38 PM	Bypass valve closed
2/22/2012	7:16:38 PM	Bubbler valve closed
2/22/2012	7:16:38 PM	Main Vac valve opened
2/22/2012	7:16:38 PM	Helium MFC set to  0.000000
2/22/2012	7:16:38 PM	H2 MFC set to  0.000000
2/22/2012	7:16:38 PM	BCl3 MFC set to  0.000000
2/22/2012	7:16:38 PM	PH3 MFC set to  0.000000
2/22/2012	7:16:38 PM	SiCl4 MFC set to  0.000000
2/22/2012	7:16:38 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	7:16:38 PM	Tube furnace set to 0
2/22/2012	7:17:08 PM	H2 valve closed
2/22/2012	7:17:08 PM	BCl3 valve closed
2/22/2012	7:17:08 PM	PH3 valve closed
2/22/2012	7:17:08 PM	SiCl4 pre valve closed
2/22/2012	7:17:08 PM	SiCl4 post valve closed
2/22/2012	7:17:08 PM	Bypass valve closed
2/22/2012	7:17:08 PM	Bubbler valve closed
2/22/2012	7:17:08 PM	Helium valve opened
2/22/2012	7:17:08 PM	Main Vac valve opened
2/22/2012	7:17:08 PM	Helium MFC set to  20.000000
2/22/2012	7:17:08 PM	H2 MFC set to  0.000000
2/22/2012	7:17:08 PM	BCl3 MFC set to  0.000000
2/22/2012	7:17:08 PM	PH3 MFC set to  0.000000
2/22/2012	7:17:08 PM	SiCl4 MFC set to  0.000000
2/22/2012	7:17:08 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	7:17:08 PM	Tube furnace set to 0
2/22/2012	7:17:38 PM	Helium valve closed
2/22/2012	7:17:38 PM	H2 valve closed
2/22/2012	7:17:38 PM	BCl3 valve closed
2/22/2012	7:17:38 PM	PH3 valve closed
2/22/2012	7:17:38 PM	SiCl4 pre valve closed
2/22/2012	7:17:38 PM	SiCl4 post valve closed
2/22/2012	7:17:38 PM	Bypass valve closed
2/22/2012	7:17:38 PM	Bubbler valve closed
2/22/2012	7:17:38 PM	Main Vac valve opened
2/22/2012	7:17:38 PM	Helium MFC set to  0.000000
2/22/2012	7:17:38 PM	H2 MFC set to  0.000000
2/22/2012	7:17:38 PM	BCl3 MFC set to  0.000000
2/22/2012	7:17:38 PM	PH3 MFC set to  0.000000
2/22/2012	7:17:38 PM	SiCl4 MFC set to  0.000000
2/22/2012	7:17:38 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	7:17:38 PM	Tube furnace set to 0
2/22/2012	7:18:08 PM	H2 valve closed
2/22/2012	7:18:08 PM	BCl3 valve closed
2/22/2012	7:18:08 PM	PH3 valve closed
2/22/2012	7:18:08 PM	SiCl4 pre valve closed
2/22/2012	7:18:08 PM	SiCl4 post valve closed
2/22/2012	7:18:08 PM	Bypass valve closed
2/22/2012	7:18:08 PM	Bubbler valve closed
2/22/2012	7:18:08 PM	Helium valve opened
2/22/2012	7:18:08 PM	Main Vac valve opened
2/22/2012	7:18:08 PM	Helium MFC set to  20.000000
2/22/2012	7:18:08 PM	H2 MFC set to  0.000000
2/22/2012	7:18:08 PM	BCl3 MFC set to  0.000000
2/22/2012	7:18:08 PM	PH3 MFC set to  0.000000
2/22/2012	7:18:08 PM	SiCl4 MFC set to  0.000000
2/22/2012	7:18:08 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	7:18:08 PM	Tube furnace set to 0
2/22/2012	7:18:38 PM	Helium valve closed
2/22/2012	7:18:38 PM	H2 valve closed
2/22/2012	7:18:38 PM	BCl3 valve closed
2/22/2012	7:18:38 PM	PH3 valve closed
2/22/2012	7:18:38 PM	SiCl4 pre valve closed
2/22/2012	7:18:38 PM	SiCl4 post valve closed
2/22/2012	7:18:38 PM	Bypass valve closed
2/22/2012	7:18:38 PM	Bubbler valve closed
2/22/2012	7:18:38 PM	Main Vac valve opened
2/22/2012	7:18:38 PM	Helium MFC set to  0.000000
2/22/2012	7:18:38 PM	H2 MFC set to  0.000000
2/22/2012	7:18:38 PM	BCl3 MFC set to  0.000000
2/22/2012	7:18:38 PM	PH3 MFC set to  0.000000
2/22/2012	7:18:38 PM	SiCl4 MFC set to  0.000000
2/22/2012	7:18:38 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	7:18:39 PM	Tube furnace set to 0
2/22/2012	7:19:09 PM	H2 valve closed
2/22/2012	7:19:09 PM	BCl3 valve closed
2/22/2012	7:19:09 PM	PH3 valve closed
2/22/2012	7:19:09 PM	SiCl4 pre valve closed
2/22/2012	7:19:09 PM	SiCl4 post valve closed
2/22/2012	7:19:09 PM	Bypass valve closed
2/22/2012	7:19:09 PM	Bubbler valve closed
2/22/2012	7:19:09 PM	Helium valve opened
2/22/2012	7:19:09 PM	Main Vac valve opened
2/22/2012	7:19:09 PM	Helium MFC set to  20.000000
2/22/2012	7:19:09 PM	H2 MFC set to  0.000000
2/22/2012	7:19:09 PM	BCl3 MFC set to  0.000000
2/22/2012	7:19:09 PM	PH3 MFC set to  0.000000
2/22/2012	7:19:09 PM	SiCl4 MFC set to  0.000000
2/22/2012	7:19:09 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	7:19:09 PM	Tube furnace set to 0
2/22/2012	7:19:39 PM	Helium valve closed
2/22/2012	7:19:39 PM	H2 valve closed
2/22/2012	7:19:39 PM	BCl3 valve closed
2/22/2012	7:19:39 PM	PH3 valve closed
2/22/2012	7:19:39 PM	SiCl4 pre valve closed
2/22/2012	7:19:39 PM	SiCl4 post valve closed
2/22/2012	7:19:39 PM	Bypass valve closed
2/22/2012	7:19:39 PM	Bubbler valve closed
2/22/2012	7:19:39 PM	Main Vac valve opened
2/22/2012	7:19:39 PM	Helium MFC set to  0.000000
2/22/2012	7:19:39 PM	H2 MFC set to  0.000000
2/22/2012	7:19:39 PM	BCl3 MFC set to  0.000000
2/22/2012	7:19:39 PM	PH3 MFC set to  0.000000
2/22/2012	7:19:39 PM	SiCl4 MFC set to  0.000000
2/22/2012	7:19:39 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	7:19:39 PM	Tube furnace set to 0
2/22/2012	7:20:09 PM	H2 valve closed
2/22/2012	7:20:09 PM	BCl3 valve closed
2/22/2012	7:20:09 PM	PH3 valve closed
2/22/2012	7:20:09 PM	SiCl4 pre valve closed
2/22/2012	7:20:09 PM	SiCl4 post valve closed
2/22/2012	7:20:09 PM	Bypass valve closed
2/22/2012	7:20:09 PM	Bubbler valve closed
2/22/2012	7:20:09 PM	Helium valve opened
2/22/2012	7:20:09 PM	Main Vac valve opened
2/22/2012	7:20:09 PM	Helium MFC set to  20.000000
2/22/2012	7:20:09 PM	H2 MFC set to  0.000000
2/22/2012	7:20:09 PM	BCl3 MFC set to  0.000000
2/22/2012	7:20:09 PM	PH3 MFC set to  0.000000
2/22/2012	7:20:09 PM	SiCl4 MFC set to  0.000000
2/22/2012	7:20:09 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	7:20:09 PM	Tube furnace set to 0
2/22/2012	7:20:39 PM	Helium valve closed
2/22/2012	7:20:39 PM	H2 valve closed
2/22/2012	7:20:39 PM	BCl3 valve closed
2/22/2012	7:20:39 PM	PH3 valve closed
2/22/2012	7:20:39 PM	SiCl4 pre valve closed
2/22/2012	7:20:39 PM	SiCl4 post valve closed
2/22/2012	7:20:39 PM	Bypass valve closed
2/22/2012	7:20:39 PM	Bubbler valve closed
2/22/2012	7:20:39 PM	Main Vac valve opened
2/22/2012	7:20:39 PM	Helium MFC set to  0.000000
2/22/2012	7:20:39 PM	H2 MFC set to  0.000000
2/22/2012	7:20:39 PM	BCl3 MFC set to  0.000000
2/22/2012	7:20:39 PM	PH3 MFC set to  0.000000
2/22/2012	7:20:39 PM	SiCl4 MFC set to  0.000000
2/22/2012	7:20:39 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	7:20:39 PM	Tube furnace set to 0
2/22/2012	7:21:09 PM	H2 valve closed
2/22/2012	7:21:09 PM	BCl3 valve closed
2/22/2012	7:21:09 PM	PH3 valve closed
2/22/2012	7:21:09 PM	SiCl4 pre valve closed
2/22/2012	7:21:09 PM	SiCl4 post valve closed
2/22/2012	7:21:09 PM	Bypass valve closed
2/22/2012	7:21:09 PM	Bubbler valve closed
2/22/2012	7:21:09 PM	Helium valve opened
2/22/2012	7:21:09 PM	Main Vac valve opened
2/22/2012	7:21:09 PM	Helium MFC set to  20.000000
2/22/2012	7:21:09 PM	H2 MFC set to  0.000000
2/22/2012	7:21:09 PM	BCl3 MFC set to  0.000000
2/22/2012	7:21:09 PM	PH3 MFC set to  0.000000
2/22/2012	7:21:09 PM	SiCl4 MFC set to  0.000000
2/22/2012	7:21:09 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	7:21:10 PM	Tube furnace set to 0
2/22/2012	7:21:40 PM	Helium valve closed
2/22/2012	7:21:40 PM	H2 valve closed
2/22/2012	7:21:40 PM	BCl3 valve closed
2/22/2012	7:21:40 PM	PH3 valve closed
2/22/2012	7:21:40 PM	SiCl4 pre valve closed
2/22/2012	7:21:40 PM	SiCl4 post valve closed
2/22/2012	7:21:40 PM	Bypass valve closed
2/22/2012	7:21:40 PM	Bubbler valve closed
2/22/2012	7:21:40 PM	Main Vac valve opened
2/22/2012	7:21:40 PM	Helium MFC set to  0.000000
2/22/2012	7:21:40 PM	H2 MFC set to  0.000000
2/22/2012	7:21:40 PM	BCl3 MFC set to  0.000000
2/22/2012	7:21:40 PM	PH3 MFC set to  0.000000
2/22/2012	7:21:40 PM	SiCl4 MFC set to  0.000000
2/22/2012	7:21:40 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	7:21:40 PM	Tube furnace set to 0
2/22/2012	7:22:10 PM	H2 valve closed
2/22/2012	7:22:10 PM	BCl3 valve closed
2/22/2012	7:22:10 PM	PH3 valve closed
2/22/2012	7:22:10 PM	SiCl4 pre valve closed
2/22/2012	7:22:10 PM	SiCl4 post valve closed
2/22/2012	7:22:10 PM	Bypass valve closed
2/22/2012	7:22:10 PM	Bubbler valve closed
2/22/2012	7:22:10 PM	Helium valve opened
2/22/2012	7:22:10 PM	Main Vac valve opened
2/22/2012	7:22:10 PM	Helium MFC set to  20.000000
2/22/2012	7:22:10 PM	H2 MFC set to  0.000000
2/22/2012	7:22:10 PM	BCl3 MFC set to  0.000000
2/22/2012	7:22:10 PM	PH3 MFC set to  0.000000
2/22/2012	7:22:10 PM	SiCl4 MFC set to  0.000000
2/22/2012	7:22:10 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	7:22:10 PM	Tube furnace set to 0
2/22/2012	7:22:40 PM	Helium valve closed
2/22/2012	7:22:40 PM	H2 valve closed
2/22/2012	7:22:40 PM	BCl3 valve closed
2/22/2012	7:22:40 PM	PH3 valve closed
2/22/2012	7:22:40 PM	SiCl4 pre valve closed
2/22/2012	7:22:40 PM	SiCl4 post valve closed
2/22/2012	7:22:40 PM	Bypass valve closed
2/22/2012	7:22:40 PM	Bubbler valve closed
2/22/2012	7:22:40 PM	Main Vac valve opened
2/22/2012	7:22:40 PM	Helium MFC set to  0.000000
2/22/2012	7:22:40 PM	H2 MFC set to  0.000000
2/22/2012	7:22:40 PM	BCl3 MFC set to  0.000000
2/22/2012	7:22:40 PM	PH3 MFC set to  0.000000
2/22/2012	7:22:40 PM	SiCl4 MFC set to  0.000000
2/22/2012	7:22:40 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	7:22:40 PM	Tube furnace set to 0
2/22/2012	7:23:09 PM	H2 valve closed
2/22/2012	7:23:09 PM	BCl3 valve closed
2/22/2012	7:23:09 PM	PH3 valve closed
2/22/2012	7:23:09 PM	SiCl4 pre valve closed
2/22/2012	7:23:09 PM	SiCl4 post valve closed
2/22/2012	7:23:09 PM	Bypass valve closed
2/22/2012	7:23:09 PM	Bubbler valve closed
2/22/2012	7:23:09 PM	Helium valve opened
2/22/2012	7:23:09 PM	Main Vac valve opened
2/22/2012	7:23:09 PM	Helium MFC set to  20.000000
2/22/2012	7:23:09 PM	H2 MFC set to  0.000000
2/22/2012	7:23:09 PM	BCl3 MFC set to  0.000000
2/22/2012	7:23:09 PM	PH3 MFC set to  0.000000
2/22/2012	7:23:09 PM	SiCl4 MFC set to  0.000000
2/22/2012	7:23:09 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	7:23:09 PM	Tube furnace set to 0
2/22/2012	7:23:25 PM	Helium valve closed
2/22/2012	7:23:25 PM	H2 valve closed
2/22/2012	7:23:25 PM	BCl3 valve closed
2/22/2012	7:23:25 PM	PH3 valve closed
2/22/2012	7:23:25 PM	SiCl4 pre valve closed
2/22/2012	7:23:25 PM	SiCl4 post valve closed
2/22/2012	7:23:25 PM	Bypass valve closed
2/22/2012	7:23:25 PM	Bubbler valve closed
2/22/2012	7:23:25 PM	Main Vac valve opened
2/22/2012	7:23:25 PM	Helium MFC set to  0.000000
2/22/2012	7:23:25 PM	H2 MFC set to  0.000000
2/22/2012	7:23:25 PM	BCl3 MFC set to  0.000000
2/22/2012	7:23:25 PM	PH3 MFC set to  0.000000
2/22/2012	7:23:25 PM	SiCl4 MFC set to  0.000000
2/22/2012	7:23:25 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	7:23:25 PM	Tube furnace set to 200
2/22/2012	7:23:42 PM	H2 valve closed
2/22/2012	7:23:42 PM	BCl3 valve closed
2/22/2012	7:23:42 PM	PH3 valve closed
2/22/2012	7:23:42 PM	SiCl4 pre valve closed
2/22/2012	7:23:42 PM	SiCl4 post valve closed
2/22/2012	7:23:42 PM	Bypass valve closed
2/22/2012	7:23:42 PM	Bubbler valve closed
2/22/2012	7:23:42 PM	Helium valve opened
2/22/2012	7:23:42 PM	Main Vac valve opened
2/22/2012	7:23:42 PM	Helium MFC set to  20.000000
2/22/2012	7:23:42 PM	H2 MFC set to  0.000000
2/22/2012	7:23:42 PM	BCl3 MFC set to  0.000000
2/22/2012	7:23:42 PM	PH3 MFC set to  0.000000
2/22/2012	7:23:42 PM	SiCl4 MFC set to  0.000000
2/22/2012	7:23:42 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	7:23:42 PM	Tube furnace set to 200
2/22/2012	7:23:58 PM	Helium valve closed
2/22/2012	7:23:58 PM	H2 valve closed
2/22/2012	7:23:58 PM	BCl3 valve closed
2/22/2012	7:23:58 PM	PH3 valve closed
2/22/2012	7:23:58 PM	SiCl4 pre valve closed
2/22/2012	7:23:58 PM	SiCl4 post valve closed
2/22/2012	7:23:58 PM	Bypass valve closed
2/22/2012	7:23:58 PM	Bubbler valve closed
2/22/2012	7:23:58 PM	Main Vac valve opened
2/22/2012	7:23:58 PM	Helium MFC set to  0.000000
2/22/2012	7:23:58 PM	H2 MFC set to  0.000000
2/22/2012	7:23:58 PM	BCl3 MFC set to  0.000000
2/22/2012	7:23:58 PM	PH3 MFC set to  0.000000
2/22/2012	7:23:58 PM	SiCl4 MFC set to  0.000000
2/22/2012	7:23:58 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	7:23:58 PM	Tube furnace set to 200
2/22/2012	7:24:17 PM	H2 valve closed
2/22/2012	7:24:17 PM	BCl3 valve closed
2/22/2012	7:24:17 PM	PH3 valve closed
2/22/2012	7:24:17 PM	SiCl4 pre valve closed
2/22/2012	7:24:17 PM	SiCl4 post valve closed
2/22/2012	7:24:17 PM	Bypass valve closed
2/22/2012	7:24:17 PM	Bubbler valve closed
2/22/2012	7:24:17 PM	Helium valve opened
2/22/2012	7:24:17 PM	Main Vac valve opened
2/22/2012	7:24:17 PM	Helium MFC set to  20.000000
2/22/2012	7:24:17 PM	H2 MFC set to  0.000000
2/22/2012	7:24:17 PM	BCl3 MFC set to  0.000000
2/22/2012	7:24:17 PM	PH3 MFC set to  0.000000
2/22/2012	7:24:17 PM	SiCl4 MFC set to  0.000000
2/22/2012	7:24:17 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	7:24:17 PM	Tube furnace set to 200
2/22/2012	7:24:43 PM	Helium valve closed
2/22/2012	7:24:43 PM	H2 valve closed
2/22/2012	7:24:43 PM	BCl3 valve closed
2/22/2012	7:24:43 PM	PH3 valve closed
2/22/2012	7:24:43 PM	SiCl4 pre valve closed
2/22/2012	7:24:43 PM	SiCl4 post valve closed
2/22/2012	7:24:43 PM	Bypass valve closed
2/22/2012	7:24:43 PM	Bubbler valve closed
2/22/2012	7:24:43 PM	Main Vac valve opened
2/22/2012	7:24:43 PM	Helium MFC set to  0.000000
2/22/2012	7:24:43 PM	H2 MFC set to  0.000000
2/22/2012	7:24:43 PM	BCl3 MFC set to  0.000000
2/22/2012	7:24:43 PM	PH3 MFC set to  0.000000
2/22/2012	7:24:43 PM	SiCl4 MFC set to  0.000000
2/22/2012	7:24:43 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	7:24:43 PM	Tube furnace set to 200
2/22/2012	7:25:00 PM	Run aborted at 7:25 PM
2/22/2012	7:25:00 PM	Helium valve closed
2/22/2012	7:25:00 PM	H2 valve closed
2/22/2012	7:25:00 PM	BCl3 valve closed
2/22/2012	7:25:00 PM	PH3 valve closed
2/22/2012	7:25:00 PM	SiCl4 pre valve closed
2/22/2012	7:25:00 PM	SiCl4 post valve closed
2/22/2012	7:25:00 PM	Bypass valve closed
2/22/2012	7:25:00 PM	Main Vac valve closed
2/22/2012	7:25:00 PM	Bubbler valve closed
2/22/2012	7:25:00 PM	Helium MFC set to  0.000000
2/22/2012	7:25:00 PM	H2 MFC set to  0.000000
2/22/2012	7:25:00 PM	BCl3 MFC set to  0.000000
2/22/2012	7:25:00 PM	PH3 MFC set to  0.000000
2/22/2012	7:25:00 PM	SiCl4 MFC set to  0.000000
2/22/2012	7:25:00 PM	Tube furnace set to 0
2/22/2012	7:25:08 PM	Main Vac valve opened
2/22/2012	7:25:48 PM	Recipe started at 7:25 PM
2/22/2012	7:25:48 PM	Helium valve closed
2/22/2012	7:25:48 PM	H2 valve closed
2/22/2012	7:25:48 PM	BCl3 valve closed
2/22/2012	7:25:48 PM	PH3 valve closed
2/22/2012	7:25:48 PM	SiCl4 pre valve closed
2/22/2012	7:25:48 PM	SiCl4 post valve closed
2/22/2012	7:25:48 PM	Main Vac valve closed
2/22/2012	7:25:48 PM	Bypass valve closed
2/22/2012	7:25:48 PM	Bubbler valve closed
2/22/2012	7:25:48 PM	Helium MFC set to  0.000000
2/22/2012	7:25:48 PM	H2 MFC set to  0.000000
2/22/2012	7:25:48 PM	BCl3 MFC set to  0.000000
2/22/2012	7:25:48 PM	PH3 MFC set to  0.000000
2/22/2012	7:25:48 PM	SiCl4 MFC set to  0.000000
2/22/2012	7:25:48 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	7:25:49 PM	Tube furnace set to 0
2/22/2012	7:25:52 PM	Helium valve closed
2/22/2012	7:25:52 PM	BCl3 valve closed
2/22/2012	7:25:52 PM	PH3 valve closed
2/22/2012	7:25:52 PM	SiCl4 pre valve closed
2/22/2012	7:25:52 PM	SiCl4 post valve closed
2/22/2012	7:25:52 PM	Main Vac valve closed
2/22/2012	7:25:52 PM	Bypass valve closed
2/22/2012	7:25:52 PM	Bubbler valve closed
2/22/2012	7:25:52 PM	H2 valve opened
2/22/2012	7:25:52 PM	Helium MFC set to  0.000000
2/22/2012	7:25:52 PM	H2 MFC set to  500.000000
2/22/2012	7:25:52 PM	BCl3 MFC set to  0.000000
2/22/2012	7:25:52 PM	PH3 MFC set to  0.000000
2/22/2012	7:25:52 PM	SiCl4 MFC set to  0.000000
2/22/2012	7:25:52 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	7:25:52 PM	Tube furnace set to 0
2/22/2012	7:26:56 PM	Helium valve closed
2/22/2012	7:26:56 PM	BCl3 valve closed
2/22/2012	7:26:56 PM	PH3 valve closed
2/22/2012	7:26:56 PM	SiCl4 pre valve closed
2/22/2012	7:26:56 PM	SiCl4 post valve closed
2/22/2012	7:26:56 PM	Main Vac valve closed
2/22/2012	7:26:56 PM	Bypass valve closed
2/22/2012	7:26:56 PM	H2 valve opened
2/22/2012	7:26:56 PM	Bubbler valve opened
2/22/2012	7:26:56 PM	Helium MFC set to  0.000000
2/22/2012	7:26:56 PM	H2 MFC set to  500.000000
2/22/2012	7:26:56 PM	BCl3 MFC set to  0.000000
2/22/2012	7:26:56 PM	PH3 MFC set to  0.000000
2/22/2012	7:26:56 PM	SiCl4 MFC set to  0.000000
2/22/2012	7:26:56 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	7:26:56 PM	Tube furnace set to 0
2/22/2012	7:26:57 PM	Helium valve closed
2/22/2012	7:26:57 PM	BCl3 valve closed
2/22/2012	7:26:57 PM	PH3 valve closed
2/22/2012	7:26:57 PM	SiCl4 pre valve closed
2/22/2012	7:26:57 PM	SiCl4 post valve closed
2/22/2012	7:26:57 PM	Main Vac valve closed
2/22/2012	7:26:57 PM	Bypass valve closed
2/22/2012	7:26:57 PM	H2 valve opened
2/22/2012	7:26:57 PM	Bubbler valve opened
2/22/2012	7:26:57 PM	Helium MFC set to  0.000000
2/22/2012	7:26:57 PM	H2 MFC set to  500.000000
2/22/2012	7:26:57 PM	BCl3 MFC set to  0.000000
2/22/2012	7:26:57 PM	PH3 MFC set to  0.000000
2/22/2012	7:26:57 PM	SiCl4 MFC set to  0.000000
2/22/2012	7:26:57 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	7:26:57 PM	Tube furnace set to 1000
2/22/2012	7:46:57 PM	Helium valve closed
2/22/2012	7:46:57 PM	PH3 valve closed
2/22/2012	7:46:57 PM	Main Vac valve closed
2/22/2012	7:46:57 PM	Bypass valve closed
2/22/2012	7:46:57 PM	H2 valve opened
2/22/2012	7:46:57 PM	BCl3 valve opened
2/22/2012	7:46:57 PM	SiCl4 pre valve opened
2/22/2012	7:46:57 PM	SiCl4 post valve opened
2/22/2012	7:46:57 PM	Bubbler valve opened
2/22/2012	7:46:57 PM	Helium MFC set to  0.000000
2/22/2012	7:46:57 PM	H2 MFC set to  450.000000
2/22/2012	7:46:57 PM	BCl3 MFC set to  1.500000
2/22/2012	7:46:57 PM	PH3 MFC set to  0.000000
2/22/2012	7:46:57 PM	SiCl4 MFC set to  50.000000
2/22/2012	7:46:57 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	7:46:57 PM	Tube furnace set to 1000
2/22/2012	7:59:57 PM	Helium valve closed
2/22/2012	7:59:57 PM	BCl3 valve closed
2/22/2012	7:59:57 PM	Main Vac valve closed
2/22/2012	7:59:57 PM	Bypass valve closed
2/22/2012	7:59:57 PM	H2 valve opened
2/22/2012	7:59:57 PM	PH3 valve opened
2/22/2012	7:59:57 PM	SiCl4 pre valve opened
2/22/2012	7:59:57 PM	SiCl4 post valve opened
2/22/2012	7:59:57 PM	Bubbler valve opened
2/22/2012	7:59:57 PM	Helium MFC set to  0.000000
2/22/2012	7:59:57 PM	H2 MFC set to  450.000000
2/22/2012	7:59:57 PM	BCl3 MFC set to  0.000000
2/22/2012	7:59:57 PM	PH3 MFC set to  20.000000
2/22/2012	7:59:57 PM	SiCl4 MFC set to  50.000000
2/22/2012	7:59:57 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	7:59:58 PM	Tube furnace set to 1000
2/22/2012	8:05:58 PM	Helium valve closed
2/22/2012	8:05:58 PM	BCl3 valve closed
2/22/2012	8:05:58 PM	PH3 valve closed
2/22/2012	8:05:58 PM	SiCl4 pre valve closed
2/22/2012	8:05:58 PM	SiCl4 post valve closed
2/22/2012	8:05:58 PM	Main Vac valve closed
2/22/2012	8:05:58 PM	Bypass valve closed
2/22/2012	8:05:58 PM	H2 valve opened
2/22/2012	8:05:58 PM	Bubbler valve opened
2/22/2012	8:05:58 PM	Helium MFC set to  0.000000
2/22/2012	8:05:58 PM	H2 MFC set to  500.000000
2/22/2012	8:05:58 PM	BCl3 MFC set to  0.000000
2/22/2012	8:05:58 PM	PH3 MFC set to  0.000000
2/22/2012	8:05:58 PM	SiCl4 MFC set to  0.000000
2/22/2012	8:05:58 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	8:05:58 PM	Tube furnace set to 950
2/22/2012	8:07:58 PM	Helium valve closed
2/22/2012	8:07:58 PM	BCl3 valve closed
2/22/2012	8:07:58 PM	PH3 valve closed
2/22/2012	8:07:58 PM	SiCl4 pre valve closed
2/22/2012	8:07:58 PM	SiCl4 post valve closed
2/22/2012	8:07:58 PM	Main Vac valve closed
2/22/2012	8:07:58 PM	Bypass valve closed
2/22/2012	8:07:58 PM	H2 valve opened
2/22/2012	8:07:58 PM	Bubbler valve opened
2/22/2012	8:07:58 PM	Helium MFC set to  0.000000
2/22/2012	8:07:58 PM	H2 MFC set to  500.000000
2/22/2012	8:07:58 PM	BCl3 MFC set to  0.000000
2/22/2012	8:07:58 PM	PH3 MFC set to  0.000000
2/22/2012	8:07:58 PM	SiCl4 MFC set to  0.000000
2/22/2012	8:07:58 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	8:07:58 PM	Tube furnace set to 900
2/22/2012	8:09:58 PM	Helium valve closed
2/22/2012	8:09:58 PM	BCl3 valve closed
2/22/2012	8:09:58 PM	PH3 valve closed
2/22/2012	8:09:58 PM	SiCl4 pre valve closed
2/22/2012	8:09:58 PM	SiCl4 post valve closed
2/22/2012	8:09:58 PM	Main Vac valve closed
2/22/2012	8:09:58 PM	Bypass valve closed
2/22/2012	8:09:58 PM	H2 valve opened
2/22/2012	8:09:58 PM	Bubbler valve opened
2/22/2012	8:09:58 PM	Helium MFC set to  0.000000
2/22/2012	8:09:58 PM	H2 MFC set to  500.000000
2/22/2012	8:09:58 PM	BCl3 MFC set to  0.000000
2/22/2012	8:09:58 PM	PH3 MFC set to  0.000000
2/22/2012	8:09:58 PM	SiCl4 MFC set to  0.000000
2/22/2012	8:09:58 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	8:09:58 PM	Tube furnace set to 850
2/22/2012	8:11:58 PM	H2 valve closed
2/22/2012	8:11:58 PM	BCl3 valve closed
2/22/2012	8:11:58 PM	PH3 valve closed
2/22/2012	8:11:58 PM	SiCl4 pre valve closed
2/22/2012	8:11:58 PM	SiCl4 post valve closed
2/22/2012	8:11:58 PM	Main Vac valve closed
2/22/2012	8:11:58 PM	Bypass valve closed
2/22/2012	8:11:58 PM	Helium valve opened
2/22/2012	8:11:58 PM	Bubbler valve opened
2/22/2012	8:11:58 PM	Helium MFC set to  500.000000
2/22/2012	8:11:58 PM	H2 MFC set to  0.000000
2/22/2012	8:11:58 PM	BCl3 MFC set to  0.000000
2/22/2012	8:11:58 PM	PH3 MFC set to  0.000000
2/22/2012	8:11:58 PM	SiCl4 MFC set to  0.000000
2/22/2012	8:11:58 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	8:11:58 PM	Tube furnace set to 800
2/22/2012	8:13:58 PM	H2 valve closed
2/22/2012	8:13:58 PM	BCl3 valve closed
2/22/2012	8:13:58 PM	PH3 valve closed
2/22/2012	8:13:58 PM	SiCl4 pre valve closed
2/22/2012	8:13:58 PM	SiCl4 post valve closed
2/22/2012	8:13:58 PM	Main Vac valve closed
2/22/2012	8:13:58 PM	Bypass valve closed
2/22/2012	8:13:58 PM	Helium valve opened
2/22/2012	8:13:58 PM	Bubbler valve opened
2/22/2012	8:13:58 PM	Helium MFC set to  500.000000
2/22/2012	8:13:58 PM	H2 MFC set to  0.000000
2/22/2012	8:13:58 PM	BCl3 MFC set to  0.000000
2/22/2012	8:13:58 PM	PH3 MFC set to  0.000000
2/22/2012	8:13:58 PM	SiCl4 MFC set to  0.000000
2/22/2012	8:13:58 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	8:13:59 PM	Tube furnace set to 750
2/22/2012	8:15:59 PM	H2 valve closed
2/22/2012	8:15:59 PM	BCl3 valve closed
2/22/2012	8:15:59 PM	PH3 valve closed
2/22/2012	8:15:59 PM	SiCl4 pre valve closed
2/22/2012	8:15:59 PM	SiCl4 post valve closed
2/22/2012	8:15:59 PM	Main Vac valve closed
2/22/2012	8:15:59 PM	Bypass valve closed
2/22/2012	8:15:59 PM	Helium valve opened
2/22/2012	8:15:59 PM	Bubbler valve opened
2/22/2012	8:15:59 PM	Helium MFC set to  500.000000
2/22/2012	8:15:59 PM	H2 MFC set to  0.000000
2/22/2012	8:15:59 PM	BCl3 MFC set to  0.000000
2/22/2012	8:15:59 PM	PH3 MFC set to  0.000000
2/22/2012	8:15:59 PM	SiCl4 MFC set to  0.000000
2/22/2012	8:15:59 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	8:15:59 PM	Tube furnace set to 0
2/22/2012	8:35:59 PM	Helium valve closed
2/22/2012	8:35:59 PM	H2 valve closed
2/22/2012	8:35:59 PM	BCl3 valve closed
2/22/2012	8:35:59 PM	PH3 valve closed
2/22/2012	8:35:59 PM	SiCl4 pre valve closed
2/22/2012	8:35:59 PM	SiCl4 post valve closed
2/22/2012	8:35:59 PM	Main Vac valve closed
2/22/2012	8:35:59 PM	Bypass valve closed
2/22/2012	8:35:59 PM	Bubbler valve closed
2/22/2012	8:35:59 PM	Helium MFC set to  0.000000
2/22/2012	8:35:59 PM	H2 MFC set to  0.000000
2/22/2012	8:35:59 PM	BCl3 MFC set to  0.000000
2/22/2012	8:35:59 PM	PH3 MFC set to  0.000000
2/22/2012	8:35:59 PM	SiCl4 MFC set to  0.000000
2/22/2012	8:35:59 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	8:35:59 PM	Tube furnace set to 0
2/22/2012	8:36:00 PM	Helium valve closed
2/22/2012	8:36:00 PM	H2 valve closed
2/22/2012	8:36:00 PM	BCl3 valve closed
2/22/2012	8:36:00 PM	PH3 valve closed
2/22/2012	8:36:00 PM	SiCl4 pre valve closed
2/22/2012	8:36:00 PM	SiCl4 post valve closed
2/22/2012	8:36:00 PM	Main Vac valve closed
2/22/2012	8:36:00 PM	Bubbler valve closed
2/22/2012	8:36:00 PM	Bypass valve opened
2/22/2012	8:36:00 PM	Helium MFC set to  0.000000
2/22/2012	8:36:00 PM	H2 MFC set to  0.000000
2/22/2012	8:36:00 PM	BCl3 MFC set to  0.000000
2/22/2012	8:36:00 PM	PH3 MFC set to  0.000000
2/22/2012	8:36:00 PM	SiCl4 MFC set to  0.000000
2/22/2012	8:36:00 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	8:36:00 PM	Tube furnace set to 0
2/22/2012	8:36:47 PM	Helium valve closed
2/22/2012	8:36:47 PM	H2 valve closed
2/22/2012	8:36:47 PM	BCl3 valve closed
2/22/2012	8:36:47 PM	PH3 valve closed
2/22/2012	8:36:47 PM	SiCl4 pre valve closed
2/22/2012	8:36:47 PM	SiCl4 post valve closed
2/22/2012	8:36:47 PM	Main Vac valve closed
2/22/2012	8:36:47 PM	Bubbler valve closed
2/22/2012	8:36:47 PM	Bypass valve opened
2/22/2012	8:36:47 PM	Helium MFC set to  0.000000
2/22/2012	8:36:47 PM	H2 MFC set to  0.000000
2/22/2012	8:36:47 PM	BCl3 MFC set to  0.000000
2/22/2012	8:36:47 PM	PH3 MFC set to  0.000000
2/22/2012	8:36:47 PM	SiCl4 MFC set to  0.000000
2/22/2012	8:36:47 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	8:36:47 PM	Tube furnace set to 0
2/22/2012	8:37:47 PM	Helium valve closed
2/22/2012	8:37:47 PM	H2 valve closed
2/22/2012	8:37:47 PM	BCl3 valve closed
2/22/2012	8:37:47 PM	PH3 valve closed
2/22/2012	8:37:47 PM	SiCl4 pre valve closed
2/22/2012	8:37:47 PM	SiCl4 post valve closed
2/22/2012	8:37:47 PM	Bypass valve closed
2/22/2012	8:37:47 PM	Bubbler valve closed
2/22/2012	8:37:47 PM	Main Vac valve opened
2/22/2012	8:37:47 PM	Helium MFC set to  0.000000
2/22/2012	8:37:47 PM	H2 MFC set to  0.000000
2/22/2012	8:37:47 PM	BCl3 MFC set to  0.000000
2/22/2012	8:37:47 PM	PH3 MFC set to  0.000000
2/22/2012	8:37:47 PM	SiCl4 MFC set to  0.000000
2/22/2012	8:37:47 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	8:37:47 PM	Tube furnace set to 0
2/22/2012	8:37:48 PM	Run finished at 8:37 PM
2/22/2012	9:05:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/22/2012	9:05:59 PM	Recipe started at 9:05 PM
2/22/2012	9:05:59 PM	Helium valve closed
2/22/2012	9:05:59 PM	H2 valve closed
2/22/2012	9:05:59 PM	BCl3 valve closed
2/22/2012	9:05:59 PM	PH3 valve closed
2/22/2012	9:05:59 PM	SiCl4 pre valve closed
2/22/2012	9:05:59 PM	SiCl4 post valve closed
2/22/2012	9:05:59 PM	Main Vac valve closed
2/22/2012	9:05:59 PM	Bypass valve closed
2/22/2012	9:05:59 PM	Bubbler valve closed
2/22/2012	9:05:59 PM	Helium MFC set to  0.000000
2/22/2012	9:05:59 PM	H2 MFC set to  0.000000
2/22/2012	9:05:59 PM	BCl3 MFC set to  0.000000
2/22/2012	9:05:59 PM	PH3 MFC set to  0.000000
2/22/2012	9:05:59 PM	SiCl4 MFC set to  0.000000
2/22/2012	9:05:59 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:05:59 PM	Tube furnace set to 0
2/22/2012	9:06:02 PM	H2 valve closed
2/22/2012	9:06:02 PM	BCl3 valve closed
2/22/2012	9:06:02 PM	PH3 valve closed
2/22/2012	9:06:02 PM	SiCl4 pre valve closed
2/22/2012	9:06:02 PM	SiCl4 post valve closed
2/22/2012	9:06:02 PM	Main Vac valve closed
2/22/2012	9:06:02 PM	Bypass valve closed
2/22/2012	9:06:02 PM	Bubbler valve closed
2/22/2012	9:06:02 PM	Helium valve opened
2/22/2012	9:06:02 PM	Helium MFC set to  500.000000
2/22/2012	9:06:02 PM	H2 MFC set to  0.000000
2/22/2012	9:06:02 PM	BCl3 MFC set to  0.000000
2/22/2012	9:06:02 PM	PH3 MFC set to  0.000000
2/22/2012	9:06:02 PM	SiCl4 MFC set to  0.000000
2/22/2012	9:06:02 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:06:02 PM	Tube furnace set to 0
2/22/2012	9:07:05 PM	Helium valve closed
2/22/2012	9:07:05 PM	H2 valve closed
2/22/2012	9:07:05 PM	BCl3 valve closed
2/22/2012	9:07:05 PM	PH3 valve closed
2/22/2012	9:07:05 PM	SiCl4 pre valve closed
2/22/2012	9:07:05 PM	SiCl4 post valve closed
2/22/2012	9:07:05 PM	Main Vac valve closed
2/22/2012	9:07:05 PM	Bypass valve closed
2/22/2012	9:07:05 PM	Bubbler valve closed
2/22/2012	9:07:05 PM	Helium MFC set to  0.000000
2/22/2012	9:07:05 PM	H2 MFC set to  0.000000
2/22/2012	9:07:05 PM	BCl3 MFC set to  0.000000
2/22/2012	9:07:05 PM	PH3 MFC set to  0.000000
2/22/2012	9:07:05 PM	SiCl4 MFC set to  0.000000
2/22/2012	9:07:05 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:07:05 PM	Tube furnace set to 0
2/22/2012	9:07:06 PM	Run finished at 9:07 PM
2/22/2012	9:07:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/22/2012	9:14:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/22/2012	9:14:05 PM	Recipe started at 9:14 PM
2/22/2012	9:14:05 PM	Helium valve closed
2/22/2012	9:14:05 PM	H2 valve closed
2/22/2012	9:14:05 PM	BCl3 valve closed
2/22/2012	9:14:05 PM	PH3 valve closed
2/22/2012	9:14:05 PM	SiCl4 pre valve closed
2/22/2012	9:14:05 PM	SiCl4 post valve closed
2/22/2012	9:14:05 PM	Main Vac valve closed
2/22/2012	9:14:05 PM	Bubbler valve closed
2/22/2012	9:14:05 PM	Bypass valve opened
2/22/2012	9:14:05 PM	Helium MFC set to  0.000000
2/22/2012	9:14:05 PM	H2 MFC set to  0.000000
2/22/2012	9:14:05 PM	BCl3 MFC set to  0.000000
2/22/2012	9:14:05 PM	PH3 MFC set to  0.000000
2/22/2012	9:14:05 PM	SiCl4 MFC set to  0.000000
2/22/2012	9:14:05 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:14:05 PM	Tube furnace set to 0
2/22/2012	9:15:11 PM	Helium valve closed
2/22/2012	9:15:11 PM	H2 valve closed
2/22/2012	9:15:11 PM	BCl3 valve closed
2/22/2012	9:15:11 PM	PH3 valve closed
2/22/2012	9:15:11 PM	SiCl4 pre valve closed
2/22/2012	9:15:11 PM	SiCl4 post valve closed
2/22/2012	9:15:11 PM	Main Vac valve closed
2/22/2012	9:15:11 PM	Bubbler valve closed
2/22/2012	9:15:11 PM	Bypass valve opened
2/22/2012	9:15:11 PM	Helium MFC set to  0.000000
2/22/2012	9:15:11 PM	H2 MFC set to  0.000000
2/22/2012	9:15:11 PM	BCl3 MFC set to  0.000000
2/22/2012	9:15:11 PM	PH3 MFC set to  0.000000
2/22/2012	9:15:11 PM	SiCl4 MFC set to  0.000000
2/22/2012	9:15:11 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:15:11 PM	Tube furnace set to 0
2/22/2012	9:16:11 PM	Helium valve closed
2/22/2012	9:16:11 PM	H2 valve closed
2/22/2012	9:16:11 PM	BCl3 valve closed
2/22/2012	9:16:11 PM	PH3 valve closed
2/22/2012	9:16:11 PM	SiCl4 pre valve closed
2/22/2012	9:16:11 PM	SiCl4 post valve closed
2/22/2012	9:16:11 PM	Bypass valve closed
2/22/2012	9:16:11 PM	Bubbler valve closed
2/22/2012	9:16:11 PM	Main Vac valve opened
2/22/2012	9:16:11 PM	Helium MFC set to  0.000000
2/22/2012	9:16:11 PM	H2 MFC set to  0.000000
2/22/2012	9:16:11 PM	BCl3 MFC set to  0.000000
2/22/2012	9:16:11 PM	PH3 MFC set to  0.000000
2/22/2012	9:16:11 PM	SiCl4 MFC set to  0.000000
2/22/2012	9:16:11 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:16:11 PM	Tube furnace set to 0
2/22/2012	9:16:12 PM	Run finished at 9:16 PM
2/22/2012	9:16:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/22/2012	9:17:28 PM	Recipe started at 9:17 PM
2/22/2012	9:17:28 PM	Helium valve closed
2/22/2012	9:17:28 PM	H2 valve closed
2/22/2012	9:17:28 PM	BCl3 valve closed
2/22/2012	9:17:28 PM	PH3 valve closed
2/22/2012	9:17:28 PM	SiCl4 pre valve closed
2/22/2012	9:17:28 PM	SiCl4 post valve closed
2/22/2012	9:17:28 PM	Bypass valve closed
2/22/2012	9:17:28 PM	Bubbler valve closed
2/22/2012	9:17:28 PM	Main Vac valve opened
2/22/2012	9:17:28 PM	Helium MFC set to  0.000000
2/22/2012	9:17:28 PM	H2 MFC set to  0.000000
2/22/2012	9:17:28 PM	BCl3 MFC set to  0.000000
2/22/2012	9:17:28 PM	PH3 MFC set to  0.000000
2/22/2012	9:17:28 PM	SiCl4 MFC set to  0.000000
2/22/2012	9:17:28 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:17:28 PM	Tube furnace set to 0
2/22/2012	9:17:58 PM	H2 valve closed
2/22/2012	9:17:58 PM	BCl3 valve closed
2/22/2012	9:17:58 PM	PH3 valve closed
2/22/2012	9:17:58 PM	SiCl4 pre valve closed
2/22/2012	9:17:58 PM	SiCl4 post valve closed
2/22/2012	9:17:58 PM	Bypass valve closed
2/22/2012	9:17:58 PM	Bubbler valve closed
2/22/2012	9:17:58 PM	Helium valve opened
2/22/2012	9:17:58 PM	Main Vac valve opened
2/22/2012	9:17:58 PM	Helium MFC set to  20.000000
2/22/2012	9:17:58 PM	H2 MFC set to  0.000000
2/22/2012	9:17:58 PM	BCl3 MFC set to  0.000000
2/22/2012	9:17:58 PM	PH3 MFC set to  0.000000
2/22/2012	9:17:58 PM	SiCl4 MFC set to  0.000000
2/22/2012	9:17:58 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:17:58 PM	Tube furnace set to 0
2/22/2012	9:18:28 PM	Helium valve closed
2/22/2012	9:18:28 PM	H2 valve closed
2/22/2012	9:18:28 PM	BCl3 valve closed
2/22/2012	9:18:28 PM	PH3 valve closed
2/22/2012	9:18:28 PM	SiCl4 pre valve closed
2/22/2012	9:18:28 PM	SiCl4 post valve closed
2/22/2012	9:18:28 PM	Bypass valve closed
2/22/2012	9:18:28 PM	Bubbler valve closed
2/22/2012	9:18:28 PM	Main Vac valve opened
2/22/2012	9:18:28 PM	Helium MFC set to  0.000000
2/22/2012	9:18:28 PM	H2 MFC set to  0.000000
2/22/2012	9:18:28 PM	BCl3 MFC set to  0.000000
2/22/2012	9:18:28 PM	PH3 MFC set to  0.000000
2/22/2012	9:18:28 PM	SiCl4 MFC set to  0.000000
2/22/2012	9:18:28 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:18:28 PM	Tube furnace set to 0
2/22/2012	9:18:58 PM	H2 valve closed
2/22/2012	9:18:58 PM	BCl3 valve closed
2/22/2012	9:18:58 PM	PH3 valve closed
2/22/2012	9:18:58 PM	SiCl4 pre valve closed
2/22/2012	9:18:58 PM	SiCl4 post valve closed
2/22/2012	9:18:58 PM	Bypass valve closed
2/22/2012	9:18:58 PM	Bubbler valve closed
2/22/2012	9:18:58 PM	Helium valve opened
2/22/2012	9:18:58 PM	Main Vac valve opened
2/22/2012	9:18:58 PM	Helium MFC set to  20.000000
2/22/2012	9:18:58 PM	H2 MFC set to  0.000000
2/22/2012	9:18:58 PM	BCl3 MFC set to  0.000000
2/22/2012	9:18:58 PM	PH3 MFC set to  0.000000
2/22/2012	9:18:58 PM	SiCl4 MFC set to  0.000000
2/22/2012	9:18:58 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:18:58 PM	Tube furnace set to 0
2/22/2012	9:19:28 PM	Helium valve closed
2/22/2012	9:19:28 PM	H2 valve closed
2/22/2012	9:19:28 PM	BCl3 valve closed
2/22/2012	9:19:28 PM	PH3 valve closed
2/22/2012	9:19:28 PM	SiCl4 pre valve closed
2/22/2012	9:19:28 PM	SiCl4 post valve closed
2/22/2012	9:19:28 PM	Bypass valve closed
2/22/2012	9:19:28 PM	Bubbler valve closed
2/22/2012	9:19:28 PM	Main Vac valve opened
2/22/2012	9:19:28 PM	Helium MFC set to  0.000000
2/22/2012	9:19:28 PM	H2 MFC set to  0.000000
2/22/2012	9:19:28 PM	BCl3 MFC set to  0.000000
2/22/2012	9:19:28 PM	PH3 MFC set to  0.000000
2/22/2012	9:19:28 PM	SiCl4 MFC set to  0.000000
2/22/2012	9:19:28 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:19:29 PM	Tube furnace set to 0
2/22/2012	9:19:59 PM	H2 valve closed
2/22/2012	9:19:59 PM	BCl3 valve closed
2/22/2012	9:19:59 PM	PH3 valve closed
2/22/2012	9:19:59 PM	SiCl4 pre valve closed
2/22/2012	9:19:59 PM	SiCl4 post valve closed
2/22/2012	9:19:59 PM	Bypass valve closed
2/22/2012	9:19:59 PM	Bubbler valve closed
2/22/2012	9:19:59 PM	Helium valve opened
2/22/2012	9:19:59 PM	Main Vac valve opened
2/22/2012	9:19:59 PM	Helium MFC set to  20.000000
2/22/2012	9:19:59 PM	H2 MFC set to  0.000000
2/22/2012	9:19:59 PM	BCl3 MFC set to  0.000000
2/22/2012	9:19:59 PM	PH3 MFC set to  0.000000
2/22/2012	9:19:59 PM	SiCl4 MFC set to  0.000000
2/22/2012	9:19:59 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:19:59 PM	Tube furnace set to 0
2/22/2012	9:20:29 PM	Helium valve closed
2/22/2012	9:20:29 PM	H2 valve closed
2/22/2012	9:20:29 PM	BCl3 valve closed
2/22/2012	9:20:29 PM	PH3 valve closed
2/22/2012	9:20:29 PM	SiCl4 pre valve closed
2/22/2012	9:20:29 PM	SiCl4 post valve closed
2/22/2012	9:20:29 PM	Bypass valve closed
2/22/2012	9:20:29 PM	Bubbler valve closed
2/22/2012	9:20:29 PM	Main Vac valve opened
2/22/2012	9:20:29 PM	Helium MFC set to  0.000000
2/22/2012	9:20:29 PM	H2 MFC set to  0.000000
2/22/2012	9:20:29 PM	BCl3 MFC set to  0.000000
2/22/2012	9:20:29 PM	PH3 MFC set to  0.000000
2/22/2012	9:20:29 PM	SiCl4 MFC set to  0.000000
2/22/2012	9:20:29 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:20:29 PM	Tube furnace set to 0
2/22/2012	9:20:59 PM	H2 valve closed
2/22/2012	9:20:59 PM	BCl3 valve closed
2/22/2012	9:20:59 PM	PH3 valve closed
2/22/2012	9:20:59 PM	SiCl4 pre valve closed
2/22/2012	9:20:59 PM	SiCl4 post valve closed
2/22/2012	9:20:59 PM	Bypass valve closed
2/22/2012	9:20:59 PM	Bubbler valve closed
2/22/2012	9:20:59 PM	Helium valve opened
2/22/2012	9:20:59 PM	Main Vac valve opened
2/22/2012	9:20:59 PM	Helium MFC set to  20.000000
2/22/2012	9:20:59 PM	H2 MFC set to  0.000000
2/22/2012	9:20:59 PM	BCl3 MFC set to  0.000000
2/22/2012	9:20:59 PM	PH3 MFC set to  0.000000
2/22/2012	9:20:59 PM	SiCl4 MFC set to  0.000000
2/22/2012	9:20:59 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:20:59 PM	Tube furnace set to 0
2/22/2012	9:21:29 PM	Helium valve closed
2/22/2012	9:21:29 PM	H2 valve closed
2/22/2012	9:21:29 PM	BCl3 valve closed
2/22/2012	9:21:29 PM	PH3 valve closed
2/22/2012	9:21:29 PM	SiCl4 pre valve closed
2/22/2012	9:21:29 PM	SiCl4 post valve closed
2/22/2012	9:21:29 PM	Bypass valve closed
2/22/2012	9:21:29 PM	Bubbler valve closed
2/22/2012	9:21:29 PM	Main Vac valve opened
2/22/2012	9:21:29 PM	Helium MFC set to  0.000000
2/22/2012	9:21:29 PM	H2 MFC set to  0.000000
2/22/2012	9:21:29 PM	BCl3 MFC set to  0.000000
2/22/2012	9:21:29 PM	PH3 MFC set to  0.000000
2/22/2012	9:21:29 PM	SiCl4 MFC set to  0.000000
2/22/2012	9:21:29 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:21:29 PM	Tube furnace set to 0
2/22/2012	9:21:59 PM	H2 valve closed
2/22/2012	9:21:59 PM	BCl3 valve closed
2/22/2012	9:21:59 PM	PH3 valve closed
2/22/2012	9:21:59 PM	SiCl4 pre valve closed
2/22/2012	9:21:59 PM	SiCl4 post valve closed
2/22/2012	9:21:59 PM	Bypass valve closed
2/22/2012	9:21:59 PM	Bubbler valve closed
2/22/2012	9:21:59 PM	Helium valve opened
2/22/2012	9:21:59 PM	Main Vac valve opened
2/22/2012	9:21:59 PM	Helium MFC set to  20.000000
2/22/2012	9:21:59 PM	H2 MFC set to  0.000000
2/22/2012	9:21:59 PM	BCl3 MFC set to  0.000000
2/22/2012	9:21:59 PM	PH3 MFC set to  0.000000
2/22/2012	9:21:59 PM	SiCl4 MFC set to  0.000000
2/22/2012	9:21:59 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:22:00 PM	Tube furnace set to 0
2/22/2012	9:22:30 PM	Helium valve closed
2/22/2012	9:22:30 PM	H2 valve closed
2/22/2012	9:22:30 PM	BCl3 valve closed
2/22/2012	9:22:30 PM	PH3 valve closed
2/22/2012	9:22:30 PM	SiCl4 pre valve closed
2/22/2012	9:22:30 PM	SiCl4 post valve closed
2/22/2012	9:22:30 PM	Bypass valve closed
2/22/2012	9:22:30 PM	Bubbler valve closed
2/22/2012	9:22:30 PM	Main Vac valve opened
2/22/2012	9:22:30 PM	Helium MFC set to  0.000000
2/22/2012	9:22:30 PM	H2 MFC set to  0.000000
2/22/2012	9:22:30 PM	BCl3 MFC set to  0.000000
2/22/2012	9:22:30 PM	PH3 MFC set to  0.000000
2/22/2012	9:22:30 PM	SiCl4 MFC set to  0.000000
2/22/2012	9:22:30 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:22:30 PM	Tube furnace set to 0
2/22/2012	9:23:00 PM	H2 valve closed
2/22/2012	9:23:00 PM	BCl3 valve closed
2/22/2012	9:23:00 PM	PH3 valve closed
2/22/2012	9:23:00 PM	SiCl4 pre valve closed
2/22/2012	9:23:00 PM	SiCl4 post valve closed
2/22/2012	9:23:00 PM	Bypass valve closed
2/22/2012	9:23:00 PM	Bubbler valve closed
2/22/2012	9:23:00 PM	Helium valve opened
2/22/2012	9:23:00 PM	Main Vac valve opened
2/22/2012	9:23:00 PM	Helium MFC set to  20.000000
2/22/2012	9:23:00 PM	H2 MFC set to  0.000000
2/22/2012	9:23:00 PM	BCl3 MFC set to  0.000000
2/22/2012	9:23:00 PM	PH3 MFC set to  0.000000
2/22/2012	9:23:00 PM	SiCl4 MFC set to  0.000000
2/22/2012	9:23:00 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:23:00 PM	Tube furnace set to 0
2/22/2012	9:23:30 PM	Helium valve closed
2/22/2012	9:23:30 PM	H2 valve closed
2/22/2012	9:23:30 PM	BCl3 valve closed
2/22/2012	9:23:30 PM	PH3 valve closed
2/22/2012	9:23:30 PM	SiCl4 pre valve closed
2/22/2012	9:23:30 PM	SiCl4 post valve closed
2/22/2012	9:23:30 PM	Bypass valve closed
2/22/2012	9:23:30 PM	Bubbler valve closed
2/22/2012	9:23:30 PM	Main Vac valve opened
2/22/2012	9:23:30 PM	Helium MFC set to  0.000000
2/22/2012	9:23:30 PM	H2 MFC set to  0.000000
2/22/2012	9:23:30 PM	BCl3 MFC set to  0.000000
2/22/2012	9:23:30 PM	PH3 MFC set to  0.000000
2/22/2012	9:23:30 PM	SiCl4 MFC set to  0.000000
2/22/2012	9:23:30 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:23:30 PM	Tube furnace set to 0
2/22/2012	9:24:00 PM	H2 valve closed
2/22/2012	9:24:00 PM	BCl3 valve closed
2/22/2012	9:24:00 PM	PH3 valve closed
2/22/2012	9:24:00 PM	SiCl4 pre valve closed
2/22/2012	9:24:00 PM	SiCl4 post valve closed
2/22/2012	9:24:00 PM	Bypass valve closed
2/22/2012	9:24:00 PM	Bubbler valve closed
2/22/2012	9:24:00 PM	Helium valve opened
2/22/2012	9:24:00 PM	Main Vac valve opened
2/22/2012	9:24:00 PM	Helium MFC set to  20.000000
2/22/2012	9:24:00 PM	H2 MFC set to  0.000000
2/22/2012	9:24:00 PM	BCl3 MFC set to  0.000000
2/22/2012	9:24:00 PM	PH3 MFC set to  0.000000
2/22/2012	9:24:00 PM	SiCl4 MFC set to  0.000000
2/22/2012	9:24:00 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:24:00 PM	Tube furnace set to 0
2/22/2012	9:24:30 PM	Helium valve closed
2/22/2012	9:24:30 PM	H2 valve closed
2/22/2012	9:24:30 PM	BCl3 valve closed
2/22/2012	9:24:30 PM	PH3 valve closed
2/22/2012	9:24:30 PM	SiCl4 pre valve closed
2/22/2012	9:24:30 PM	SiCl4 post valve closed
2/22/2012	9:24:30 PM	Bypass valve closed
2/22/2012	9:24:30 PM	Bubbler valve closed
2/22/2012	9:24:30 PM	Main Vac valve opened
2/22/2012	9:24:30 PM	Helium MFC set to  0.000000
2/22/2012	9:24:30 PM	H2 MFC set to  0.000000
2/22/2012	9:24:30 PM	BCl3 MFC set to  0.000000
2/22/2012	9:24:30 PM	PH3 MFC set to  0.000000
2/22/2012	9:24:30 PM	SiCl4 MFC set to  0.000000
2/22/2012	9:24:30 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:24:31 PM	Tube furnace set to 0
2/22/2012	9:25:01 PM	H2 valve closed
2/22/2012	9:25:01 PM	BCl3 valve closed
2/22/2012	9:25:01 PM	PH3 valve closed
2/22/2012	9:25:01 PM	SiCl4 pre valve closed
2/22/2012	9:25:01 PM	SiCl4 post valve closed
2/22/2012	9:25:01 PM	Bypass valve closed
2/22/2012	9:25:01 PM	Bubbler valve closed
2/22/2012	9:25:01 PM	Helium valve opened
2/22/2012	9:25:01 PM	Main Vac valve opened
2/22/2012	9:25:01 PM	Helium MFC set to  20.000000
2/22/2012	9:25:01 PM	H2 MFC set to  0.000000
2/22/2012	9:25:01 PM	BCl3 MFC set to  0.000000
2/22/2012	9:25:01 PM	PH3 MFC set to  0.000000
2/22/2012	9:25:01 PM	SiCl4 MFC set to  0.000000
2/22/2012	9:25:01 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:25:01 PM	Tube furnace set to 0
2/22/2012	9:25:31 PM	Helium valve closed
2/22/2012	9:25:31 PM	H2 valve closed
2/22/2012	9:25:31 PM	BCl3 valve closed
2/22/2012	9:25:31 PM	PH3 valve closed
2/22/2012	9:25:31 PM	SiCl4 pre valve closed
2/22/2012	9:25:31 PM	SiCl4 post valve closed
2/22/2012	9:25:31 PM	Bypass valve closed
2/22/2012	9:25:31 PM	Bubbler valve closed
2/22/2012	9:25:31 PM	Main Vac valve opened
2/22/2012	9:25:31 PM	Helium MFC set to  0.000000
2/22/2012	9:25:31 PM	H2 MFC set to  0.000000
2/22/2012	9:25:31 PM	BCl3 MFC set to  0.000000
2/22/2012	9:25:31 PM	PH3 MFC set to  0.000000
2/22/2012	9:25:31 PM	SiCl4 MFC set to  0.000000
2/22/2012	9:25:31 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:25:31 PM	Tube furnace set to 0
2/22/2012	9:26:01 PM	H2 valve closed
2/22/2012	9:26:01 PM	BCl3 valve closed
2/22/2012	9:26:01 PM	PH3 valve closed
2/22/2012	9:26:01 PM	SiCl4 pre valve closed
2/22/2012	9:26:01 PM	SiCl4 post valve closed
2/22/2012	9:26:01 PM	Bypass valve closed
2/22/2012	9:26:01 PM	Bubbler valve closed
2/22/2012	9:26:01 PM	Helium valve opened
2/22/2012	9:26:01 PM	Main Vac valve opened
2/22/2012	9:26:01 PM	Helium MFC set to  20.000000
2/22/2012	9:26:01 PM	H2 MFC set to  0.000000
2/22/2012	9:26:01 PM	BCl3 MFC set to  0.000000
2/22/2012	9:26:01 PM	PH3 MFC set to  0.000000
2/22/2012	9:26:01 PM	SiCl4 MFC set to  0.000000
2/22/2012	9:26:01 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:26:01 PM	Tube furnace set to 0
2/22/2012	9:26:31 PM	Helium valve closed
2/22/2012	9:26:31 PM	H2 valve closed
2/22/2012	9:26:31 PM	BCl3 valve closed
2/22/2012	9:26:31 PM	PH3 valve closed
2/22/2012	9:26:31 PM	SiCl4 pre valve closed
2/22/2012	9:26:31 PM	SiCl4 post valve closed
2/22/2012	9:26:31 PM	Bypass valve closed
2/22/2012	9:26:31 PM	Bubbler valve closed
2/22/2012	9:26:31 PM	Main Vac valve opened
2/22/2012	9:26:31 PM	Helium MFC set to  0.000000
2/22/2012	9:26:31 PM	H2 MFC set to  0.000000
2/22/2012	9:26:31 PM	BCl3 MFC set to  0.000000
2/22/2012	9:26:31 PM	PH3 MFC set to  0.000000
2/22/2012	9:26:31 PM	SiCl4 MFC set to  0.000000
2/22/2012	9:26:31 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:26:31 PM	Tube furnace set to 200
2/22/2012	9:27:01 PM	H2 valve closed
2/22/2012	9:27:01 PM	BCl3 valve closed
2/22/2012	9:27:01 PM	PH3 valve closed
2/22/2012	9:27:01 PM	SiCl4 pre valve closed
2/22/2012	9:27:01 PM	SiCl4 post valve closed
2/22/2012	9:27:01 PM	Bypass valve closed
2/22/2012	9:27:01 PM	Bubbler valve closed
2/22/2012	9:27:01 PM	Helium valve opened
2/22/2012	9:27:02 PM	Main Vac valve opened
2/22/2012	9:27:02 PM	Helium MFC set to  20.000000
2/22/2012	9:27:02 PM	H2 MFC set to  0.000000
2/22/2012	9:27:02 PM	BCl3 MFC set to  0.000000
2/22/2012	9:27:02 PM	PH3 MFC set to  0.000000
2/22/2012	9:27:02 PM	SiCl4 MFC set to  0.000000
2/22/2012	9:27:02 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:27:02 PM	Tube furnace set to 200
2/22/2012	9:27:32 PM	Helium valve closed
2/22/2012	9:27:32 PM	H2 valve closed
2/22/2012	9:27:32 PM	BCl3 valve closed
2/22/2012	9:27:32 PM	PH3 valve closed
2/22/2012	9:27:32 PM	SiCl4 pre valve closed
2/22/2012	9:27:32 PM	SiCl4 post valve closed
2/22/2012	9:27:32 PM	Bypass valve closed
2/22/2012	9:27:32 PM	Bubbler valve closed
2/22/2012	9:27:32 PM	Main Vac valve opened
2/22/2012	9:27:32 PM	Helium MFC set to  0.000000
2/22/2012	9:27:32 PM	H2 MFC set to  0.000000
2/22/2012	9:27:32 PM	BCl3 MFC set to  0.000000
2/22/2012	9:27:32 PM	PH3 MFC set to  0.000000
2/22/2012	9:27:32 PM	SiCl4 MFC set to  0.000000
2/22/2012	9:27:32 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:27:32 PM	Tube furnace set to 200
2/22/2012	9:28:02 PM	H2 valve closed
2/22/2012	9:28:02 PM	BCl3 valve closed
2/22/2012	9:28:02 PM	PH3 valve closed
2/22/2012	9:28:02 PM	SiCl4 pre valve closed
2/22/2012	9:28:02 PM	SiCl4 post valve closed
2/22/2012	9:28:02 PM	Bypass valve closed
2/22/2012	9:28:02 PM	Bubbler valve closed
2/22/2012	9:28:02 PM	Helium valve opened
2/22/2012	9:28:02 PM	Main Vac valve opened
2/22/2012	9:28:02 PM	Helium MFC set to  20.000000
2/22/2012	9:28:02 PM	H2 MFC set to  0.000000
2/22/2012	9:28:02 PM	BCl3 MFC set to  0.000000
2/22/2012	9:28:02 PM	PH3 MFC set to  0.000000
2/22/2012	9:28:02 PM	SiCl4 MFC set to  0.000000
2/22/2012	9:28:02 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:28:02 PM	Tube furnace set to 200
2/22/2012	9:28:32 PM	Helium valve closed
2/22/2012	9:28:32 PM	H2 valve closed
2/22/2012	9:28:32 PM	BCl3 valve closed
2/22/2012	9:28:32 PM	PH3 valve closed
2/22/2012	9:28:32 PM	SiCl4 pre valve closed
2/22/2012	9:28:32 PM	SiCl4 post valve closed
2/22/2012	9:28:32 PM	Bypass valve closed
2/22/2012	9:28:32 PM	Bubbler valve closed
2/22/2012	9:28:32 PM	Main Vac valve opened
2/22/2012	9:28:32 PM	Helium MFC set to  0.000000
2/22/2012	9:28:32 PM	H2 MFC set to  0.000000
2/22/2012	9:28:32 PM	BCl3 MFC set to  0.000000
2/22/2012	9:28:32 PM	PH3 MFC set to  0.000000
2/22/2012	9:28:32 PM	SiCl4 MFC set to  0.000000
2/22/2012	9:28:32 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:28:32 PM	Tube furnace set to 200
2/22/2012	9:29:02 PM	H2 valve closed
2/22/2012	9:29:02 PM	BCl3 valve closed
2/22/2012	9:29:02 PM	PH3 valve closed
2/22/2012	9:29:02 PM	SiCl4 pre valve closed
2/22/2012	9:29:02 PM	SiCl4 post valve closed
2/22/2012	9:29:02 PM	Bypass valve closed
2/22/2012	9:29:02 PM	Bubbler valve closed
2/22/2012	9:29:02 PM	Helium valve opened
2/22/2012	9:29:02 PM	Main Vac valve opened
2/22/2012	9:29:02 PM	Helium MFC set to  20.000000
2/22/2012	9:29:02 PM	H2 MFC set to  0.000000
2/22/2012	9:29:02 PM	BCl3 MFC set to  0.000000
2/22/2012	9:29:02 PM	PH3 MFC set to  0.000000
2/22/2012	9:29:02 PM	SiCl4 MFC set to  0.000000
2/22/2012	9:29:02 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:29:02 PM	Tube furnace set to 200
2/22/2012	9:29:33 PM	Helium valve closed
2/22/2012	9:29:33 PM	H2 valve closed
2/22/2012	9:29:33 PM	BCl3 valve closed
2/22/2012	9:29:33 PM	PH3 valve closed
2/22/2012	9:29:33 PM	SiCl4 pre valve closed
2/22/2012	9:29:33 PM	SiCl4 post valve closed
2/22/2012	9:29:33 PM	Bypass valve closed
2/22/2012	9:29:33 PM	Bubbler valve closed
2/22/2012	9:29:33 PM	Main Vac valve opened
2/22/2012	9:29:33 PM	Helium MFC set to  0.000000
2/22/2012	9:29:33 PM	H2 MFC set to  0.000000
2/22/2012	9:29:33 PM	BCl3 MFC set to  0.000000
2/22/2012	9:29:33 PM	PH3 MFC set to  0.000000
2/22/2012	9:29:33 PM	SiCl4 MFC set to  0.000000
2/22/2012	9:29:33 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:29:33 PM	Tube furnace set to 200
2/22/2012	9:30:03 PM	H2 valve closed
2/22/2012	9:30:03 PM	BCl3 valve closed
2/22/2012	9:30:03 PM	PH3 valve closed
2/22/2012	9:30:03 PM	SiCl4 pre valve closed
2/22/2012	9:30:03 PM	SiCl4 post valve closed
2/22/2012	9:30:03 PM	Bypass valve closed
2/22/2012	9:30:03 PM	Bubbler valve closed
2/22/2012	9:30:03 PM	Helium valve opened
2/22/2012	9:30:03 PM	Main Vac valve opened
2/22/2012	9:30:03 PM	Helium MFC set to  20.000000
2/22/2012	9:30:03 PM	H2 MFC set to  0.000000
2/22/2012	9:30:03 PM	BCl3 MFC set to  0.000000
2/22/2012	9:30:03 PM	PH3 MFC set to  0.000000
2/22/2012	9:30:03 PM	SiCl4 MFC set to  0.000000
2/22/2012	9:30:03 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:30:03 PM	Tube furnace set to 200
2/22/2012	9:30:33 PM	Helium valve closed
2/22/2012	9:30:33 PM	H2 valve closed
2/22/2012	9:30:33 PM	BCl3 valve closed
2/22/2012	9:30:33 PM	PH3 valve closed
2/22/2012	9:30:33 PM	SiCl4 pre valve closed
2/22/2012	9:30:33 PM	SiCl4 post valve closed
2/22/2012	9:30:33 PM	Bypass valve closed
2/22/2012	9:30:33 PM	Bubbler valve closed
2/22/2012	9:30:33 PM	Main Vac valve opened
2/22/2012	9:30:33 PM	Helium MFC set to  0.000000
2/22/2012	9:30:33 PM	H2 MFC set to  0.000000
2/22/2012	9:30:33 PM	BCl3 MFC set to  0.000000
2/22/2012	9:30:33 PM	PH3 MFC set to  0.000000
2/22/2012	9:30:33 PM	SiCl4 MFC set to  0.000000
2/22/2012	9:30:33 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:30:33 PM	Tube furnace set to 200
2/22/2012	9:31:03 PM	H2 valve closed
2/22/2012	9:31:03 PM	BCl3 valve closed
2/22/2012	9:31:03 PM	PH3 valve closed
2/22/2012	9:31:03 PM	SiCl4 pre valve closed
2/22/2012	9:31:03 PM	SiCl4 post valve closed
2/22/2012	9:31:03 PM	Bypass valve closed
2/22/2012	9:31:03 PM	Bubbler valve closed
2/22/2012	9:31:03 PM	Helium valve opened
2/22/2012	9:31:03 PM	Main Vac valve opened
2/22/2012	9:31:03 PM	Helium MFC set to  20.000000
2/22/2012	9:31:03 PM	H2 MFC set to  0.000000
2/22/2012	9:31:03 PM	BCl3 MFC set to  0.000000
2/22/2012	9:31:03 PM	PH3 MFC set to  0.000000
2/22/2012	9:31:03 PM	SiCl4 MFC set to  0.000000
2/22/2012	9:31:03 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:31:03 PM	Tube furnace set to 200
2/22/2012	9:31:33 PM	Helium valve closed
2/22/2012	9:31:33 PM	H2 valve closed
2/22/2012	9:31:33 PM	BCl3 valve closed
2/22/2012	9:31:33 PM	PH3 valve closed
2/22/2012	9:31:33 PM	SiCl4 pre valve closed
2/22/2012	9:31:33 PM	SiCl4 post valve closed
2/22/2012	9:31:33 PM	Bypass valve closed
2/22/2012	9:31:33 PM	Bubbler valve closed
2/22/2012	9:31:33 PM	Main Vac valve opened
2/22/2012	9:31:33 PM	Helium MFC set to  0.000000
2/22/2012	9:31:33 PM	H2 MFC set to  0.000000
2/22/2012	9:31:33 PM	BCl3 MFC set to  0.000000
2/22/2012	9:31:33 PM	PH3 MFC set to  0.000000
2/22/2012	9:31:33 PM	SiCl4 MFC set to  0.000000
2/22/2012	9:31:33 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:31:34 PM	Tube furnace set to 200
2/22/2012	9:32:04 PM	H2 valve closed
2/22/2012	9:32:04 PM	BCl3 valve closed
2/22/2012	9:32:04 PM	PH3 valve closed
2/22/2012	9:32:04 PM	SiCl4 pre valve closed
2/22/2012	9:32:04 PM	SiCl4 post valve closed
2/22/2012	9:32:04 PM	Bypass valve closed
2/22/2012	9:32:04 PM	Bubbler valve closed
2/22/2012	9:32:04 PM	Helium valve opened
2/22/2012	9:32:04 PM	Main Vac valve opened
2/22/2012	9:32:04 PM	Helium MFC set to  20.000000
2/22/2012	9:32:04 PM	H2 MFC set to  0.000000
2/22/2012	9:32:04 PM	BCl3 MFC set to  0.000000
2/22/2012	9:32:04 PM	PH3 MFC set to  0.000000
2/22/2012	9:32:04 PM	SiCl4 MFC set to  0.000000
2/22/2012	9:32:04 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:32:04 PM	Tube furnace set to 200
2/22/2012	9:32:34 PM	Helium valve closed
2/22/2012	9:32:34 PM	H2 valve closed
2/22/2012	9:32:34 PM	BCl3 valve closed
2/22/2012	9:32:34 PM	PH3 valve closed
2/22/2012	9:32:34 PM	SiCl4 pre valve closed
2/22/2012	9:32:34 PM	SiCl4 post valve closed
2/22/2012	9:32:34 PM	Bypass valve closed
2/22/2012	9:32:34 PM	Bubbler valve closed
2/22/2012	9:32:34 PM	Main Vac valve opened
2/22/2012	9:32:34 PM	Helium MFC set to  0.000000
2/22/2012	9:32:34 PM	H2 MFC set to  0.000000
2/22/2012	9:32:34 PM	BCl3 MFC set to  0.000000
2/22/2012	9:32:34 PM	PH3 MFC set to  0.000000
2/22/2012	9:32:34 PM	SiCl4 MFC set to  0.000000
2/22/2012	9:32:34 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:32:34 PM	Tube furnace set to 0
2/22/2012	9:32:35 PM	Run finished at 9:32 PM
2/22/2012	9:39:26 PM	Recipe started at 9:39 PM
2/22/2012	9:39:26 PM	Helium valve closed
2/22/2012	9:39:26 PM	H2 valve closed
2/22/2012	9:39:26 PM	BCl3 valve closed
2/22/2012	9:39:26 PM	PH3 valve closed
2/22/2012	9:39:26 PM	SiCl4 pre valve closed
2/22/2012	9:39:26 PM	SiCl4 post valve closed
2/22/2012	9:39:26 PM	Main Vac valve closed
2/22/2012	9:39:26 PM	Bypass valve closed
2/22/2012	9:39:26 PM	Bubbler valve closed
2/22/2012	9:39:26 PM	Helium MFC set to  0.000000
2/22/2012	9:39:26 PM	H2 MFC set to  0.000000
2/22/2012	9:39:26 PM	BCl3 MFC set to  0.000000
2/22/2012	9:39:26 PM	PH3 MFC set to  0.000000
2/22/2012	9:39:26 PM	SiCl4 MFC set to  0.000000
2/22/2012	9:39:26 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:39:26 PM	Tube furnace set to 0
2/22/2012	9:39:29 PM	Helium valve closed
2/22/2012	9:39:29 PM	BCl3 valve closed
2/22/2012	9:39:29 PM	PH3 valve closed
2/22/2012	9:39:29 PM	SiCl4 pre valve closed
2/22/2012	9:39:29 PM	SiCl4 post valve closed
2/22/2012	9:39:29 PM	Main Vac valve closed
2/22/2012	9:39:29 PM	Bypass valve closed
2/22/2012	9:39:29 PM	Bubbler valve closed
2/22/2012	9:39:29 PM	H2 valve opened
2/22/2012	9:39:29 PM	Helium MFC set to  0.000000
2/22/2012	9:39:29 PM	H2 MFC set to  500.000000
2/22/2012	9:39:29 PM	BCl3 MFC set to  0.000000
2/22/2012	9:39:29 PM	PH3 MFC set to  0.000000
2/22/2012	9:39:29 PM	SiCl4 MFC set to  0.000000
2/22/2012	9:39:29 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:39:29 PM	Tube furnace set to 0
2/22/2012	9:40:33 PM	Helium valve closed
2/22/2012	9:40:33 PM	BCl3 valve closed
2/22/2012	9:40:33 PM	PH3 valve closed
2/22/2012	9:40:33 PM	SiCl4 pre valve closed
2/22/2012	9:40:33 PM	SiCl4 post valve closed
2/22/2012	9:40:33 PM	Main Vac valve closed
2/22/2012	9:40:33 PM	Bypass valve closed
2/22/2012	9:40:33 PM	H2 valve opened
2/22/2012	9:40:33 PM	Bubbler valve opened
2/22/2012	9:40:33 PM	Helium MFC set to  0.000000
2/22/2012	9:40:33 PM	H2 MFC set to  500.000000
2/22/2012	9:40:33 PM	BCl3 MFC set to  0.000000
2/22/2012	9:40:33 PM	PH3 MFC set to  0.000000
2/22/2012	9:40:33 PM	SiCl4 MFC set to  0.000000
2/22/2012	9:40:33 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:40:33 PM	Tube furnace set to 0
2/22/2012	9:40:34 PM	Helium valve closed
2/22/2012	9:40:34 PM	BCl3 valve closed
2/22/2012	9:40:34 PM	PH3 valve closed
2/22/2012	9:40:34 PM	SiCl4 pre valve closed
2/22/2012	9:40:34 PM	SiCl4 post valve closed
2/22/2012	9:40:34 PM	Main Vac valve closed
2/22/2012	9:40:34 PM	Bypass valve closed
2/22/2012	9:40:34 PM	H2 valve opened
2/22/2012	9:40:34 PM	Bubbler valve opened
2/22/2012	9:40:34 PM	Helium MFC set to  0.000000
2/22/2012	9:40:34 PM	H2 MFC set to  500.000000
2/22/2012	9:40:34 PM	BCl3 MFC set to  0.000000
2/22/2012	9:40:34 PM	PH3 MFC set to  0.000000
2/22/2012	9:40:34 PM	SiCl4 MFC set to  0.000000
2/22/2012	9:40:34 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	9:40:34 PM	Tube furnace set to 1000
2/22/2012	10:00:34 PM	Helium valve closed
2/22/2012	10:00:34 PM	PH3 valve closed
2/22/2012	10:00:34 PM	Main Vac valve closed
2/22/2012	10:00:34 PM	Bypass valve closed
2/22/2012	10:00:34 PM	H2 valve opened
2/22/2012	10:00:34 PM	BCl3 valve opened
2/22/2012	10:00:34 PM	SiCl4 pre valve opened
2/22/2012	10:00:34 PM	SiCl4 post valve opened
2/22/2012	10:00:34 PM	Bubbler valve opened
2/22/2012	10:00:34 PM	Helium MFC set to  0.000000
2/22/2012	10:00:34 PM	H2 MFC set to  450.000000
2/22/2012	10:00:34 PM	BCl3 MFC set to  1.500000
2/22/2012	10:00:34 PM	PH3 MFC set to  0.000000
2/22/2012	10:00:34 PM	SiCl4 MFC set to  50.000000
2/22/2012	10:00:34 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	10:00:35 PM	Tube furnace set to 1000
2/22/2012	10:13:35 PM	Helium valve closed
2/22/2012	10:13:35 PM	BCl3 valve closed
2/22/2012	10:13:35 PM	Main Vac valve closed
2/22/2012	10:13:35 PM	Bypass valve closed
2/22/2012	10:13:35 PM	H2 valve opened
2/22/2012	10:13:35 PM	PH3 valve opened
2/22/2012	10:13:35 PM	SiCl4 pre valve opened
2/22/2012	10:13:35 PM	SiCl4 post valve opened
2/22/2012	10:13:35 PM	Bubbler valve opened
2/22/2012	10:13:35 PM	Helium MFC set to  0.000000
2/22/2012	10:13:35 PM	H2 MFC set to  450.000000
2/22/2012	10:13:35 PM	BCl3 MFC set to  0.000000
2/22/2012	10:13:35 PM	PH3 MFC set to  20.000000
2/22/2012	10:13:35 PM	SiCl4 MFC set to  50.000000
2/22/2012	10:13:35 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	10:13:35 PM	Tube furnace set to 1000
2/22/2012	10:19:35 PM	Helium valve closed
2/22/2012	10:19:35 PM	BCl3 valve closed
2/22/2012	10:19:35 PM	PH3 valve closed
2/22/2012	10:19:35 PM	SiCl4 pre valve closed
2/22/2012	10:19:35 PM	SiCl4 post valve closed
2/22/2012	10:19:35 PM	Main Vac valve closed
2/22/2012	10:19:35 PM	Bypass valve closed
2/22/2012	10:19:35 PM	H2 valve opened
2/22/2012	10:19:35 PM	Bubbler valve opened
2/22/2012	10:19:35 PM	Helium MFC set to  0.000000
2/22/2012	10:19:35 PM	H2 MFC set to  500.000000
2/22/2012	10:19:35 PM	BCl3 MFC set to  0.000000
2/22/2012	10:19:35 PM	PH3 MFC set to  0.000000
2/22/2012	10:19:35 PM	SiCl4 MFC set to  0.000000
2/22/2012	10:19:35 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	10:19:35 PM	Tube furnace set to 950
2/22/2012	10:21:35 PM	Helium valve closed
2/22/2012	10:21:35 PM	BCl3 valve closed
2/22/2012	10:21:35 PM	PH3 valve closed
2/22/2012	10:21:35 PM	SiCl4 pre valve closed
2/22/2012	10:21:35 PM	SiCl4 post valve closed
2/22/2012	10:21:35 PM	Main Vac valve closed
2/22/2012	10:21:35 PM	Bypass valve closed
2/22/2012	10:21:35 PM	H2 valve opened
2/22/2012	10:21:35 PM	Bubbler valve opened
2/22/2012	10:21:35 PM	Helium MFC set to  0.000000
2/22/2012	10:21:35 PM	H2 MFC set to  500.000000
2/22/2012	10:21:35 PM	BCl3 MFC set to  0.000000
2/22/2012	10:21:35 PM	PH3 MFC set to  0.000000
2/22/2012	10:21:35 PM	SiCl4 MFC set to  0.000000
2/22/2012	10:21:35 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	10:21:35 PM	Tube furnace set to 900
2/22/2012	10:23:35 PM	Helium valve closed
2/22/2012	10:23:35 PM	BCl3 valve closed
2/22/2012	10:23:35 PM	PH3 valve closed
2/22/2012	10:23:35 PM	SiCl4 pre valve closed
2/22/2012	10:23:35 PM	SiCl4 post valve closed
2/22/2012	10:23:35 PM	Main Vac valve closed
2/22/2012	10:23:35 PM	Bypass valve closed
2/22/2012	10:23:35 PM	H2 valve opened
2/22/2012	10:23:35 PM	Bubbler valve opened
2/22/2012	10:23:35 PM	Helium MFC set to  0.000000
2/22/2012	10:23:35 PM	H2 MFC set to  500.000000
2/22/2012	10:23:35 PM	BCl3 MFC set to  0.000000
2/22/2012	10:23:35 PM	PH3 MFC set to  0.000000
2/22/2012	10:23:35 PM	SiCl4 MFC set to  0.000000
2/22/2012	10:23:35 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	10:23:35 PM	Tube furnace set to 850
2/22/2012	10:25:35 PM	H2 valve closed
2/22/2012	10:25:35 PM	BCl3 valve closed
2/22/2012	10:25:35 PM	PH3 valve closed
2/22/2012	10:25:35 PM	SiCl4 pre valve closed
2/22/2012	10:25:35 PM	SiCl4 post valve closed
2/22/2012	10:25:35 PM	Main Vac valve closed
2/22/2012	10:25:35 PM	Bypass valve closed
2/22/2012	10:25:35 PM	Helium valve opened
2/22/2012	10:25:35 PM	Bubbler valve opened
2/22/2012	10:25:35 PM	Helium MFC set to  500.000000
2/22/2012	10:25:35 PM	H2 MFC set to  0.000000
2/22/2012	10:25:35 PM	BCl3 MFC set to  0.000000
2/22/2012	10:25:35 PM	PH3 MFC set to  0.000000
2/22/2012	10:25:35 PM	SiCl4 MFC set to  0.000000
2/22/2012	10:25:35 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	10:25:36 PM	Tube furnace set to 800
2/22/2012	10:27:36 PM	H2 valve closed
2/22/2012	10:27:36 PM	BCl3 valve closed
2/22/2012	10:27:36 PM	PH3 valve closed
2/22/2012	10:27:36 PM	SiCl4 pre valve closed
2/22/2012	10:27:36 PM	SiCl4 post valve closed
2/22/2012	10:27:36 PM	Main Vac valve closed
2/22/2012	10:27:36 PM	Bypass valve closed
2/22/2012	10:27:36 PM	Helium valve opened
2/22/2012	10:27:36 PM	Bubbler valve opened
2/22/2012	10:27:36 PM	Helium MFC set to  500.000000
2/22/2012	10:27:36 PM	H2 MFC set to  0.000000
2/22/2012	10:27:36 PM	BCl3 MFC set to  0.000000
2/22/2012	10:27:36 PM	PH3 MFC set to  0.000000
2/22/2012	10:27:36 PM	SiCl4 MFC set to  0.000000
2/22/2012	10:27:36 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	10:27:36 PM	Tube furnace set to 750
2/22/2012	10:29:36 PM	H2 valve closed
2/22/2012	10:29:36 PM	BCl3 valve closed
2/22/2012	10:29:36 PM	PH3 valve closed
2/22/2012	10:29:36 PM	SiCl4 pre valve closed
2/22/2012	10:29:36 PM	SiCl4 post valve closed
2/22/2012	10:29:36 PM	Main Vac valve closed
2/22/2012	10:29:36 PM	Bypass valve closed
2/22/2012	10:29:36 PM	Helium valve opened
2/22/2012	10:29:36 PM	Bubbler valve opened
2/22/2012	10:29:36 PM	Helium MFC set to  500.000000
2/22/2012	10:29:36 PM	H2 MFC set to  0.000000
2/22/2012	10:29:36 PM	BCl3 MFC set to  0.000000
2/22/2012	10:29:36 PM	PH3 MFC set to  0.000000
2/22/2012	10:29:36 PM	SiCl4 MFC set to  0.000000
2/22/2012	10:29:36 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	10:29:36 PM	Tube furnace set to 0
2/22/2012	10:49:36 PM	Helium valve closed
2/22/2012	10:49:36 PM	H2 valve closed
2/22/2012	10:49:36 PM	BCl3 valve closed
2/22/2012	10:49:36 PM	PH3 valve closed
2/22/2012	10:49:36 PM	SiCl4 pre valve closed
2/22/2012	10:49:36 PM	SiCl4 post valve closed
2/22/2012	10:49:36 PM	Main Vac valve closed
2/22/2012	10:49:36 PM	Bypass valve closed
2/22/2012	10:49:36 PM	Bubbler valve closed
2/22/2012	10:49:36 PM	Helium MFC set to  0.000000
2/22/2012	10:49:36 PM	H2 MFC set to  0.000000
2/22/2012	10:49:36 PM	BCl3 MFC set to  0.000000
2/22/2012	10:49:36 PM	PH3 MFC set to  0.000000
2/22/2012	10:49:36 PM	SiCl4 MFC set to  0.000000
2/22/2012	10:49:36 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	10:49:36 PM	Tube furnace set to 0
2/22/2012	10:49:37 PM	Helium valve closed
2/22/2012	10:49:37 PM	H2 valve closed
2/22/2012	10:49:37 PM	BCl3 valve closed
2/22/2012	10:49:37 PM	PH3 valve closed
2/22/2012	10:49:37 PM	SiCl4 pre valve closed
2/22/2012	10:49:37 PM	SiCl4 post valve closed
2/22/2012	10:49:37 PM	Main Vac valve closed
2/22/2012	10:49:37 PM	Bubbler valve closed
2/22/2012	10:49:37 PM	Bypass valve opened
2/22/2012	10:49:37 PM	Helium MFC set to  0.000000
2/22/2012	10:49:37 PM	H2 MFC set to  0.000000
2/22/2012	10:49:37 PM	BCl3 MFC set to  0.000000
2/22/2012	10:49:37 PM	PH3 MFC set to  0.000000
2/22/2012	10:49:37 PM	SiCl4 MFC set to  0.000000
2/22/2012	10:49:37 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	10:49:37 PM	Tube furnace set to 0
2/22/2012	10:50:28 PM	Helium valve closed
2/22/2012	10:50:28 PM	H2 valve closed
2/22/2012	10:50:28 PM	BCl3 valve closed
2/22/2012	10:50:28 PM	PH3 valve closed
2/22/2012	10:50:28 PM	SiCl4 pre valve closed
2/22/2012	10:50:28 PM	SiCl4 post valve closed
2/22/2012	10:50:28 PM	Main Vac valve closed
2/22/2012	10:50:28 PM	Bubbler valve closed
2/22/2012	10:50:28 PM	Bypass valve opened
2/22/2012	10:50:28 PM	Helium MFC set to  0.000000
2/22/2012	10:50:28 PM	H2 MFC set to  0.000000
2/22/2012	10:50:28 PM	BCl3 MFC set to  0.000000
2/22/2012	10:50:28 PM	PH3 MFC set to  0.000000
2/22/2012	10:50:28 PM	SiCl4 MFC set to  0.000000
2/22/2012	10:50:28 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	10:50:28 PM	Tube furnace set to 0
2/22/2012	10:51:28 PM	Helium valve closed
2/22/2012	10:51:28 PM	H2 valve closed
2/22/2012	10:51:28 PM	BCl3 valve closed
2/22/2012	10:51:28 PM	PH3 valve closed
2/22/2012	10:51:28 PM	SiCl4 pre valve closed
2/22/2012	10:51:28 PM	SiCl4 post valve closed
2/22/2012	10:51:28 PM	Bypass valve closed
2/22/2012	10:51:28 PM	Bubbler valve closed
2/22/2012	10:51:28 PM	Main Vac valve opened
2/22/2012	10:51:28 PM	Helium MFC set to  0.000000
2/22/2012	10:51:28 PM	H2 MFC set to  0.000000
2/22/2012	10:51:28 PM	BCl3 MFC set to  0.000000
2/22/2012	10:51:28 PM	PH3 MFC set to  0.000000
2/22/2012	10:51:28 PM	SiCl4 MFC set to  0.000000
2/22/2012	10:51:28 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	10:51:28 PM	Tube furnace set to 0
2/22/2012	10:51:29 PM	Run finished at 10:51 PM
2/22/2012	10:59:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/22/2012	10:59:24 PM	Recipe started at 10:59 PM
2/22/2012	10:59:24 PM	Helium valve closed
2/22/2012	10:59:24 PM	H2 valve closed
2/22/2012	10:59:24 PM	BCl3 valve closed
2/22/2012	10:59:24 PM	PH3 valve closed
2/22/2012	10:59:24 PM	SiCl4 pre valve closed
2/22/2012	10:59:24 PM	SiCl4 post valve closed
2/22/2012	10:59:24 PM	Main Vac valve closed
2/22/2012	10:59:24 PM	Bypass valve closed
2/22/2012	10:59:24 PM	Bubbler valve closed
2/22/2012	10:59:24 PM	Helium MFC set to  0.000000
2/22/2012	10:59:24 PM	H2 MFC set to  0.000000
2/22/2012	10:59:24 PM	BCl3 MFC set to  0.000000
2/22/2012	10:59:24 PM	PH3 MFC set to  0.000000
2/22/2012	10:59:24 PM	SiCl4 MFC set to  0.000000
2/22/2012	10:59:24 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	10:59:24 PM	Tube furnace set to 0
2/22/2012	10:59:27 PM	H2 valve closed
2/22/2012	10:59:27 PM	BCl3 valve closed
2/22/2012	10:59:27 PM	PH3 valve closed
2/22/2012	10:59:27 PM	SiCl4 pre valve closed
2/22/2012	10:59:27 PM	SiCl4 post valve closed
2/22/2012	10:59:27 PM	Main Vac valve closed
2/22/2012	10:59:27 PM	Bypass valve closed
2/22/2012	10:59:27 PM	Bubbler valve closed
2/22/2012	10:59:27 PM	Helium valve opened
2/22/2012	10:59:27 PM	Helium MFC set to  500.000000
2/22/2012	10:59:27 PM	H2 MFC set to  0.000000
2/22/2012	10:59:27 PM	BCl3 MFC set to  0.000000
2/22/2012	10:59:27 PM	PH3 MFC set to  0.000000
2/22/2012	10:59:27 PM	SiCl4 MFC set to  0.000000
2/22/2012	10:59:27 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	10:59:27 PM	Tube furnace set to 0
2/22/2012	11:00:31 PM	Helium valve closed
2/22/2012	11:00:31 PM	H2 valve closed
2/22/2012	11:00:31 PM	BCl3 valve closed
2/22/2012	11:00:31 PM	PH3 valve closed
2/22/2012	11:00:31 PM	SiCl4 pre valve closed
2/22/2012	11:00:31 PM	SiCl4 post valve closed
2/22/2012	11:00:31 PM	Main Vac valve closed
2/22/2012	11:00:31 PM	Bypass valve closed
2/22/2012	11:00:31 PM	Bubbler valve closed
2/22/2012	11:00:31 PM	Helium MFC set to  0.000000
2/22/2012	11:00:31 PM	H2 MFC set to  0.000000
2/22/2012	11:00:31 PM	BCl3 MFC set to  0.000000
2/22/2012	11:00:31 PM	PH3 MFC set to  0.000000
2/22/2012	11:00:31 PM	SiCl4 MFC set to  0.000000
2/22/2012	11:00:31 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:00:31 PM	Tube furnace set to 0
2/22/2012	11:00:32 PM	Run finished at 11:00 PM
2/22/2012	11:00:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/22/2012	11:02:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/22/2012	11:02:40 PM	Recipe started at 11:02 PM
2/22/2012	11:02:40 PM	Helium valve closed
2/22/2012	11:02:40 PM	H2 valve closed
2/22/2012	11:02:40 PM	BCl3 valve closed
2/22/2012	11:02:40 PM	PH3 valve closed
2/22/2012	11:02:40 PM	SiCl4 pre valve closed
2/22/2012	11:02:40 PM	SiCl4 post valve closed
2/22/2012	11:02:40 PM	Main Vac valve closed
2/22/2012	11:02:40 PM	Bubbler valve closed
2/22/2012	11:02:40 PM	Bypass valve opened
2/22/2012	11:02:40 PM	Helium MFC set to  0.000000
2/22/2012	11:02:40 PM	H2 MFC set to  0.000000
2/22/2012	11:02:40 PM	BCl3 MFC set to  0.000000
2/22/2012	11:02:40 PM	PH3 MFC set to  0.000000
2/22/2012	11:02:40 PM	SiCl4 MFC set to  0.000000
2/22/2012	11:02:40 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:02:40 PM	Tube furnace set to 0
2/22/2012	11:03:40 PM	Helium valve closed
2/22/2012	11:03:40 PM	H2 valve closed
2/22/2012	11:03:40 PM	BCl3 valve closed
2/22/2012	11:03:40 PM	PH3 valve closed
2/22/2012	11:03:40 PM	SiCl4 pre valve closed
2/22/2012	11:03:40 PM	SiCl4 post valve closed
2/22/2012	11:03:40 PM	Main Vac valve closed
2/22/2012	11:03:40 PM	Bubbler valve closed
2/22/2012	11:03:40 PM	Bypass valve opened
2/22/2012	11:03:40 PM	Helium MFC set to  0.000000
2/22/2012	11:03:40 PM	H2 MFC set to  0.000000
2/22/2012	11:03:40 PM	BCl3 MFC set to  0.000000
2/22/2012	11:03:40 PM	PH3 MFC set to  0.000000
2/22/2012	11:03:40 PM	SiCl4 MFC set to  0.000000
2/22/2012	11:03:40 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:03:40 PM	Tube furnace set to 0
2/22/2012	11:04:40 PM	Helium valve closed
2/22/2012	11:04:40 PM	H2 valve closed
2/22/2012	11:04:40 PM	BCl3 valve closed
2/22/2012	11:04:40 PM	PH3 valve closed
2/22/2012	11:04:40 PM	SiCl4 pre valve closed
2/22/2012	11:04:40 PM	SiCl4 post valve closed
2/22/2012	11:04:40 PM	Bypass valve closed
2/22/2012	11:04:40 PM	Bubbler valve closed
2/22/2012	11:04:40 PM	Main Vac valve opened
2/22/2012	11:04:40 PM	Helium MFC set to  0.000000
2/22/2012	11:04:40 PM	H2 MFC set to  0.000000
2/22/2012	11:04:40 PM	BCl3 MFC set to  0.000000
2/22/2012	11:04:40 PM	PH3 MFC set to  0.000000
2/22/2012	11:04:40 PM	SiCl4 MFC set to  0.000000
2/22/2012	11:04:40 PM	Bypass solenoid MFC set to  0.000000
2/22/2012	11:04:40 PM	Tube furnace set to 0
2/22/2012	11:04:41 PM	Run finished at 11:04 PM
2/22/2012	11:04:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
